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    Electromechanical transducer device and method of forming a electromechanical transducer device
    183.
    发明授权
    Electromechanical transducer device and method of forming a electromechanical transducer device 有权
    机电换能器装置及形成机电换能装置的方法

    公开(公告)号：US08736145B2

    公开(公告)日：2014-05-27

    申请号：US13128032

    申请日：2009-11-25

    Applicant: Lianjun Liu ,  Sergio Pacheco ,  Francois Perruchot ,  Emmanuel Defay ,  Patrice Rey

    Inventor： Lianjun Liu ,  Sergio Pacheco ,  Francois Perruchot ,  Emmanuel Defay ,  Patrice Rey

    IPC: H01L41/06 ,  H01L41/09

    CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01L41/0933 ,  H01L41/094

    Abstract: A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a mechanical structure having at least one mechanical layer having a first thermal response characteristic, at least one layer of the actuating structure having a second thermal response characteristic different to the first thermal response characteristic, and a thermal compensation structure having at least one thermal compensation layer. The thermal compensation layer is different to the at least one layer and is arranged to compensate a thermal effect produced by the mechanical layer and the at least one layer of the actuating structure such that the movement of the movable structure is substantially independent of variations in temperature.

    Abstract translation: 形成在半导体衬底上的微型或纳米机电换能器装置包括可移动结构，其被布置成响应于致动结构的致动而是可移动的。 可移动结构包括具有至少一个具有第一热响应特性的机械层的机械结构，至少一层致动结构具有不同于第一热响应特性的第二热响应特性，以及至少具有至少 一个热补偿层。 热补偿层不同于至少一个层，并且被布置成补偿由机械层和致动结构的至少一个层产生的热效应，使得可移动结构的运动基本上与温度变化无关 。

    VARIABLE CAPACITOR AND SWITCH STRUCTURES IN SINGLE CRYSTAL PIEZOELECTRIC MEMS DEVICES USING BIMORPHS
    184.
    发明申请
    VARIABLE CAPACITOR AND SWITCH STRUCTURES IN SINGLE CRYSTAL PIEZOELECTRIC MEMS DEVICES USING BIMORPHS 有权
    单晶压电MEMS器件中的可变电容和开关结构

    公开(公告)号：US20140125201A1

    公开(公告)日：2014-05-08

    申请号：US14071025

    申请日：2013-11-04

    Applicant: RF Micro Devices, Inc.

    Inventor： Kushal Bhattacharjee

    IPC: H01L41/09 ,  B81B7/02

    CPC classification number: H01G5/18 ,  B81B3/0086 ,  B81B2201/018 ,  B81B2201/0271 ,  B81B2201/032 ,  H03H9/02275 ,  H03H9/02409 ,  H03H9/2405 ,  H03H9/2463 ,  H03H9/462 ,  H03H9/467 ,  H03H2009/241

    Abstract: A micro-electrical-mechanical systems (MEMS) device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with a first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the first surface, such that the second electrode is in contact with a second bimorph layer of the piezoelectric layer.

    Abstract translation: 微电气机械系统（MEMS）装置包括衬底，形成在衬底的第一表面上的一个或多个锚固体和通过一个或多个锚固件悬挂在衬底的第一表面上的压电层。 第一电极可以设置在面向基板的第一表面的压电层的第一表面上，使得第一电极与压电层的第一双压电晶片层接触。 第二电极可以设置在与第一表面相对的压电层的第二表面上，使得第二电极与压电层的第二双晶片层接触。

    Electromechanical transducer
    185.
    发明授权
    Electromechanical transducer 有权
    机电换能器

    公开(公告)号：US08678565B2

    公开(公告)日：2014-03-25

    申请号：US13697994

    申请日：2011-04-27

    Applicant: Kusunoki Higashino ,  Shinya Matsuda

    Inventor： Kusunoki Higashino ,  Shinya Matsuda

    IPC: B41J2/045

    CPC classification number: H01L41/0973 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0127 ,  H01L41/0475

    Abstract: An electromechanical transducer (1) has a pressurizing chamber (21) and a side-chamber (23) formed in a plate (11). On a driven film (13) forming the upper wall surface (21a) of the pressurizing chamber (21) and the side-chamber (23), a lower electrode (33), a driving member, and an upper electrode (35) are formed in this order. The driving member is composed of an operation section (31p) located over the pressurizing chamber (21), and an extended section (31a) extending from the operation section (31p) to over the side-chamber (23). The side-chamber (23) has a smaller width than the pressurizing chamber (21) in a second direction perpendicular to a first direction in which the side-chamber (23) is located beside the pressurizing chamber (21). The extended section (31a) of the driving member has a smaller width than the side-chamber (23) in the second direction.

