公开(公告)号：US06390394B1

公开(公告)日：2002-05-21

申请号：US09727494

申请日：2000-12-04

Applicant: Fu-Ching Tung ,  Chia-Ming Chen ,  Jen-Rong Huang ,  Jonathan Wang ,  Peter L. Mahneke

Inventor： Fu-Ching Tung ,  Chia-Ming Chen ,  Jen-Rong Huang ,  Jonathan Wang ,  Peter L. Mahneke

IPC: B05B1508

CPC classification number: H01L21/6708 ,  B05B12/1472 ,  B05B15/654 ,  B05B15/68 ,  B05C11/08

Abstract: The present invention relates to a nozzle and adjust module of chemicals when wafers are processed during the IC manufacturing process. After wafers are loaded on a chuck of a reaction chamber, five chemicals required for the manufacturing process are transported into the passages, and are sprayed on the surfaces of rotating wafers via different nozzles. The centrifugal effect due to the rotation of a main motor is exploited to coat the chemicals on the whole wafer quickly and uniformly. The present invention can apply to both closed and open reaction chambers. The spray head of the present invention has a specially designed angle, and has level adjusting and height adjusting functions so that high flexibility in the manufacturing process can be obtained.

Abstract translation: 本发明涉及在IC制造过程中处理晶片时的化学品的喷嘴和调节模块。 在将晶片装载在反应室的卡盘上之后，将制造过程所需的五种化学品输送到通道中，并通过不同的喷嘴喷射在旋转晶片的表面上。 利用主电机的旋转引起的离心效应被快速且均匀地涂覆在整个晶片上的化学物质。 本发明可应用于封闭和开放的反应室。 本发明的喷头具有特别设计的角度，具有水平调节和高度调节功能，从而可以获得制造过程中的高柔性。

公开(公告)号：US5182898A

公开(公告)日：1993-02-02

申请号：US791032

申请日：1991-11-12

Applicant: Fu-Ching Tung ,  Chi-Tsun Chen ,  Sheng-Feng Lieu

Inventor： Fu-Ching Tung ,  Chi-Tsun Chen ,  Sheng-Feng Lieu

IPC: B65B43/46

CPC classification number: B65B43/465

Abstract: An adjustment and automatic inward-contraction and outward-expansion machanism, and particularly a single mechanism that provides the function of variable specification adjustment as well as automatic inward-contraction and outward-expansion of the claw arms during operation is described. The mechanism includes a worm provided for driving the worm gear and other related devices in rotation so that a cylindrical groove cam is engaged in motion up and down. With the cylindrical groove cam in motion up and down and further by means of L-type steering block, push and pull rod and four-bar linkage, claws are provided for specification adjustment. During the operation of the machine and when the roller of the plunge rod under L-type steering block is in rotation along the groove of the cylindrical groove cam, due to the undulations of groove, the plunge rod is in motion up and down and causes the contraction and expansion of the claw arms by means of the L-type steering block, the push and pull rod and the four-bar linkage, so as to meet the requirement of expanding the mouth of the bag and the operations prior to the sealing treatment. The present mechanism not only can adjust the distance between the claw arms subject to the specification of the bag directly by means of the worm but also can perform the function of automatic contraction and expansion of the claw arms when the bag is properly located at a specific position so as to cooperate with the external structure for the preformance of expanding the mouth of the bag, charging the bags and the thermal sealing treatment.

Abstract translation: 描述了调整和自动的向内收缩和向外扩张机制，特别是提供操作中可变规格调节功能以及爪臂自动向内收缩和向外扩张的功能的单一机构。 该机构包括蜗杆，用于驱动蜗轮和其他相关装置旋转，使得圆柱形凹槽凸轮上下运动。 随着圆柱形凹槽凸轮上下运动，进一步借助于L型转向块，推拉杆和四杆连杆，提供爪进行规格调整。 在机器的运转过程中，当L型转向盘下的插杆的滚子沿着圆柱形凹槽凸轮的槽旋转时，由于凹槽的波动，插入杆上下运动， 通过L型转向块，推拉杆和四杆连杆的爪臂的收缩和膨胀，以满足扩大袋口和密封前的操作的要求 治疗。 本机构不仅可以通过蜗杆直接调整受袋子规格的爪臂之间的距离，还可以在袋子正确定位于特定的位置时执行爪臂的自动收缩和膨胀的功能 以便与外部结构配合，用于扩大袋口，对袋进行充气和热封处理。

公开(公告)号：US5042233A

公开(公告)日：1991-08-27

申请号：US548371

申请日：1990-07-05

Applicant: Gordon Huang ,  Gang-Shyr Guan ,  Wen-Chau Wang ,  Shun-Shang Kao ,  Shih-Hen Shyu ,  Fu-Ching Tung ,  Jin-Guan Liu

