公开(公告)号：US07709298B2

公开(公告)日：2010-05-04

申请号：US11779423

申请日：2007-07-18

Applicant: Zhiyong Li

Inventor： Zhiyong Li

IPC: H01L21/82

CPC classification number: H01L29/125 ,  B82Y10/00

Abstract: A method for selectively altering a predetermined portion of an object or an external member in contact with the predetermined portion of the object is disclosed. The method includes selectively electrically addressing the predetermined portion, thereby locally resistive heating the predetermined portion, and exposing the object, including the predetermined portion, to the external member.

Abstract translation: 公开了一种用于选择性地改变与物体的预定部分接触的物体或外部构件的预定部分的方法。 该方法包括选择性地电寻址预定部分，由此局部地阻止加热预定部分，并将包括预定部分的物体暴露于外部构件。

公开(公告)号：US20090255555A1

公开(公告)日：2009-10-15

申请号：US12082750

申请日：2008-04-14

Applicant: Roman Gouk ,  Chung-Huan Jeon ,  Zhiyong Li ,  Madhava Rao Yalamanchili ,  James S. Papanu

Inventor： Roman Gouk ,  Chung-Huan Jeon ,  Zhiyong Li ,  Madhava Rao Yalamanchili ,  James S. Papanu

IPC: B08B3/12 ,  B08B13/00

CPC classification number: B08B3/12 ,  B08B3/02 ,  B08B7/028 ,  G03F1/82 ,  H01L21/67051

Abstract: A method and apparatus for cleaning a workpiece are disclosed. A gas and cleaning solution are supplied to an atomizing nozzle which atomizes the cleaning solution and sprays the top surface of a workpiece with an atomized spray. A liquid having a controlled gas content is flowed to the top surface of the workpiece from a rinse nozzle. Megasonic energy is applied from the backside of the workpiece.

Abstract translation: 公开了一种用于清洁工件的方法和设备。 将气体和清洁溶液供应到雾化喷嘴，该雾化喷嘴使清洁溶液雾化并用雾化喷雾喷射工件的顶表面。 具有受控气体含量的液体从冲洗喷嘴流到工件的顶表面。 从工件的背面施加超声波能量。

公开(公告)号：US20090245718A1

公开(公告)日：2009-10-01

申请号：US12253123

申请日：2008-10-16

Applicant: Zhiyong Li ,  Michael Tan ,  Shih-Yuan Wang ,  Wei Wu ,  Jing Tang

Inventor： Zhiyong Li ,  Michael Tan ,  Shih-Yuan Wang ,  Wei Wu ,  Jing Tang

IPC: G02B6/00

CPC classification number: G02B6/02328 ,  B82Y20/00 ,  G01N21/05 ,  G01N21/31 ,  G01N21/645 ,  G01N21/658 ,  G01N2021/0346 ,  G01N2021/052 ,  G01N2021/6467 ,  G01N2021/7763 ,  G01N2021/7783 ,  G02B6/1226

Abstract: An optical sensor, sensing system and method of sensing employ a half-core hollow optical waveguide adjacent to a surface of an optical waveguide layer of a substrate. The half-core hollow optical waveguide and the adjacent optical waveguide layer cooperatively provide both an optical path that confines and guides an optical signal and an internal hollow channel. The optical path and channel extend longitudinally along a hollow core of the half-core hollow optical waveguide. The system further includes an optical source at an input of the optical path and an optical detector at an output of the optical path. A spectroscopic interaction between an analyte material that is introduced into the channel and an optical signal propagating along the optical path determines a characteristic of the analyte material.

