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公开(公告)号：US10935509B2
公开(公告)日：2021-03-02
申请号：US16786361
申请日：2020-02-10
Applicant: INVENSENSE, INC.
Inventor： Fang Liu , Peter Hartwell , Martin Lim , Yushi Yang
Abstract: The present invention relates to methods for detecting gases in an environment using chemical and thermal sensing. In one embodiment, a method includes exposing a chemiresistor embedded within a sensor pixel to a gas in an environment; setting a heater embedded within the sensor pixel to a sensing temperature, the sensing temperature being greater than room temperature; measuring an electrical resistance of the chemiresistor in response to setting the heater to the sensing temperature; and in response to a difference between the electrical resistance of the chemiresistor and a reference electrical resistance being less than a threshold, supplying a fixed power input to the heater embedded within the sensor pixel and measuring a temperature of the sensor pixel relative to a reference temperature.
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公开(公告)号：US10891461B2
公开(公告)日：2021-01-12
申请号：US15601934
申请日：2017-05-22
Applicant: INVENSENSE, INC.
Inventor： Fang Liu , Peter Hartwell , Martin Lim
Abstract: Facilitating live fingerprint detection utilizing an integrated ultrasound and infrared (IR) sensor is presented herein. A fingerprint sensor can comprise a first substrate comprising the IR sensor, and a second substrate comprising an ultrasonic transducer. The second substrate is attached to a top portion of the first substrate, and a temperature output of the IR sensor facilitates a determination that a fingerprint output of the ultrasonic transducer corresponds to a finger. The IR sensor can comprise polysilicon comprising a thermopile and an array of photonic crystals thermally coupled to the thermopile.
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公开(公告)号：US20180340901A1
公开(公告)日：2018-11-29
申请号：US16038499
申请日：2018-07-18
Applicant: INVENSENSE, INC.
Inventor： Fang Liu , Martin Lim , Baris Cagdaser
IPC: G01N27/04 , G01N27/414 , G01K7/16 , G01N27/12
Abstract: The present invention relates to low power, low cost, and compact gas sensors and methods for making the same. In one embodiment, the gas sensor includes a heating element embedded in a suspended structure overlying a substrate. The heating element is configured to generate an amount of heat to bring the chemical sensing element to an operating temperature. The chemical sensing element is thermally coupled to the heating element. The chemical sensing element is also exposed to an environment that contains the gas to be measured. In one embodiment, the chemical sensing element comprises a metal oxide compound having an electrical resistance based on the concentration of a gas in the environment and the operating temperature of the chemical sensing element. In this embodiment, the operating temperature of the chemical sensing element is greater than room temperature and determined by the amount of heat generated by the heating element.
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公开(公告)号：US20170067841A1
公开(公告)日：2017-03-09
申请号：US14849551
申请日：2015-09-09
Applicant: INVENSENSE, INC.
Inventor： Fang Liu , Martin Lim , Baris Cagdaser
CPC classification number: G01N27/046 , G01K7/16 , G01N27/128 , G01N27/4148
Abstract: The present invention relates to low power, low cost, and compact gas sensors and methods for making the same. In one embodiment, the gas sensor includes a heating element embedded in a suspended structure overlying a substrate. The heating element is configured to generate an amount of heat to bring the chemical sensing element to an operating temperature. The chemical sensing element is thermally coupled to the heating element. The chemical sensing element is also exposed to an environment that contains the gas to be measured. In one embodiment, the chemical sensing element comprises a metal oxide compound having an electrical resistance based on the concentration of a gas in the environment and the operating temperature of the chemical sensing element. In this embodiment, the operating temperature of the chemical sensing element is greater than room temperature and determined by the amount of heat generated by the heating element.
Abstract translation: 本发明涉及低功率，低成本和小型气体传感器及其制造方法。 在一个实施例中，气体传感器包括嵌入在衬底上的悬挂结构中的加热元件。 加热元件构造成产生一定量的热量以使化学传感元件达到工作温度。 化学传感元件热耦合到加热元件。 化学传感元件也暴露于含有待测气体的环境中。 在一个实施方案中，化学传感元件包括基于环境中的气体浓度和化学传感元件的操作温度具有电阻的金属氧化物化合物。 在该实施例中，化学传感元件的工作温度大于室温，并由加热元件产生的热量确定。
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5.发明授权公开(公告)号：US09505614B2
公开(公告)日：2016-11-29
申请号：US14592844
申请日：2015-01-08
Applicant: Invensense, Inc.
Inventor： Fang Liu , Kuang L. Yang
CPC classification number: B81C1/00523 , B81B3/0078 , B81B2201/0257 , B81C1/00158
Abstract: A microphone system includes a diaphragm suspended by springs and including a sealing layer that seals passageways which, if left open, would degrade the microphone's frequency response by allowing air to pass from one side of the diaphragm to the other when the diaphragm is responding to an incident acoustic signal. In some embodiments, the sealing layer may include an equalization aperture to allow pressure to equalize on both sides of the diaphragm.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20160165331A1
公开(公告)日：2016-06-09
申请号：US14558911
申请日：2014-12-03
Applicant: INVENSENSE, INC.
