Abstract:
An insulation resistance drop detector 50 and a method of detecting a state of malfunction of the detector 50 are provided. When open of a coupling capacitor Co or malfunction of a low pass filter 53 is occurred, a time constant of the low pass filter 53 is decreased and a rising time of an output of the low pass filter 53 against an output of a pulse signal P1 becomes shorter than that in a state of normal. Thereby, malfunction of the detector 50 can be detected based on the output of the filter 53 corresponding to change of frequency of the pulse signal P1.
Abstract:
There is provided a connector used for connecting a plurality of first terminals formed on a first electronic part to a plurality of respective second terminals formed on a second electronic part. The connector comprises an intermediate basis material having a spring characteristic, a plurality of first electrically conductive members provided on a first surface of the intermediate basis material, a plurality of second electrically conductive members provided on a second surface of the intermediate basis material, and wiring for connecting each of the first electrically conductive members to corresponding one of the second electrically conductive members.
Abstract:
An electrostatic chuck comprises a sample stage 9 provided with electrodes 1, 2 and 3 for applying n-phase alternating voltage wherein n is equal to or greater than 2, and a circuit for applying the n-phase alternating voltage. The present electrostatic chuck realizes smooth and speedy attraction/separation of the substrate without the need for a charge elimination process, and the present chuck solves the problem of substrate vibration.
Abstract:
A liquid crystal projector, comprising: a liquid crystal panel; a light source for irradiating light onto an image formed on the a liquid crystal panel; a projection lens for enlarging and projecting the image projected from the liquid crystal panel; a cooler, such as a suction fan, for sending cooling air flow onto a panel surface of the liquid crystal panel; an air velocity sensor for sensing air velocity of the cooling air flow sent onto the liquid crystal panel; and a protection device for protecting the liquid crystal panel on a basis of a detected value of the air velocity measured by the air velocity sensor. The is further formed an air passage for passing the cooling air flow along with the panel surface of the liquid crystal panel, and the air velocity sensor is positioned in an exit portion of the cooling air flow passing through the liquid crystal panel.
Abstract:
A cooling system for a battery pack which can reduce the number of components, manufacturing cost and an installation space, is provided. The battery pack includes high-voltage electrically conductive paths connected to a positive electrode and a negative electrode thereof, respectively. The high-voltage electrically conductive path connected to the positive electrode serves as a cooling member. The high-voltage electrically conductive path connected to the positive electrode is arranged along the battery pack to absorb heat generated at the battery pack and dissipate the absorbed heat at a location distant from the battery pack. The invention takes an advantage of the superior heat conductivity of the high-voltage electrically conductive path to cool down the battery pack.
Abstract:
A plasma processing apparatus is provided with a processing chamber which is arranged inside a vacuum container and plasma is formed inside, a circular shape plate member made of a dielectric material arranged above the processing chamber through which an electric field is transmitted, and a cavity part having a cylindrical shape arranged above the plate member and the electric field is introduced inside, in which the cavity part is provided with a first cylindrical cavity part having a cylindrical shape cavity with a large diameter and having the plate member as the bottom face, a second cylindrical cavity part arranged above to be connected to the first cylindrical cavity part and having a cylindrical shape cavity with a small diameter, and a step portion for connecting these between the first and the second cylindrical cavity parts.
Abstract:
The invention is to provide a drug discovery screening apparatus capable of improving a testing operation efficiency. The drug discovery screening apparatus comprises an image measurement unit, an incubator unit integrally connected to the image measurement unit, a fixed stage disposed at the incubator unit, first conveyance means for taking out one of plates stored in a carousel of the incubator unit and conveying the plate onto the fixed stage, second conveyance means for taking out the plate conveyed onto the fixed stage and conveying the plate onto an XY stage disposed at the image measurement unit, and a control unit, wherein the second conveyance means comprises first and second conveyance arms, respectively supported horizontally by a conveyance unit support section, which convey the plates onto the fixed stage and XY stage so as to allow the respective plates to cross each other.
Abstract:
A method and an apparatus for calculating a scan signal so that the scan region becomes a scan region which is based on magnification ratio between desired magnification in a scan-line interval direction and desired magnification in a scan-line direction, and performing a calculation for rotating the scan direction with respect to the scan signal in order to suppress a distortion which is caused to occur when the technology where the scan direction of a charged particle beam is rotated is applied to the technology where the charged particle beam is scanned such that the scan-line interval is enlarged.
Abstract:
A control system and method of a semiconductor inspection system are disclosed, wherein the inspection can be conducted without reducing the reliability of measurement even in the case where the supply voltage drops. The control system has a controller, a power supply for a power on-off circuit constituting a switching regulator designed to maintain the output voltage against a supply voltage drop, and a supply voltage drop detector. In the case where a supply voltage drop is detected during the measurement, the measurement is automatically suspended, and after restoring the supply voltage, the measurement is automatically restarted.
Abstract:
A CPU 52 detects respective voltages across unit cells B1 to Bn and extracts a minimum unit cell having a minimum voltage from the plurality of unit cells B1 to Bn based on the detected voltages. The CPU 52 sets one of cell groups each including two unit cells connected in series except the minimum unit cell as a discharge cell group, and connects the both ends of the discharge cell group to a capacitor C to transfer electric charge from the discharge cell group to the capacitor C and connects the both ends of the minimum unit cell to the capacitor C to transfer electric charge from the capacitor C to the minimum unit cell such that the respective voltages across the unit cells are equalized.