Abstract translation: 光学传感器，感测系统和感测方法使用与衬底的光波导层的表面相邻的半芯空心光波导。 半芯空心光波导和相邻的光波导层协同地提供限制和引导光信号和内部中空通道的光路。 光路和通道沿半芯空心光波导的中空芯纵向延伸。 该系统还包括在光路的输入处的光源和在光路的输出处的光学检测器。 引入到通道中的分析物质与沿光路传播的光信号之间的光谱相互作用决定了分析物质的特性。

公开(公告)号：US07474396B2

公开(公告)日：2009-01-06

申请号：US11257073

申请日：2006-01-17

Applicant: Wei Wu ,  Zhiyong Li ,  Shih-Yuan Wang

Inventor： Wei Wu ,  Zhiyong Li ,  Shih-Yuan Wang

IPC: G01J3/44 ,  G01J3/00

CPC classification number: G01J3/44 ,  G01J3/02 ,  G01J3/0227 ,  G01J3/0256 ,  G01J3/18 ,  G01N21/65 ,  G01N21/658 ,  G02B5/1809

Abstract: A Raman spectroscopy system is disclosed which includes a sub-wavelength resonant grating filter and a photodiode with integrated sub-wavelength resonant grating filter are disclosed. The resonant grating filter comprises an array of diffraction elements having a periodic spacing that is less than the wavelength of radiation to be filtered and which are formed over a waveguide layer. The filter, which can reject a specific wavelength of radiation, can be placed between a Raman sample and a Raman detector in order to filter radiation that is elastically scattered from the sample while transmitting other wavelengths. The wavelength rejected by the filter can be selected by tilting the filter with respect to the radiation incident upon the filter.

Abstract translation: 公开了一种拉曼光谱系统，其包括亚波长谐振光栅滤光器和具有集成子波长谐振光栅滤光器的光电二极管。 谐振光栅滤波器包括衍射元件的阵列，其具有小于待滤波的辐射的波长并且在波导层上形成的周期性间隔。 可以将能够抑制特定波长的辐射的滤光器放置在拉曼样品和拉曼检测器之间，以便过滤从样品弹性散射的辐射，同时传输其他波长。 可以通过使过滤器相对于入射到过滤器上的辐射倾斜来选择由过滤器拒绝的波长。

公开(公告)号：US20080099929A1

公开(公告)日：2008-05-01

申请号：US11590492

申请日：2006-10-30

Applicant: Zhiyong Li ,  Warren Robinett

Inventor： Zhiyong Li ,  Warren Robinett

IPC: H01L23/52 ,  H01L21/44

CPC classification number: G11C5/06 ,  B82B1/00 ,  B82B3/00 ,  B82Y10/00 ,  B82Y40/00 ,  G11C5/12 ,  G11C2213/81 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/0676 ,  H01L29/068 ,  H01L51/0595 ,  Y10S977/762 ,  Y10S977/94

Abstract: Certain embodiments of the present invention are directed to a method of fabricating a mixed-scale electronic interface. A substrate is provided with a first set of conductive elements. A first layer of nanowires may be formed over the first set of conductive elements. A number of channels may be formed, with each of the channels extending diagonally through a number of the nanowires of the first layer. A number of pads may be formed, each of which is electrically interconnected with an underlying conductive element of the first set of conductive elements and one or more adjacent nanowires of the first layer of nanowires. The pads and corresponding electrically interconnected nanowires define a number of pad-interconnected-nanowire-units. Additional embodiments are directed to a method of forming a nanoimprinting mold and a method of selectively programming nanowire-to-conductive element electrical connections.

Abstract translation: 本发明的某些实施例涉及一种制造混合比例电子接口的方法。 衬底设置有第一组导电元件。 可以在第一组导电元件上形成第一层纳米线。 可以形成多个通道，其中每个通道对角地延伸穿过第一层的多个纳米线。 可以形成多个焊盘，每个焊盘与第一组导电元件的下面的导电元件和第一纳米线层的一个或多个相邻的纳米线电互连。 焊盘和相应的电互连纳米线限定了多个衬垫互连的纳米线单元。 另外的实施例涉及形成纳米压印模具的方法和选择性地编程纳米线至导电元件电连接的方法。

公开(公告)号：US20080053486A1

公开(公告)日：2008-03-06

申请号：US11891339

申请日：2007-08-09

Applicant: Jianshe Tang ,  Wei Lu ,  Zhiyong Li ,  Bo Xie ,  Alexander Ko

Inventor： Jianshe Tang ,  Wei Lu ,  Zhiyong Li ,  Bo Xie ,  Alexander Ko

IPC: B08B3/02

CPC classification number: B08B3/04 ,  B08B3/02 ,  H01L21/67028

Abstract: A semiconductor substrate processing apparatus and a method for processing semiconductor substrates are provided. The semiconductor substrate processing apparatus may include a liquid container where a semiconductor substrate may be immersed in a semiconductor processing liquid. The semiconductor substrate may then be removed from the semiconductor processing liquid while vapor is directed at a surface of the semiconductor substrate where the semiconductor substrate contacts a surface of the processing liquid.

