THREE-DIMENSIONAL MEASUREMENT APPARATUS
    173.
    发明申请

    公开(公告)号:US20170248413A1

    公开(公告)日:2017-08-31

    申请号:US15596788

    申请日:2017-05-16

    Abstract: A measurement apparatus includes an illumination device irradiating an object with a first and a second pattern, a camera taking image data of the object, a motor displacing the object, and a processor measuring the object, obtaining a first value of the object based on a first number of image data taken with the first pattern at a first number of phases at a first position, obtaining a gain and/or offset based on the first number of image data, obtaining a second value of the object based on the gain and/or offset and a second number of image data taken with the second pattern at a second number of phases at a second position, obtaining height data of the object based on the first and the second value, and obtaining the second value with an average of the gain and/or offset of pixels adjacent to each pixel.

    METHOD FOR CONTROLLING GAS-PRESSURE-DRIVEN APPARATUS AND GAS-PRESSURE-DRIVEN APPARATUS

    公开(公告)号:US20170152869A1

    公开(公告)日:2017-06-01

    申请号:US15353064

    申请日:2016-11-16

    Inventor: Atsuyuki SAKAI

    Abstract: A gas-pressure-driven apparatus includes a main body having a working chamber, a movable member moving relative to the main body with a pressure of the working chamber, a pressure sensor for detecting the pressure, a flow rate sensor for detecting the flow rate of the working gas. A method for controlling the apparatus includes calculating a pressure change amount from the detected pressure and an integrated flow rate from the detected flow rate when the pressure is changed in a state in which the volume of the working chamber cannot be changed, calculating an initial volume of the working chamber from the pressure change amount and the integrated flow rate, and calculating a post-change volume of the working chamber from the integrated flow rate and the initial volume after creation of a state in which the volume of the working chamber can be changed from the initial volume.

    LIQUID SUPPLY SYSTEM AND METHOD FOR CONTROLLING LIQUID SUPPLY SYSTEM
    175.
    发明申请
    LIQUID SUPPLY SYSTEM AND METHOD FOR CONTROLLING LIQUID SUPPLY SYSTEM 审中-公开
    液体供应系统及控制液体供应系统的方法

    公开(公告)号:US20160363118A1

    公开(公告)日:2016-12-15

    申请号:US15178449

    申请日:2016-06-09

    Inventor: Atsuyuki SAKAI

    Abstract: A liquid supply system includes a pump having a fluctuating member separating pump and working chambers thereof, a supply and discharge section which supplies a working gas to the working chamber and discharges the working gas from the working chamber, a suction valve, a discharge valve, a pressure sensor for detecting the pressure within a space including the working chamber, a flow rate sensor for detecting the flow rate of the working gas, and a control section. The control section closes the discharge valve and opens the suction valve, calculates a change in the volume of the working chamber from the detected flow rate, controls the supply and discharge section such that the volume change becomes zero, and uses, as an estimated suction-side hydraulic head pressure of the liquid, the pressure detected in a state in which the volume change has becomes zero.

    Abstract translation: 液体供应系统包括具有波动部件分离泵及其工作室的泵,将工作气体供给到工作室并从工作室排出工作气体的供给排出部,吸入阀,排出阀, 用于检测包括工作室的空间内的压力的压力传感器,用于检测工作气体的流量的流量传感器和控制部。 控制部关闭排气阀,打开吸入阀,根据检测出的流量计算出工作室的体积变化,控制供给排出部使体积变化为零,并将其用作估计吸力 液体的液压头压力,在体积变化已经变为零的状态下检测到的压力。

    Three-dimensional measuring device
    177.
    发明授权
    Three-dimensional measuring device 有权
    三维测量装置

    公开(公告)号:US09417053B2

    公开(公告)日:2016-08-16

    申请号:US14444564

    申请日:2014-07-28

    Abstract: A three-dimensional measuring device includes an extraction unit that extracts an image data set with a brightness value of each of pixels in image data within an effective range from among a plurality of image data sets at each of coordinate positions of an object to be measured, and a three-dimensional measurement unit that performs three-dimensional measurement relating to each of the coordinate positions of the object to be measured based on the extracted image data set. The extraction unit extracts the image data set imaged under a pattern light with the highest irradiation brightness among a plurality of types of pattern lights when there is a plurality of sets of the image data sets with the brightness value of each of the pixels in the image data within the effective range from among the plurality of the image data sets.

