公开(公告)号：US20150035122A1

公开(公告)日：2015-02-05

申请号：US14520686

申请日：2014-10-22

Applicant: International Business Machines Corporation

Inventor： Christopher V. JAHNES ,  Anthony K. STAMPER

IPC: B81B3/00

CPC classification number: B81B3/001 ,  B81B3/0008 ,  B81B3/0013 ,  B81B2201/0221 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/019 ,  B81C1/0015 ,  H01G5/18

Abstract: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming at least one fixed electrode on a substrate. The method further includes forming a Micro-Electro-Mechanical System (MEMS) beam with a varying width dimension, as viewed from a top of the MEMS beam, over the at least one fixed electrode.

Abstract translation: 公开了微机电系统（MEMS）结构，制造方法和设计结构。 该方法包括在衬底上形成至少一个固定电极。 该方法还包括在至少一个固定电极上形成从MEMS光束的顶部观察的具有变化的宽度尺寸的微机电系统（MEMS）光束。

公开(公告)号：US20140268482A1

公开(公告)日：2014-09-18

申请号：US14216213

申请日：2014-03-17

Applicant: Wispry, Inc.

Inventor： Dana DeReus ,  Shawn J. Cunningham ,  Arthur S. Morris, III

IPC: H02N1/00 ,  B81B3/00 ,  H01G5/16

CPC classification number: B81B3/001 ,  B81B3/0051 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/04 ,  B81B2203/053 ,  H01G4/1227 ,  H01G5/18

Abstract: Devices and methods of operating partitioned actuator plates to obtain a desirable shape of a movable component of a micro-electro-mechanical system (MEMS) device. The subject matter described herein can in some embodiments include a micro-electro-mechanical system (MEMS) device including a plurality of actuation electrodes attached to a first surface, where each of the one or more actuation electrode being independently controllable, and a movable component spaced apart from the first surface and movable with respect to the first surface. Where the movable component further includes one or more movable actuation electrodes spaced apart from the plurality of fixed actuation electrodes.

Abstract translation: 操作分隔的致动器板以获得微机电系统（MEMS）装置的可移动部件的期望形状的装置和方法。 本文描述的主题可以在一些实施例中包括微电子机械系统（MEMS）装置，其包括附接到第一表面的多个致动电极，其中所述一个或多个致动电极中的每一个可独立控制，以及可移动部件 与第一表面间隔开并可相对于第一表面移动。 在可移动部件还包括与多个固定致动电极间隔开的一个或多个可动致动电极的地方。

公开(公告)号：US08836055B2

公开(公告)日：2014-09-16

申请号：US13250078

申请日：2011-09-30

Applicant: Lung Yuan Pan ,  Lan-Lin Chao ,  Chia-Shiung Tsai

Inventor： Lung Yuan Pan ,  Lan-Lin Chao ,  Chia-Shiung Tsai

IPC: H01L31/115

CPC classification number: H01G5/18 ,  B81B3/001 ,  B81B2201/0221 ,  H01L28/60

Abstract: A device includes a micro-electro-mechanical system (MEMS) device, which includes a movable element and a fixed element. The movable element and the fixed element form two capacitor plates of a capacitor, with an air-gap between the movable element and the fixed element acting as a capacitor insulator of the capacitor. At least one of the movable element and the fixed element has a rugged surface.

Abstract translation: 一种装置包括微电子机械系统（MEMS）装置，其包括可移动元件和固定元件。 可移动元件和固定元件形成电容器的两个电容器板，可动元件和固定元件之间的气隙用作电容器的电容器绝缘体。 可移动元件和固定元件中的至少一个具有粗糙的表面。

公开(公告)号：US08800371B2

公开(公告)日：2014-08-12

申请号：US13415526

申请日：2012-03-08

Applicant: Sheng Jui Chen ,  Hsiao Hsi Pan

Inventor： Sheng Jui Chen ,  Hsiao Hsi Pan

IPC: G01P15/18 ,  G01P15/13 ,  G01P15/125

CPC classification number: G01P15/131 ,  B81B3/0021 ,  B81B2201/0221 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/053 ,  G01L1/086 ,  G01P15/125 ,  G01P15/18

Abstract: An electrostatic force generator is disclosed. The electrostatic force generator includes an RF AC voltage source, a capacitive module, a resonant capacitive-inductive bridge (CIB) module, a lock-in amplifier module, and a proportional-integral-derivative (PID) controller. The resonant capacitive-inductive bridge module converts the differential capacitance to a differential signal. The differential signal from the resonant capacitive-inductive bridge module is demodulated at the RF excitation frequency by the lock-in amplifier module. The PID controller receives the output signal from the lock-in amplifier module and generates two audio frequency AC signals to generate a compensation electrostatic force and maintain the capacitance balance inside the capacitive module.