Inventor： Gordon Huang ,  Gang-Shyr Guan ,  Wen-Chau Wang ,  Shun-Shang Kao ,  Shih-Hen Shyu ,  Fu-Ching Tung ,  Jin-Guan Liu

IPC: B65B5/06 ,  B65B7/20

CPC classification number: B65B5/061 ,  B65B7/20

Abstract: A method and apparatus for unclosing and enclosing the flaps of a package carton, so that cartons can be transported along the transportation path without shifting backward or shifting away from the transportation path. The method consists of (a) disposing a package carton on a first transportation slab with the opening of the package carton facing downward; (b) continuously guiding the package carton in the longitudinal direction of the first transportation slab; (c) folding the leading first flap in an upward and forward direction, and guiding the leading first flap to lap on a second transportation slab, then urging the lagging first flap to lap on the second transportation slab; (d) folding the second pair of flaps to trap the second transportation slab between the opening of the package carton and the second pair of flaps; (e) guiding the second pair of flaps to skip from underneath the second transportation slab and to lap on a third transportation slab; (f) folding the leading first slap in a downward and backward direction to trap the third transportation slab between the opening of the package carton and the leading first flap, and guiding the leading first flap to lap on a fourth transportation slab; (g) folding the lagging first flap in a downward and forward direction to trap the fourth transportation slab between the opening of the package carton and the lagging first flap; and (h) guiding the lagging first flap to lap on a fifth transportation slab.

Abstract translation: 一种用于非封闭和封闭包装纸箱的襟翼的方法和装置，使得纸箱可以沿着传送路径传送而不会向后移动或从传送路径移开。 该方法包括：（a）将包装纸箱放置在第一运输板上，其中包装箱的开口面向下; （b）沿着第一输送板的长度方向连续引导包装纸箱; （c）向前和向前折叠引导的第一挡板，并且引导第一挡板在第二输送板上搭接，然后推动滞后的第一挡板在第二输送板上搭接; （d）折叠所述第二对翼片以将所述第二输送板块收纳在所述包装纸箱的开口和所述第二对折翼之间; （e）引导第二对翼片从第二运输板下方跳过并在第三运输板上搭接; （f）沿着向下和向后的方向折叠所述前导第一襟翼以将所述第三输送板块夹在所述包装纸箱的开口和所述引导第一襟翼之间，并且引导所述引导第一襟翼在第四输送板上搭接; （g）沿向下和向前方向折叠滞后的第一襟翼以将第四输送板块收集在包装纸箱的开口和滞后的第一襟翼之间; 和（h）引导滞后的第一个皮瓣在第五个运输板上搭接。

公开(公告)号：US20130068160A1

公开(公告)日：2013-03-21

申请号：US13471462

申请日：2012-05-15

Applicant: Ching-Chiun Wang ,  Chih-Yung Huang ,  Chien-Chih Chen ,  Szu-Hao Chen ,  Fu-Ching Tung ,  Atsushi Oda

Inventor： Ching-Chiun Wang ,  Chih-Yung Huang ,  Chien-Chih Chen ,  Szu-Hao Chen ,  Fu-Ching Tung ,  Atsushi Oda

IPC: C23C16/448 ,  C23C16/04

CPC classification number: C23C14/042 ,  C23C14/12 ,  C23C14/246 ,  C23C14/26

Abstract: An evaporation device and an evaporation apparatus applying the same are adapted to performing evaporation process to an object to be coated. The evaporation device includes a tape carrier and a mask. The tape carrier has a heating region. The object to be coated is located over the heating region and is adapted to move along a feeding direction. The tape carrier is adapted to carry a coating material to pass through the heating region. The coating material is heated in the heating region and evaporated. The mask having an opening between the heating region and the object to be coated is disposed in the periphery of the heating region. The evaporated coating material is adapted to pass through the opening and coated on the object.