Abstract translation: 提供半导体衬底处理设备和半导体衬底的处理方法。 半导体基板处理装置可以包括其中半导体基板可以浸入半导体处理液体中的液体容器。 然后可以从半导体处理液体中去除半导体衬底，同时蒸汽指向半导体衬底的半导体衬底接触处理液表面的表面。

公开(公告)号：US20070252981A1

公开(公告)日：2007-11-01

申请号：US11413877

申请日：2006-04-27

Applicant: Sean Spillane ,  Raymond Beausoleil ,  Zhiyong Li ,  Duncan Stewart

Inventor： Sean Spillane ,  Raymond Beausoleil ,  Zhiyong Li ,  Duncan Stewart

IPC: G01J3/44 ,  G01N21/66

CPC classification number: G01J3/44 ,  G01N21/658

Abstract: Raman-enhancing structures include a photonic crystal having a resonant cavity and at least one waveguide coupled to the resonant cavity. A nanostructure comprising a Raman-enhancing material is disposed proximate the resonant cavity of the photonic crystal. Raman-enhancing structures include a microdisk resonator, at least one waveguide coupled to the microdisk resonator, and a nanostructure comprising a Raman-enhancing material disposed proximate the microdisk resonator. Methods for performing Raman spectroscopy include generating radiation, guiding the radiation through a waveguide to a resonant cavity in a photonic crystal or a microdisk resonator, resonating the radiation in the resonant cavity or microdisk resonator, providing an analyte proximate the resonant cavity or microdisk resonator, subjecting the analyte to the resonating radiation, and detecting Raman scattered radiation.

Abstract translation: 拉曼增强结构包括具有谐振腔和耦合到谐振腔的至少一个波导的光子晶体。 包含拉曼增强材料的纳米结构设置在光子晶体的谐振腔附近。 拉曼增强结构包括微盘谐振器，耦合到微盘谐振器的至少一个波导和包括靠近微盘谐振器设置的拉曼增强材料的纳米结构。 用于执行拉曼光谱的方法包括产生辐射，将辐射通过波导引导到光子晶体或微盘谐振器中的谐振腔，谐振谐振腔或微盘谐振器中的辐射，提供靠近谐振腔或微盘谐振器的分析物， 对分析物进行共振辐射，并检测拉曼散射辐射。

公开(公告)号：US07289690B2

公开(公告)日：2007-10-30

申请号：US11107098

申请日：2005-04-15

Applicant: Zhiyong Li ,  Raymond G. Beausoleil ,  Philip J. Kuekes ,  Shih-Yuan Wang ,  M. Saif Islam

Inventor： Zhiyong Li ,  Raymond G. Beausoleil ,  Philip J. Kuekes ,  Shih-Yuan Wang ,  M. Saif Islam

IPC: G02B6/00

CPC classification number: G02B6/1225 ,  B82Y20/00 ,  G02B2006/1215

Abstract: An apparatus for sensing at least one property of a fluid is described. A first photonic crystal structure and a second photonic crystal structure are defined in a dielectric slab. The first and second photonic crystal structures comprise differently patterned arrays of channels extending through the dielectric slab. The apparatus further comprises a fluid introduction device configured to introduce a common volume of the fluid into the channels of the first and second photonic crystal structures. The at least one property of the fluid can be sensed by measuring the propagation of radiation through the first and second photonic crystal structures.