Abstract translation: 公开了静电力发生器。 静电力发生器包括RF AC电压源，电容性模块，谐振电容感应桥（CIB）模块，锁定放大器模块和比例积分微分（PID）控制器。 谐振电容电感桥模块将差分电容转换为差分信号。 来自谐振电感电感桥模块的差分信号通过锁相放大器模块以RF激励频率进行解调。 PID控制器从锁定放大器模块接收输出信号，并产生两个音频AC信号，产生补偿静电力，并保持电容模块内的电容平衡。

公开(公告)号：US20140217552A1

公开(公告)日：2014-08-07

申请号：US14249890

申请日：2014-04-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yoshihiro KONAKA ,  Toshiya KAWATE

IPC: H01L29/93

CPC classification number: H01L29/93 ,  B81B2201/0221 ,  B81C1/00976 ,  H01G5/16 ,  H01L23/642 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A variable capacitance device includes a fixed substrate, a movable portion, driving electrodes, an RF capacitance electrode and an insulating film. The movable portion faces the fixed substrate and can change a gap between the movable portion and the fixed substrate. The driving electrodes are formed on the fixed substrate so as to face the movable portion. The RF capacitance electrode is formed on the fixed substrate so as to face the movable portion and be spaced apart from the driving electrodes. The insulating film is formed between the movable portion and the driving electrodes. The level of a voltage applied to the driving electrodes and the level of a voltage applied to the movable portion are periodically switched and the level of a voltage applied to the RF capacitance electrode and the level of a voltage applied to the movable portion are always the same.

Abstract translation: 可变电容器件包括固定衬底，可动部分，驱动电极，RF电容电极和绝缘膜。 可移动部分面向固定基板并且可以改变可移动部分和固定基板之间的间隙。 驱动电极形成在固定基板上以面对可动部分。 RF电容电极形成在固定基板上，以面对可动部分并与驱动电极间隔开。 绝缘膜形成在可动部和驱动电极之间。 施加到驱动电极的电压的电平和施加到可动部分的电压的电平被周期性地切换，并且施加到RF电容电极的电压的电平和施加到可动部分的电压的电平总是 相同。

公开(公告)号：US08739096B2

公开(公告)日：2014-05-27

申请号：US13326409

申请日：2011-12-15

Applicant: Christopher V. Jahnes ,  Anthony K. Stamper

Inventor： Christopher V. Jahnes ,  Anthony K. Stamper

IPC: G06F17/50 ,  H01L29/02

CPC classification number: H01G5/18 ,  B81B2201/0221 ,  B81C99/0065 ,  H01G5/38 ,  H03H3/0076

Abstract: Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming for MEMS capacitor devices, and design structures are disclosed. The method includes identifying a process variation related to a formation of micro-electro-mechanical structure (MEMS) capacitor devices across a substrate. The method further includes providing design offsets or process offsets in electrode areas of the MEMS capacitor devices across the substrate, based on the identified process variation.

Abstract translation: 公开了微电子机械结构（MEMS）电容器件，用于MEMS电容器件的电容器微调和设计结构。 该方法包括识别跨越衬底形成微机电结构（MEMS）电容器器件的过程变化。 该方法还包括基于所识别的过程变化，在跨越衬底的MEMS电容器器件的电极区域中提供设计偏移或过程偏移。

公开(公告)号：US20140133685A1

公开(公告)日：2014-05-15

申请号：US13673324

申请日：2012-11-09

Applicant: Invensense, Inc.

Inventor： Fang Liu ,  Kuang L. Yang

IPC: H04R1/04

CPC classification number: H04R19/04 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2201/0257 ,  H04R1/2807 ,  H04R3/005 ,  H04R7/06 ,  H04R7/20 ,  H04R19/005 ,  H04R31/006

Abstract: A microphone system has two diaphragms and are mechanically interconnected such that they respond in antiphase to an acoustic signal impinging on one of the diaphragms. The two diaphragms produce two variable capacitances that vary proportionately but inversely to one another. Voltage signals produced by the two variable capacitances are summed to provide an output signal proportional to the acoustic signal, but with greater sensitivity than a single-diaphragm microphone.

Abstract translation: 麦克风系统具有两个隔膜并且机械互连，使得它们反向响应于撞击在其中一个隔膜上的声学信号。 两个隔膜产生两个可变电容，这些电容彼此成比例地但是相反地变化。 由两个可变电容产生的电压信号被相加以提供与声信号成比例的输出信号，但是具有比单隔膜麦克风更高的灵敏度。

公开(公告)号：US08618715B2

公开(公告)日：2013-12-31

申请号：US13018696

申请日：2011-02-01

Applicant: Takeaki Shimanouchi ,  Masahiko Imai ,  Takashi Katsuki ,  Osamu Toyoda ,  Satoshi Ueda

Inventor： Takeaki Shimanouchi ,  Masahiko Imai ,  Takashi Katsuki ,  Osamu Toyoda ,  Satoshi Ueda

IPC: H02N1/00 ,  G09G3/34

CPC classification number: B81C1/00698 ,  B81B2201/0221 ,  H01G5/18

Abstract: A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage.