Inventor： Fang Liu , Martin Lim
IPC: H04R1/08
CPC classification number: H04R1/08 , H04R19/005 , H04R2201/003
Abstract: A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a first substrate having a first surface and a second surface, and a port disposed through the first substrate, wherein the port is configured to receive acoustic waves and wherein the first surface is exposed to an environment outside the MEMS device; and a diaphragm coupled to and facing the second surface and configured to deflect in response to pressure differential at the diaphragm in response to the received acoustic waves. The MEMS device also includes a second substrate coupled to and facing the diaphragm, and including circuitry, wherein the second substrate includes a recess region forming an integrated back cavity in the MEMS device. The MEMS device also includes an electrical connection electrically coupling the first substrate and the second substrate and configured to transmit an electrical signal indicative of the deflection of the diaphragm.
Abstract translation: 提供了微机电系统（MEMS）装置。 MEMS器件包括：具有第一表面和第二表面的第一基底和通过第一基底设置的端口，其中端口被配置为接收声波，并且其中第一表面暴露于MEMS器件外部的环境; 以及耦合到第二表面并面对第二表面并且响应于接收的声波而被配置为响应于隔膜处的压力差而偏转的膜片。 MEMS器件还包括耦合到并面向隔膜的第二衬底，并且包括电路，其中第二衬底包括形成MEMS器件中的集成后腔的凹陷区域。 MEMS装置还包括电连接电连接第一基板和第二基板并被配置为传输指示隔膜的偏转的电信号。
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7.发明授权公开(公告)号：US08946831B2
公开(公告)日：2015-02-03
申请号：US13795861
申请日：2013-03-12
Applicant: Invensense, Inc.
Inventor： Fang Liu , Kuang L. Yang
CPC classification number: B81C1/00523 , B81B3/0078 , B81B2201/0257 , B81C1/00158
Abstract: A microphone system includes a diaphragm suspended by springs and including a sealing layer that seals passageways which, if left open, would degrade the microphone's frequency response by allowing air to pass from one side of the diaphragm to the other when the diaphragm is responding to an incident acoustic signal. In some embodiments, the sealing layer may include an equalization aperture to allow pressure to equalize on both sides of the diaphragm.
Abstract translation: 麦克风系统包括由弹簧悬挂的隔膜，并且包括密封层，该密封层密封通道，如果保持打开状态，则当隔膜响应于该隔膜时，通过允许空气从隔膜的一侧通过而将降低麦克风的频率响应 入射声信号。 在一些实施例中，密封层可以包括均衡孔，以允许压力在隔膜的两侧均衡。
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公开(公告)号：US20200173946A1
公开(公告)日：2020-06-04
申请号：US16786361
申请日：2020-02-10
Applicant: INVENSENSE, INC.
Inventor： Fang Liu , Peter Hartwell , Martin Lim , Yushi Yang
Abstract: The present invention relates to methods for detecting gases in an environment using chemical and thermal sensing. In one embodiment, a method includes exposing a chemiresistor embedded within a sensor pixel to a gas in an environment; setting a heater embedded within the sensor pixel to a sensing temperature, the sensing temperature being greater than room temperature; measuring an electrical resistance of the chemiresistor in response to setting the heater to the sensing temperature; and in response to a difference between the electrical resistance of the chemiresistor and a reference electrical resistance being less than a threshold, supplying a fixed power input to the heater embedded within the sensor pixel and measuring a temperature of the sensor pixel relative to a reference temperature.
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公开(公告)号：US09618405B2
公开(公告)日：2017-04-11
申请号：US14453326
申请日：2014-08-06
Applicant: INVENSENSE, INC.
Inventor： Fang Liu , Julius Ming-Lin Tsai , Xiang Li , Mike Daneman
CPC classification number: G01L1/165 , G06F3/0436 , H03K17/96 , H03K17/9643 , H03K2217/96003
Abstract: A piezoelectric acoustic resonator based sensor is presented herein. A device can include an array of piezoelectric transducers and an array of cavities that has been attached to the array of piezoelectric transducers to form an array of resonators. A resonator of the array of resonators can be associated with a first frequency response corresponding to a first determination that the resonator has been touched, and a second frequency response corresponding to a second determination that the resonator has not been touched. The array of piezoelectric transducers can include a piezoelectric material; a first set of electrodes that has been formed a first side of the piezoelectric material; and a second set of electrodes that has been formed on second side of the piezoelectric material.
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公开(公告)号：US09611133B2
公开(公告)日：2017-04-04
申请号：US14667169
申请日：2015-03-24
Applicant: INVENSENSE, INC.
Inventor： Fang Liu , Martin Lim , Jong Il Shin , Jongwoo Shin
CPC classification number: B81B3/001 , B81B2201/0235 , B81B2201/0242 , B81C2201/115 , B81C2203/0792
Abstract: Various embodiments provide for a method for roughening a surface of a MEMs device or the surface of a CMOS surface. A first material can be deposited in a thin layer over a surface made of a second material. After heating, the first and second materials, they can partially melt and interdiffuse, forming an alloy. The first material can then be removed and the alloy is removed at the same time. The surface of the second material that is left behind has then been roughened due to the interdiffusion of the first and second materials.
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