公开(公告)号：US07498911B2

公开(公告)日：2009-03-03

申请号：US10785205

申请日：2004-02-24

Applicant: David Forehand

Inventor： David Forehand

IPC: H01H51/22

CPC classification number: B81B3/0081 ,  B81B3/001 ,  B81B2201/018 ,  H01H59/0009

Abstract: The present invention provides a method and apparatus for reducing temperature dependency within Microelectromechanical System (MEMS) switches. The two typical designs for such MEMS switches are fixed-fixed and fixed-free designs. Springs are used in the fixed-fixed design to account for dimensional changes as a result of thermal expansion. The fixed-free designs utilize a tether to prevent a cantilever arm from deforming as a result of thermal expansions, as well as reducing tight controls in the manufacture of fixed-free MEMS switches. Additionally, to prevent stiction in MEMS switches, a variegated electrode design is provided to utilize internal stresses of a suspended beam to increase the restoring force while not increasing the actuation force.

Abstract translation: 本发明提供了一种用于降低微机电系统（MEMS）开关内的温度依赖性的方法和装置。 这种MEMS开关的两个典型设计是固定和固定设计。 弹簧用于固定固定设计，以解释由于热膨胀导致的尺寸变化。 无固定设计利用系绳防止悬臂由于热膨胀而变形，以及减少制造无固定MEMS开关的严格控制。 另外，为了防止MEMS开关中的静电，提供了多样化的电极设计，以利用悬挂梁的内部应力来增加恢复力而不增加致动力。

公开(公告)号：US20050012577A1

公开(公告)日：2005-01-20

申请号：US10914537

申请日：2004-08-09

Applicant: Brandon Pillans ,  David Forehand

Inventor： Brandon Pillans ,  David Forehand

IPC: H01H1/06 ,  H01H59/00 ,  H01H51/22

CPC classification number: B81B3/0008 ,  B81B3/001 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/04 ,  H01H1/06 ,  H01H59/0009 ,  H01H2059/0018 ,  H01H2059/0072

Abstract: A micro-electro-mechanical (MEMS) switch (10, 110) has an electrode (22, 122) covered by a dielectric layer (23, 123), and has a flexible conductive membrane (31, 131) which moves between positions spaced from and engaging the dielectric layer. At least one of the membrane and dielectric layer has a textured surface (138) that engages the other thereof in the actuated position. The textured surface reduces the area of physical contact through which electric charge from the membrane can tunnel into and become trapped within the dielectric layer. This reduces the amount of trapped charge that could act to latch the membrane in its actuated position, which in turn effects a significant increase in the operational lifetime of the switch.

Abstract translation: 微电子机械（MEMS）开关（10,110）具有由电介质层（23,123）覆盖的电极（22,122），并且具有柔性导电膜（31,131），其在间隔开的位置 从电介质层接合和接合。 膜和电介质层中的至少一个具有纹理化表面（138），其在致动位置与另一个接合。 纹理表面减小了物理接触的面积，通过该面积，来自膜的电荷可以穿透入电介质层并被捕获在电介质层内。 这减少了可能用于将膜闩锁在其致动位置的捕获电荷的量，这反过来又显着地增加了开关的使用寿命。

公开(公告)号：US20050077987A1

公开(公告)日：2005-04-14

申请号：US10785205

申请日：2004-02-24

Applicant: David Forehand

Inventor： David Forehand

IPC: H01H51/22

CPC classification number: B81B3/0081 ,  B81B3/001 ,  B81B2201/018 ,  H01H59/0009

Abstract: The present invention provides a method and apparatus for reducing temperature dependency within Microelectromechanical System (MEMS) switches. The two typical designs for such MEMS switches are fixed-fixed and fixed-free designs. Springs are used in the fixed-fixed design to account for dimensional changes as a result of thermal expansion. The fixed-free designs utilize a tether to prevent a cantilever arm from deforming as a result of thermal expansions, as well as reducing tight controls in the manufacture of fixed-free MEMS switches. Additionally, to prevent stiction in MEMS switches, a variegated electrode design is provided to utilize internal stresses of a suspended beam to increase the restoring force while not increasing the actuation force.

Abstract translation: 本发明提供了一种用于降低微机电系统（MEMS）开关内的温度依赖性的方法和装置。 这种MEMS开关的两个典型设计是固定和固定设计。 弹簧用于固定固定设计，以解释由于热膨胀导致的尺寸变化。 无固定设计利用系绳防止悬臂由于热膨胀而变形，以及减少制造无固定MEMS开关的严格控制。 另外，为了防止MEMS开关中的静电，提供了多样化的电极设计，以利用悬挂梁的内部应力来增加恢复力而不增加致动力。

公开(公告)号：US08309387B2

公开(公告)日：2012-11-13

申请号：US12102843

申请日：2008-04-14

Applicant: David Forehand

Inventor： David Forehand

IPC: H01L21/00 ,  H01L31/00

CPC classification number: H01L31/1828 ,  H01L31/073 ,  Y02E10/543 ,  Y02P70/521

Abstract: A method of making thermodynamically stable, diffusion-impeded barrier layers within, for example, a photovoltaic cell with a metal-containing electrical contact using exposure to fluorine. Exposing the cadmium telluride surface to fluorine creates a Te-poor barrier layer of cadmium fluoride. Once that barrier layer is formed, the metal-containing electrical contact may be applied or formed. The barrier layer allows tunneling current to occur between the p-type layer and the metal-containing electrical contact establishing a low-resistance, highly uniform, and thermally stable electrical contact.

Abstract translation: 在例如具有含金属的电接触的光伏电池中使用暴露于氟的方法制造热力学稳定的，扩散阻碍的阻挡层的方法。 将碲化镉表面暴露于氟会导致氟化镉阻挡层的Te-poor。 一旦形成了阻挡层，就可以施加或形成含金属的电接触。 阻挡层允许在p型层和含金属的电接触之间发生隧道电流，从而建立低电阻，高度均匀和热稳定的电接触。

公开(公告)号：US20080251119A1

公开(公告)日：2008-10-16

申请号：US12102843

申请日：2008-04-14

Applicant: David Forehand

Inventor： David Forehand

IPC: H01L31/06 ,  H01L31/18

CPC classification number: H01L31/1828 ,  H01L31/073 ,  Y02E10/543 ,  Y02P70/521

Abstract: A method of making thermodynamically stable, diffusion-impeded barrier layers within, for example, a photovoltaic cell with a metal-containing electrical contact using exposure to fluorine. Exposing the cadmium telluride surface to fluorine creates a Te-poor barrier layer of cadmium fluoride. Once that barrier layer is formed, the metal-containing electrical contact may be applied or formed. The barrier layer allows tunneling current to occur between the p-type layer and the metal-containing electrical contact establishing a low-resistance, highly uniform, and thermally stable electrical contact.

Abstract translation: 在例如具有含金属的电接触的光伏电池中使用暴露于氟的方法制造热力学稳定的，扩散阻碍的阻挡层的方法。 将碲化镉表面暴露于氟会导致氟化镉阻挡层的Te-poor。 一旦形成了阻挡层，就可以施加或形成含金属的电接触。 阻挡层允许在p型层和含金属的电接触之间发生隧道电流，从而建立低电阻，高度均匀和热稳定的电接触。