公开(公告)号：US5592338A

公开(公告)日：1997-01-07

申请号：US397768

申请日：1995-03-02

Applicant: Oberto Citterio

Inventor： Oberto Citterio

IPC: G02B5/10 ,  G21K1/06 ,  G02B5/08

CPC classification number: G02B5/10 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: Grazing incidence co-axial and confocal mirrors, used in particular for X-ray telescopes for astronomic observations, having a parabola/hyperbola double-cone truncated-cone structure, with polynomial sections or other geometric configurations, and consisting of an internal reflecting surface (15), in the form of a gold layer, an epoxy resin layer (14) and a supporting mechanical structural element (carrier) (11), formed of a ceramic material having physical-chemical properties improved compared to nickel and obtained according to the process of chemical vapor deposition (CVD) or other fabrication processes.

Abstract translation: 用于特别用于用于天文观测的X射线望远镜的掠射入射同轴和共焦反射镜，具有抛物线/双曲线双锥截锥锥结构，具有多项式截面或其他几何构造，并且由内部反射表面 15），金层形式的环氧树脂层（14）和支撑机械结构元件（载体）（11），由具有与镍相比提高的物理化学性质的陶瓷材料形成，并且根据 化学气相沉积（CVD）或其他制造工艺。

公开(公告)号：US5461657A

公开(公告)日：1995-10-24

申请号：US266749

申请日：1994-06-28

Applicant: Masami Hayashida ,  Yutaka Watanabe

Inventor： Masami Hayashida ,  Yutaka Watanabe

IPC: G03F7/20 ,  G21K1/06 ,  G21K1/00

CPC classification number: G03F7/70058 ,  G03F7/708 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: An X-ray mirror has a silicon carbide substrate having a convex cylindrical surface, and a carbon layer coated on a surface of said substrate to a thickness ranging from 10 nm to 1 .mu.m by evaporation, such as CVD. In the X-ray mirror in which the carbon layer is coated thereon beforehand, changes in the intensity of reflected light, caused by a contaminating carbon layer attached to the surface of the mirror, can be restricted. When such a mirror is used in an X-ray lithographic apparatus, the number of times the intensity of X-rays is measured or corrected or the mirror is cleaned can be greatly reduced.

Abstract translation: X射线镜具有具有凸圆柱形表面的碳化硅衬底和通过诸如CVD的蒸发在所述衬底的表面上涂覆至10nm至1μm的厚度的碳层。 在预先涂覆有碳层的X射线反射镜中，可以限制由附着在反射镜表面上的污染碳层引起的反射光强度的变化。 当在X射线光刻设备中使用这样的镜子时，可以大大减少测量或校正X射线强度或镜子被清洁的次数。

公开(公告)号：US5182763A

公开(公告)日：1993-01-26

申请号：US888275

申请日：1992-05-26

Applicant: Takashi Iizuka ,  Yutaka Watanabe ,  Yasuaki Fukuda

Inventor： Takashi Iizuka ,  Yutaka Watanabe ,  Yasuaki Fukuda

IPC: G02B5/08 ,  G02B26/10 ,  G03F7/20 ,  G21K1/06

CPC classification number: G21K1/062 ,  B82Y10/00 ,  G02B26/10 ,  G02B5/0891 ,  G03F7/70058 ,  G03F7/70958 ,  G21K2201/061 ,  G21K2201/064

Abstract: Disclosed are a reflection mirror for reflecting a received radiation beam to produce a reflection beam, a reflection device with such a mirror, a scanning system with such a mirror and an exposure apparatus with such a mirror. A radiation beam is inputted to the reflection mirror with an angle of incidence which changes with position on the reflection mirror, wherein the reflection mirror has a multilayered film effective to provide an increased relative reflectivity with respect to a predetermined wavelength of the reflection beam, and wherein a layer of the multilayered film has a thickness which changes with position so as to substantially avoid a shift of the wavelength of the reflection beam dependent upon the angle of incidence.