    Abstract translation: 三维测量装置包括提取单元,其从待测对象的每个坐标位置处的多个图像数据组中的有效范围内提取图像数据中的每个像素的亮度值的图像数据集 以及三维测量单元,其基于所提取的图像数据集执行与要测量的对象的每个坐标位置相关的三维测量。 当存在多个具有图像中每个像素的亮度值的多组图像数据组时,提取单元提取在多种图案光中具有最高照射亮度的图案光下成像的图像数据集 数据在多个图像数据集之间的有效范围内。

    FLUID CONTROL VALVE
    178.
    发明申请
    FLUID CONTROL VALVE 审中-公开
    流体控制阀

    公开(公告)号:US20160169396A1

    公开(公告)日:2016-06-16

    申请号:US14956094

    申请日:2015-12-01

    Abstract: A fluid control valve includes: a drive section; body provided with first port, second port, and valve seat; and valve element formed columnar-shaped and coupled with the drive section, and the valve element includes annular sealing protrusion annularly protruding from end face located on side facing the valve seat, the sealing protrusion being provided at leading end with annular sealing portion to be pressed against the valve seat for sealing and at least the annular sealing protrusion is made of fluororesin. The valve element is configured such that the annular sealing portion is radially displaced with displacement amount of no more than 6.175 μm when the annular sealing portion is pressed against the valve seat by the drive section so that abrasion caused by deformation of the valve element in valve closing is restrained and generation of particles is prevented.

    Abstract translation: 流体控制阀包括:驱动部分; 主体设有第一端口,第二端口和阀座; 阀元件形成为圆柱状并与驱动部分结合,并且阀元件包括环形密封突起,环形密封突起从位于面向阀座的一侧的端面突出,密封突起在前端设有被压制的环形密封部分 抵靠阀座进行密封,至少环形密封突起由氟树脂制成。 阀元件构造成使得当环形密封部分被驱动部分压靠在阀座上时,环形密封部分的位移量不大于6.175μm的径向位移,使得阀元件在阀中的变形引起的磨损 阻止闭合并防止颗粒的产生。

    Vacuum control valve and vacuum control apparatus
    179.
    发明授权
    Vacuum control valve and vacuum control apparatus 有权
    真空控制阀和真空控制装置

    公开(公告)号:US09234595B2

    公开(公告)日:2016-01-12

    申请号:US13957299

    申请日:2013-08-01

    CPC classification number: F16K3/06 F16J1/01 F16K31/1262 F16K51/02 H01L21/67017

    Abstract: A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.

    Abstract translation: 连接在真空室和真空泵之间的真空控制阀包括具有形成在真空流路中的阀座的控制阀主体,通过执行线性运动来调节升程来操纵阀开口的阀体,杆 其从产生驱动力的线性驱动单元传递驱动力,在允许杆滑动的同时密封真空流路的滑动/密封构件以及覆盖杆的滑动范围的圆筒构件。 滑动范围包括从阀体流路侧向外侧移动的范围。 圆柱形构件具有外周面,外周面的每单位面积的工作流体吸收量小于杆的外表面的工作流体吸收量。

    MANUAL OPENING/CLOSING VALVE
    180.
    发明申请
    MANUAL OPENING/CLOSING VALVE 有权
    手动打开/关闭阀

    公开(公告)号:US20150354723A1

    公开(公告)日:2015-12-10

    申请号:US14713391

    申请日:2015-05-15

    Inventor: Tatsuhito AOYAMA

    CPC classification number: F16K35/025 F16K7/16 F16K31/508

    Abstract: A manual opening/closing valve includes a manual handle, a valve element, a valve seat, an input port, and an output port. The manual opening/closing valve is arranged to move the valve element into contact with the valve seat when the manual handle is rotated, so that the valve is placed in a cutoff state in which communication between the input port and the output port is cut off, wherein the cutoff state includes a first cutoff state established when the manual handle is rotated to a first angle and a second cutoff state established when the manual handle is rotated to a second angle at which rotation operation force to the manual handle is converted to a cutoff load to be applied to the valve seat.

    Abstract translation: 手动打开/关闭阀包括手动手柄,阀元件,阀座,输入端口和输出端口。 手动打开/关闭阀被设置为当手动旋转时将阀元件移动到与阀座接触,使得阀处于截止状态,在该截止状态下,输入端口和输出端口之间的连通被切断 ,其中所述切断状态包括当手动手柄旋转到第一角度时建立的第一切断状态,以及当手动手柄旋转到手动手柄的旋转操作力被转换为第二角度的第二角度时建立的第二切断状态 施加到阀座的截止负载。

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