Abstract translation: 描述了用于感测流体的至少一个性质的装置。 在介质板中限定第一光子晶体结构和第二光子晶体结构。 第一和第二光子晶体结构包括延伸穿过电介质板的不同图案的通道阵列。 该装置还包括流体引入装置，其构造成将共同体积的流体引入第一和第二光子晶体结构的通道中。 可以通过测量通过第一和第二光子晶体结构的辐射的传播来感测流体的至少一个性质。

公开(公告)号：US20070165214A1

公开(公告)日：2007-07-19

申请号：US11257073

申请日：2006-01-17

Applicant: Wei Wu ,  Zhiyong Li ,  Shih-Yuan Wang

Inventor： Wei Wu ,  Zhiyong Li ,  Shih-Yuan Wang

IPC: G01J3/44 ,  G01N21/65

CPC classification number: G01J3/44 ,  G01J3/02 ,  G01J3/0227 ,  G01J3/0256 ,  G01J3/18 ,  G01N21/65 ,  G01N21/658 ,  G02B5/1809

Abstract: A Raman spectroscopy system is disclosed which includes a sub-wavelength resonant grating filter and a photodiode with integrated sub-wavelength resonant grating filter are disclosed. The resonant grating filter comprises an array of diffraction elements having a periodic spacing that is less than the wavelength of radiation to be filtered and which are formed over a waveguide layer. The filter, which can reject a specific wavelength of radiation, can be placed between a Raman sample and a Raman detector in order to filter radiation that is elastically scattered from the sample while transmitting other wavelengths. The wavelength rejected by the filter can be selected by tilting the filter with respect to the radiation incident upon the filter.

Abstract translation: 公开了一种拉曼光谱系统，其包括亚波长谐振光栅滤波器和具有集成子波长谐振光栅滤波器的光电二极管。 谐振光栅滤波器包括衍射元件的阵列，其具有小于待滤波的辐射的波长并且在波导层上形成的周期间隔。 可以将能够抑制特定波长的辐射的滤光器放置在拉曼样品和拉曼检测器之间，以便过滤从样品弹性散射的辐射，同时传输其他波长。 可以通过使过滤器相对于入射到过滤器上的辐射倾斜来选择由过滤器拒绝的波长。

公开(公告)号：US20070086001A1

公开(公告)日：2007-04-19

申请号：US11252134

申请日：2005-10-17

Applicant: M. Islam ,  Shih-Yuan Wang ,  R. Williams ,  Philip Kuekes ,  Wei Wu ,  Zhiyong Li

Inventor： M. Islam ,  Shih-Yuan Wang ,  R. Williams ,  Philip Kuekes ,  Wei Wu ,  Zhiyong Li

IPC: G01J3/44 ,  G01N21/65

CPC classification number: G01N21/658

Abstract: A NERS-active structure includes a deformable, active nanoparticle support structure for supporting a first nanoparticle and a second nanoparticle that is disposed proximate the first nanoparticle. The nanoparticles each comprise a NERS-active material. The deformable, active nanoparticle support structure is configured to vary the distance between the first nanoparticle and the second nanoparticle while performing NERS. Various active nanoparticle support structures are disclosed. A NERS system includes such a NERS-active structure, a radiation source for generating radiation scatterable by an analyte located proximate the NERS-active structure, and a radiation detector for detecting Raman scattered radiation scattered by the analyte. A method for performing NERS includes providing such a NERS-active structure, providing an analyte at a location proximate the NERS-active structure, irradiating the NERS-active structure and the analyte with radiation, varying the distance between the nanoparticles, and detecting Raman scattered radiation scattered by the analyte.

Abstract translation: NERS活性结构包括用于支撑第一纳米颗粒的可变形的活性纳米颗粒支撑结构和邻近第一纳米颗粒设置的第二纳米颗粒。 纳米颗粒各自包含NERS-活性材料。 可变形的活性纳米颗粒支撑结构被配置为在执行NERS的同时改变第一纳米颗粒和第二纳米颗粒之间的距离。 公开了各种活性纳米颗粒载体结构。 NERS系统包括这样的NERS-活性结构，用于产生由位于NERS-活性结构附近的分析物可散射的辐射的辐射源，以及用于检测被分析物散射的拉曼散射辐射的辐射检测器。 执行NERS的方法包括提供这样的NERS活性结构，在靠近NERS-活性结构的位置提供分析物，用辐射照射NERS-活性结构和分析物，改变纳米颗粒之间的距离并检测拉曼散射 被分析物散射的辐射。