Abstract translation: 公开了一种用于反射接收的辐射束以产生反射光束的反射镜，具有这种反射镜的反射装置，具有这种反射镜的扫描系统和具有这种反射镜的曝光装置。 辐射束以反射镜上的位置随着入射角被输入到反射镜，其中反射镜具有有效地相对于反射光束的预定波长提供增加的相对反射率的多层膜，以及 其中所述多层膜的层具有随位置而变化的厚度，以便基本上避免所述反射光束的波长相对于所述入射角的偏移。

公开(公告)号：US5127028A

公开(公告)日：1992-06-30

申请号：US561715

申请日：1990-08-01

Applicant: David B. Wittry

Inventor： David B. Wittry

IPC: G21K1/06

CPC classification number: G21K1/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: A diffractor for energetic electromagnetic radiation has diffracting planes oriented parallel to the surface of steps which have a doubly curved surface. The steps are configured so that the resulting diffractor approximates the Johansson geometric conditions in the plane of the focal circle of radius r. The steps are additionally curved in a direction perpendicular to the focal circle in order to provide for satisfying Bragg's law for diffraction over the maximum area of the diffractor. The curvature of the planes perpendicular to the focal circle corresponds to rotating the stepped approximation to the Johansson geometry about an axis passing through the source and image points. The diffracting materials are thin sheets of doubly curved single crystal stacked together, thin sheets of single crystal material mounted on the doubly curved surfaces of the steps, pieces or flakes of single crystal material mounted on the doubly curved surfaces of the steps or layered synthetic microstructures deposited on the doubly curved surfaces of the steps.

Abstract translation: 用于高能电磁辐射的衍射器具有平行于具有双曲面的台阶表面取向的衍射面。 这些步骤被配置成使得所得到的衍射器近似于半径r的焦点圆的平面中的约翰逊几何条件。 这些步骤在垂直于焦圆的方向上另外弯曲，以便提供满足衍射器的最大面积上的衍射的布拉格定律。 垂直于焦圆的平面的曲率对应于围绕通过源和图像点的轴旋转阶梯近似到约翰逊几何。 衍射材料是层叠在一起的双曲面单晶片的薄片，安装在台阶的双曲面上的单晶材料薄片，安装在台阶的双曲面上的单晶材料片或薄片或层状合成微结构 沉积在台阶的双曲面上。

公开(公告)号：US5042059A

公开(公告)日：1991-08-20

申请号：US316055

申请日：1989-02-27

Applicant: Kazuhiro Watanabe ,  Mutsuaki Murakami ,  Susumu Yoshimura

Inventor： Kazuhiro Watanabe ,  Mutsuaki Murakami ,  Susumu Yoshimura

IPC: G21K1/06

CPC classification number: B82Y10/00 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/064 ,  G21K2201/067 ,  G21K2201/068

Abstract: Optical elements for radiation comprising a graphite film obtained from a film of a polymer such as polyphenylene oxadiazole, polybenzothiazole, polybenzobisthiazole, polybenzooxazole, polybenzobisoxazole, polypyromellitimide, polyphenylene isophthalamide, polyphenylene benzoimidazole, polyphenylene benzobisimidazole, polythiazole or poly-p-phenylene-vinylene. The graphite film is obtained by pyrolysis of the polymer film at 2800.degree. C. or higher at a pressure of not lower than 4 kg/cm.sup.2 in vacuum or in an inert gas. Alternatively, the element may be made of a graphite film obtained from the polymers mentioned above and intercalated with a metal halide. The intercalated films are readily bonded by pressing in the form of a thick sheet or block. Still alternatively, the graphite films and the intercalated films may be superposed alternately and bonded by pressing, or the intercalated films may be sandwiched between the graphite films and bonded together to form a thick sheet or block. The optical element has application as a lens, monochromater, filter or analyzer for radiations.