    Abstract translation: 机电换能器（1）具有形成在板（11）中的加压室（21）和侧室（23）。 在形成加压室（21）的上壁面（21a）和侧室（23）的从动膜（13）上，下电极（33），驱动部件和上电极（35） 按此顺序形成。 驱动部件由位于加压室（21）的上方的操作部（31p）和从操作部（31p）延伸到侧室（23）的延伸部（31a）构成。 侧室（23）在垂直于侧室（23）位于加压室（21）旁边的第一方向的第二方向上具有比加压室（21）更小的宽度。 驱动构件的延伸部（31a）在第二方向上具有比侧室（23）更小的宽度。

    Forming a membrane having curved features
    187.
    发明授权
    Forming a membrane having curved features 有权
    形成具有弯曲特征的膜

    公开(公告)号：US08404132B2

    公开(公告)日：2013-03-26

    申请号：US13077154

    申请日：2011-03-31

    Applicant: Gregory De Brabander ,  Mark Nepomnishy

    Inventor： Gregory De Brabander ,  Mark Nepomnishy

    IPC: B32B37/02 ,  B32B38/10 ,  B32B37/06 ,  B32B37/14 ,  C23F1/00

    CPC classification number: B81B3/0021 ,  B81B2201/032 ,  B81B2203/0127 ,  B81B2203/053 ,  B81C2201/0195 ,  B81C2203/036

    Abstract: Processes for making a membrane having a curved feature are disclosed. A profile-transferring substrate surface having a curved feature is created by vacuum bonding a membrane to a top surface of a substrate, where the top surface has a cavity formed therein. The surface of the membrane is exposed to a fluid pressure such that the membrane deforms and the undersurface of the membrane touches the bottom of the cavity. The curved feature formed in the deformed membrane can be made permanent by annealing the bonding areas between membrane and substrate. A uniform layer of material deposited over the exposed surface of the membrane will include a curved feature at the location where the membrane has bent into the cavity. After at least one layer of material has been uniformed deposited on the membrane, the cavity can be etched open from the bottom to remove the membrane from the underside.

    Abstract translation: 公开了制造具有弯曲特征的膜的方法。 具有弯曲特征的轮廓转印衬底表面是通过将膜真空粘合到衬底的顶表面而形成的，其中顶表面形成有空腔。 膜的表面暴露于流体压力，使得膜变形并且膜的下表面接触腔的底部。 形成在变形的膜中的弯曲特征可以通过退火膜和基底之间的结合区域而被永久化。 沉积在膜的暴露表面上的均匀的材料层将在膜已经弯曲到腔中的位置处包括弯曲特征。 在将至少一层材料均匀地沉积在膜上之后，可以从底部刻蚀空腔以从下侧去除膜。

    Large area organic LED display
    188.
    发明授权
    Large area organic LED display 有权
    大面积有机LED显示屏

    公开(公告)号：US08278828B1

    公开(公告)日：2012-10-02

    申请号：US12775529

    申请日：2010-05-07

    Applicant: James C. Rutherford

    Inventor： James C. Rutherford

    IPC: G09G3/10

    CPC classification number: B81B7/04 ,  B81B2201/014 ,  B81B2201/032 ,  B81B2207/053 ,  G09G3/2014 ,  G09G3/3225 ,  G09G3/3266 ,  G09G3/3283 ,  G09G3/3433 ,  G09G2300/08 ,  G09G2300/0809 ,  G09G2310/0256 ,  G09G2310/0259 ,  G09G2310/066 ,  G09G2330/04

    Abstract: An active matrix organic LED display having a matrix of multiple light emitting pixels and electronic drive circuitry for selectively addressing the pixels, each pixel containing an organic LED. The electronic drive circuitry includes row scan electrodes and column data electrodes that interconnect the matrix of pixels. The circuitry also includes a MEMS switching device and a memory capacitor for each pixel, the MEMS switching device connecting the memory capacitor to a column data electrode during addressing of a pixel and connecting the memory capacitor to the organic LED of each pixel during light emission.

    Abstract translation: 一种具有多个发光像素矩阵的有源矩阵有机LED显示器和用于选择性寻址像素的电子驱动电路，每个像素包含有机LED。 电子驱动电路包括互连像素矩阵的行扫描电极和列数据电极。 电路还包括用于每个像素的MEMS开关器件和存储器电容器，MEMS开关器件在寻址像素期间将存储器电容器连接到列数据电极，并且在发光期间将存储器电容器连接到每个像素的有机LED。

    Micro-electro-mechanical device with a piezoelectric actuator
    190.
    发明授权
    Micro-electro-mechanical device with a piezoelectric actuator 失效
    具有压电执行器的微机电装置

    公开(公告)号：US08222796B2

    公开(公告)日：2012-07-17

    申请号：US12578619

    申请日：2009-10-14

    Applicant: Harish Bhaskaran ,  Michel Despont

    Inventor： Harish Bhaskaran ,  Michel Despont

    IPC: H01L41/00

    CPC classification number: B81B3/0021 ,  B81B2201/032 ,  B81B2203/0118 ,  F16K31/004 ,  G02B26/0858 ,  H01G5/18 ,  H01H2057/006 ,  H01L41/094 ,  Y10T137/2213

    Abstract: A micro-electro-mechanical device including a substrate with a main surface, a piezoelectric actuator with a first side mechanically coupled to the substrate, an elastic member with a first end mechanically coupled to the substrate, and a transfer member mechanically coupling a second side of the piezoelectric actuator to the elastic member. The piezoelectric actuator is positioned lateral to an unfixed region of the elastic member. The method includes applying a voltage to a piezoelectric actuator altering the piezoelectric actuator's dimension vertical to the main surface of the substrate; and mechanically transferring the alteration to a coupling point of an elastic member.

    Abstract translation: 一种微电子机械装置，包括具有主表面的基板，具有机械耦合到所述基板的第一侧的压电致动器，具有机械耦合到所述基板的第一端的弹性构件，以及将第二侧 的压电致动器。 压电致动器位于弹性构件的未固定区域的侧面。 该方法包括向压电致动器施加电压，该压电致动器改变垂直于衬底的主表面的压电致动器的尺寸; 并将所述改变机械地转移到弹性构件的联接点。

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