Abstract translation: 蒸发装置和应用该蒸发装置的蒸发装置适于对被涂物进行蒸发处理。 蒸发装置包括带状载体和掩模。 带状载体具有加热区域。 待涂覆的物体位于加热区域上方并且适于沿着进给方向移动。 带状载体适于承载涂覆材料以通过加热区域。 涂层材料在加热区域加热并蒸发。 在加热区域的周围配置有在加热区域和被涂物体之间具有开口的掩模。 蒸发的涂层材料适于穿过开口并涂覆在物体上。

公开(公告)号：US20120235121A1

公开(公告)日：2012-09-20

申请号：US13236502

申请日：2011-09-19

Applicant: Chien-Chih CHEN ,  Ching-Chiun WANG ,  Chih-Yung HUANG ,  Jwo-Huei JOU ,  Fu-Ching TUNG

Inventor： Chien-Chih CHEN ,  Ching-Chiun WANG ,  Chih-Yung HUANG ,  Jwo-Huei JOU ,  Fu-Ching TUNG

IPC: H01L51/52 ,  H01L51/56

CPC classification number: H01L51/5287 ,  H05B33/12

Abstract: According to an embodiment of the disclosure, an organic light emitting device is provided, which includes: an inflexible tube comprising an external surface and an internal surface; a transparent conductive layer on the internal surface of the inflexible tube; an organic light emitting layer disposed in the inflexible tube and on the transparent conductive layer; and a conductive layer disposed in the inflexible tube and on the organic light emitting layer. According to an embodiment of the disclosure, a method for forming an organic light emitting device is also provided.

Abstract translation: 根据本公开的实施例，提供了一种有机发光器件，其包括：包含外表面和内表面的不弯曲管; 在柔性管的内表面上的透明导电层; 设置在所述不弯曲管和所述透明导电层上的有机发光层; 以及设置在不弯曲管和有机发光层上的导电层。 根据本公开的实施例，还提供了一种用于形成有机发光器件的方法。

公开(公告)号：US20110079963A1

公开(公告)日：2011-04-07

申请号：US12615811

申请日：2009-11-10

Applicant: Kuan-Chou Chen ,  Fu-Ching Tung ,  Chia-Ming Chen ,  Pei-Shan Wu ,  Tean-Mu Shen ,  Jung-Chen Ho

Inventor： Kuan-Chou Chen ,  Fu-Ching Tung ,  Chia-Ming Chen ,  Pei-Shan Wu ,  Tean-Mu Shen ,  Jung-Chen Ho

IPC: F16C33/10 ,  F16J15/32

CPC classification number: F16C33/76 ,  F16C2300/62 ,  Y10S277/913

Abstract: A vacuum apparatus of rotary motion entry is disclosed, which comprises: a shaft sleeve, disposed on a cavity wall of a vacuum system; a rotary shaft, ensheathed by the shaft sleeve; and a transmission set, connected to the rotary shaft for driving the same; wherein, the rotary shaft is disposed passing through a hole formed on the base of the shaft sleeve while there are a first bearing, a second bearing, a sealing ring and a shaft seal being arranged separately inside the hole. Moreover, the shaft seal has a flake-like lip flange formed extending toward the center of the hole, that is capable of being extended away from the vacuum system by the inserting of the rotary shaft into the hole, and thereby, enabling the lip flange to engage with the rotary shaft tightly by the atmospheric pressure and thus isolating the outside world from the vacuum system.

Abstract translation: 公开了一种旋转运动进入的真空装置，其包括：设置在真空系统的空腔壁上的轴套; 旋转轴，由轴套套管; 以及与驱动该旋转轴的旋转轴连接的变速器组; 其特征在于，所述旋转轴设置成穿过形成在所述轴套的基部上的孔，同时在所述孔内分开设置有第一轴承，第二轴承，密封环和轴密封件。 此外，轴密封件具有形成为朝向孔中心延伸的片状唇缘凸缘，其能够通过将旋转轴插入孔而远离真空系统延伸，从而使得唇缘凸缘 与大气压力紧密地与旋转轴啮合，从而将外界与真空系统隔离开来。

公开(公告)号：US20100123381A1

公开(公告)日：2010-05-20

申请号：US12411797

申请日：2009-03-26

Applicant: FU-CHING TUNG ,  Tean-Mu Shen ,  Jung-Chen Ho ,  Pei-Shan Wu ,  Chia-Ming Chen ,  Kuan-Chou Chen ,  Jung-Chen Chien ,  Muh-Wang Liang

Inventor： FU-CHING TUNG ,  Tean-Mu Shen ,  Jung-Chen Ho ,  Pei-Shan Wu ,  Chia-Ming Chen ,  Kuan-Chou Chen ,  Jung-Chen Chien ,  Muh-Wang Liang

IPC: H01J17/26

CPC classification number: H01J37/32449 ,  H01J37/3244

Abstract: A cathode discharge device is provided. The cathode discharge apparatus includes an anode, a cathode and plural cathode chambers. The cathode is located inside the anode, where the cathode has plural flow channels and at least one flow channel hole, and the plural flow channels are connected to one another through the flow channel hole. The plural cathode chambers are located inside the cathode, wherein each of the cathode chambers has a chamber outlet and a chamber inlet connected with at least one of the flow channels.