Abstract translation: 一种用于驱动静电致动器的驱动方法，所述静电致动器包括固定电极和可动电极，所述固定电极和可动电极之间具有介电层彼此相对，包括在所述固定电极和所述可动电极之间施加第一电压以使所述可动电极与所述可动电极接触 并且在施加第一电压之后并且在可移动电极远离电介质层之前，在固定电极和可动电极之间施加第二电压。 这里，第二电压具有与第一电压的极性相反的极性和小于第一电压的绝对值的绝对值。

公开(公告)号：US20130071964A1

公开(公告)日：2013-03-21

申请号：US13610219

申请日：2012-09-11

Applicant: Ayako Kato ,  Kazutoshi Torashima

Inventor： Ayako Kato ,  Kazutoshi Torashima

IPC: H01L21/02

CPC classification number: B06B1/0292 ,  B81B3/0075 ,  B81B2201/0221 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/0392 ,  H04R19/005 ,  H04R31/00

Abstract: Provided is a method of manufacturing an electromechanical transducer having a reduced variation in a breakdown strength caused by a variation in flatness of an insulating layer. In the method of manufacturing the electromechanical transducer, a first insulating layer is formed on a first substrate, a barrier wall is formed by removing a part of the first insulating layer, and a second insulating layer is formed on a region of the first substrate after the part of the first insulating layer has been removed. Next, a gap is formed by bonding a second substrate on the barrier wall, and a vibration film that is opposed to the second insulating layer via the gap is formed from the second substrate. In the forming of the barrier wall, a height on a gap side in a direction vertical to the first substrate becomes lower than a height of a center portion.

Abstract translation: 提供一种制造机电换能器的方法，其具有由绝缘层的平坦度的变化引起的击穿强度的变化减小。 在制造机电换能器的方法中，在第一基板上形成第一绝缘层，通过去除第一绝缘层的一部分形成阻挡壁，在第一基板的区域上形成第二绝缘层， 第一绝缘层的部分已被去除。 接下来，通过在阻挡壁上接合第二基板形成间隙，并且通过间隙形成与第二绝缘层相对的振动膜。 在形成阻挡壁时，与第一基板垂直的方向上的间隙侧的高度比中心部的高度低。

公开(公告)号：US20120319174A1

公开(公告)日：2012-12-20

申请号：US13581499

申请日：2010-07-28

Applicant: Zhe Wang

Inventor： Zhe Wang

IPC: H01L29/84 ,  H01L21/02

CPC classification number: H04R31/00 ,  B81B2201/0221 ,  B81B2201/0257 ,  B81B2207/015 ,  B81C1/00246 ,  B81C2203/0714 ,  B81C2203/0735 ,  H04R19/005 ,  H04R19/04

Abstract: The present invention relates to a CMOS compatible MEMS microphone, comprising: an SOI substrate, wherein a CMOS circuitry is accommodated on its silicon device layer; a microphone diaphragm formed with a part of the silicon device layer, wherein the microphone diaphragm is doped to become conductive; a microphone backplate including CMOS passivation layers with a metal layer sandwiched and a plurality of through holes, provided above the silicon device layer, wherein the plurality of through holes are formed in the portions thereof opposite to the microphone diaphragm, and the metal layer forms an electrode plate of the backplate; a plurality of dimples protruding from the lower surface of the microphone backplate opposite to the diaphragm; and an air gap, provided between the diaphragm and the microphone backplate, wherein a spacer forming a boundary of the air gap is provided outside of the diaphragm or on the edge of the diaphragm; wherein a back hole is formed to be open in substrate underneath the diaphragm so as to allow sound pass through, and the microphone diaphragm is used as an electrode plate to form a variable capacitive sensing element with the electrode plate of the microphone backplate.

Abstract translation: 本发明涉及一种CMOS兼容MEMS麦克风，包括：SOI衬底，其中CMOS电路容纳在其硅器件层上; 形成有硅器件层的一部分的麦克风隔膜，其中所述麦克风隔膜被掺杂以变成导电; 麦克风背板，其具有夹在金属层上的CMOS钝化层和设置在硅器件层上方的多个通孔，其中多个通孔形成在与麦克风隔膜相对的部分中，并且金属层形成 背板电极板; 从所述麦克风背板的与所述隔膜相对的下表面突出的多个凹坑; 以及设置在隔膜和麦克风背板之间的气隙，其中形成气隙边界的间隔件设置在隔膜的外侧或隔膜的边缘上; 其特征在于，在所述振动板的下方的基板上形成有开放的孔，以使声音通过，所述麦克风隔膜用作电极板，以形成具有所述麦克风背板的电极板的可变电容感测元件。