公开(公告)号：US4969725A

公开(公告)日：1990-11-13

申请号：US353499

申请日：1989-05-18

Applicant: Mitsuo Sumiya ,  Katsunobu Ueda

Inventor： Mitsuo Sumiya ,  Katsunobu Ueda

IPC: G01N23/00 ,  B24C1/08 ,  G21K1/06

CPC classification number: B24C1/08 ,  G21K1/06 ,  G21K2201/064 ,  G21K2201/067 ,  Y10S359/90

Abstract: An apparatus and method for finishing an X-ray mirror, having a substantially cylindrical mirror body and a reflecting mirror surface on the inner surface of the mirror body, includes a support post supporting the mirror body, and a male member which is inserted into an unfinished mirror body. The male member includes a chamber therein, an outer circumferential surface shaped in correspondence with the reflecting mirror surface, and a number of fine holes open to the outer circumferential surface. The male member is supported by a support section so that the outer circumferential surface faces the reflecting mirror surface with a required gap. An abrasive solution containing free abrasive grains is ejected toward the reflecting mirror surface from the outer circumferential surface of the male member through the fine holes, thereby polishing the reflecting mirror surface.

公开(公告)号：US4625323A

公开(公告)日：1986-11-25

申请号：US533113

申请日：1983-09-19

Applicant: Yoshiharu Okaya

Inventor： Yoshiharu Okaya

IPC: A61B6/00 ,  G03B41/16

CPC classification number: A61B6/00 ,  G21K1/06 ,  A61B6/4092 ,  G21K2201/062 ,  G21K2201/064

Abstract: A machine for radiologically examining a patient employs a radiation source and a monochromator. The monochromator can reflect radiation from the source toward the patient. This monochromator is angularly positioned to narrow the bandwidth of the reflected radiation around a predetermined center wavelength. A discharge detector is positioned alongside the patient opposite the monochromator for producing a discharge in an electric field in response to receipt of the reflected radiation. Also included is a counting apparatus for measuring the extent of discharge in the discharge detector.

Abstract translation: 用于放射学检查患者的机器采用辐射源和单色仪。 单色仪可以将来自源的辐射反射到患者身上。 该单色器被角度地定位成使预定中心波长周围的反射辐射的带宽变窄。 放电检测器位于与单色仪相对的患者旁边，以响应于接收到反射的辐射而在电场中产生放电。 还包括用于测量放电检测器中的放电程度的计数装置。

公开(公告)号：US4203034A

公开(公告)日：1980-05-13

申请号：US911666

申请日：1978-06-01

Applicant: Edward E. Carroll, Jr.

Inventor： Edward E. Carroll, Jr.

IPC: G01N23/205 ,  G01N23/20 ,  G21K1/06

CPC classification number: G01N23/205 ,  G21K1/06 ,  G21K2201/062 ,  G21K2201/064

Abstract: A diffraction camera type imaging device for x-rays/gamma rays/neutrons employs at least one single crystal bent to conform to the radius of a sphere of radius 2R and ground to fit snugly on a Rowland sphere of radius R will, when rotated about an axis normal to the axis of symmetry of the crystal or translated rectilinearly along said axis of symmetry, focus, by Bragg diffraction, a two-dimensional x-ray/gamma ray/neutron radiating object to a two dimensional image.

Abstract translation: 用于x射线/伽马射线/中子的衍射相机型成像装置使用至少一个弯曲的单晶，以符合半径为2R的球体的半径，并且研磨以适当地贴合在半径为R的Rowland球体上，当旋转约 与晶体对称轴垂直的轴线或沿对称轴直线平移的轴线，通过布拉格衍射将二维x射线/γ射线/中子辐射物体聚焦到二维图像。

公开(公告)号：US3439163A

公开(公告)日：1969-04-15

申请号：US3439163D

申请日：1965-09-03

Applicant: PHILIPS CORP

Inventor： JONGH WILHELMUS KAREL DE

IPC: G01N23/20 ,  G21K1/06 ,  G01N21/34 ,  G01N23/04

CPC classification number: G01N23/20008 ,  G01N2223/1016 ,  G01N2223/315 ,  G21K1/06 ,  G21K2201/062 ,  G21K2201/064 ,  G21K2201/067

公开(公告)号：US2688093A

公开(公告)日：1954-08-31

申请号：US20796751

申请日：1951-01-26

Applicant: CALIFORNIA INST RES FOUND

Inventor： DUMOND JESSE W M

IPC: G21K1/06

CPC classification number: G21K1/06 ,  G21K2201/062 ,  G21K2201/064