Abstract translation: 提供阴极放电装置。 阴极放电装置包括阳极，阴极和多个阴极室。 阴极位于阳极的内部，其中阴极具有多个流动通道和至少一个流动通道孔，并且多个流动通道通过流动通道孔相互连接。 多个阴极室位于阴极内，其中每个阴极室具有腔室出口和与至少一个流动通道连接的室入口。

公开(公告)号：US20080038020A1

公开(公告)日：2008-02-14

申请号：US11616252

申请日：2006-12-26

Applicant: Yun-Sheng Chung ,  Fu-Ching Tung ,  Hsin-Hung Huang

Inventor： Yun-Sheng Chung ,  Fu-Ching Tung ,  Hsin-Hung Huang

IPC: G03G15/08

CPC classification number: G03G15/6529 ,  B65G54/02

Abstract: A substrate transport device includes a chamber, a rotary wheel, a first magnet, a carrier, and a second magnet. The rotary wheel is disposed outside the chamber. The first magnet is disposed on the rotary wheel. The carrier is disposed in the chamber. The second magnet is disposed on the carrier.

Abstract translation: 基板输送装置包括室，旋转轮，第一磁体，载体和第二磁体。 旋转轮设置在室外。 第一磁铁设置在旋转轮上。 载体设置在腔室中。 第二磁体设置在载体上。

公开(公告)号：US20120145078A1

公开(公告)日：2012-06-14

申请号：US13211309

申请日：2011-08-17

Applicant: Chih-Yung Huang ,  Ching-Chiun Wang ,  Chen-Der Tsai ,  Wen-Tung Hsu ,  Fu-Ching Tung ,  Chien-Chih Chen ,  Yi-Tsung Pan ,  Chien-Jen Sun

Inventor： Chih-Yung Huang ,  Ching-Chiun Wang ,  Chen-Der Tsai ,  Wen-Tung Hsu ,  Fu-Ching Tung ,  Chien-Chih Chen ,  Yi-Tsung Pan ,  Chien-Jen Sun

IPC: C23C16/455 ,  B05B1/14

CPC classification number: C23C16/45565 ,  C23C16/4412

Abstract: A showerhead integrating intake and exhaust is provided for showering a gas. The showerhead at least includes a showerhead body that has a gas-active surface and a plurality of intake bores thereon. The showerhead body further includes a central exhaust vent disposed on the gas-active surface. The central exhaust vent may exhaust standing gas and further pre-exhaust byproduct from reaction process.

Abstract translation: 提供集成进气和排气的淋浴头，用于喷射气体。 淋浴头至少包括具有气体活性表面和多个进气孔的喷头体。 喷头体还包括设置在气体活性表面上的中央排气口。 中央排气口可以从反应过程中排放站立气体和进一步预排气副产物。

公开(公告)号：US07927425B2

公开(公告)日：2011-04-19

申请号：US11847316

申请日：2007-08-29

Applicant: Yuan-Yuan Chiang ,  Kuan-Chou Chen ,  Fu-Ching Tung

Inventor： Yuan-Yuan Chiang ,  Kuan-Chou Chen ,  Fu-Ching Tung

IPC: C23C16/00 ,  C23C16/458 ,  C23C16/509 ,  H01L21/3065

CPC classification number: H01L21/6719 ,  H01J37/32431 ,  H01J37/32568 ,  H01L21/67748 ,  H01L21/68792

Abstract: A power-delivery mechanism is provided in the present invention, which utilizes an element with airtight and flexible characteristics coupled to a power-generating unit so as to generate a motion in a specific direction. Besides, an apparatus of plasma -enhanced chemical vapor deposition (PECVD) is also provided in the present invention, which comprises the power-delivery mechanism to load/unload a workpiece onto a stage for processing automatically. Meanwhile, the present invention also provides a height-adjusting unit and a position-indicating unit allowing the operator to adjust the distance between an upper electrode and a lower electrode of the PECVD so that the operator is capable of monitoring and adjusting the distance easily between the upper electrode and the lower electrode outside the chamber of the PECVD.

Abstract translation: 在本发明中提供了一种动力输送机构，其利用与发电单元相耦合的气密和柔性特征的元件，以便产生沿特定方向的运动。 此外，在本发明中还提供了等离子体化学气相沉积（PECVD）装置，其包括将工件装载/卸载到工作台上以自动处理的动力输送机构。 同时，本发明还提供了一种高度调节单元和位置指示单元，其允许操作者调节PECVD的上电极和下电极之间的距离，使得操作者能够容易地监测和调整距离 PECVD室的上电极和下电极。