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    Method of producing a device
    11.
    发明授权
    Method of producing a device 有权
    制造装置的方法

    公开(公告)号：US08020266B2

    公开(公告)日：2011-09-20

    申请号：US12172369

    申请日：2008-07-14

    Applicant: Markus Ulm ,  Brian Stark ,  Matthias Metz

    Inventor： Markus Ulm ,  Brian Stark ,  Matthias Metz

    IPC: H01G7/00

    CPC classification number: B60C23/0411 ,  H01L41/1136 ,  H01L41/331 ,  H01L41/43 ,  H02N2/186 ,  H02N2/22 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49172 ,  Y10T29/49176 ,  Y10T29/49224

    Abstract: Methods of making an energy harvesting device are described. A case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.

    Abstract translation: 描述了制造能量收集装置的方法。 通过印刷成型方法注射成型方法产生用于从感测环境收集振动能的壳体和集成压电悬臂。 悬臂装置由压电材料构件和与压电构件耦合的高密度材料的检验质量组成。 印刷形成方法用于构建装置的基底和壁以及压电构件的中性层。 印刷金属层以形成压电元件的电极层和器件的电接触部分。 无源元件也可以形成为器件层的一部分。 整个组件可以封装在塑料中。

    Microelectromechanical devices and fabrication methods
    13.
    发明授权
    Microelectromechanical devices and fabrication methods 有权
    微机电装置及制造方法

    公开(公告)号：US07671515B2

    公开(公告)日：2010-03-02

    申请号：US11594525

    申请日：2006-11-07

    Applicant: Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

    Inventor： Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

    IPC: H01L41/053

    CPC classification number: B81C1/00301 ,  B81B2207/015 ,  B81B2207/097 ,  B81C2203/0136 ,  B81C2203/0145 ,  H01L21/56 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.

    Abstract translation: 这里描述和说明了许多发明。 在一个方面，本发明涉及MEMS器件，以及制造或制造MEMS器件的技术，其具有在最终封装之前封装在腔室中的机械结构。 实施例还包括作为半导体感测结构的一部分的压电材料的位置。 结合压电材料的半导体感测结构可以用作感测装置以提供与感测到的事件相关联的输出信号。

    Component for impedance change in a coplanar waveguide and method for producing a component
    14.
    发明授权
    Component for impedance change in a coplanar waveguide and method for producing a component 失效
    共面波导中的阻抗变化的分量和用于制造组件的方法

    公开(公告)号：US07535325B2

    公开(公告)日：2009-05-19

    申请号：US10572220

    申请日：2004-07-24

    Applicant: Roland Mueller-Fiedler ,  Markus Ulm ,  Mathias Reimann ,  Thomas Buck

    Inventor： Roland Mueller-Fiedler ,  Markus Ulm ,  Mathias Reimann ,  Thomas Buck

    IPC: H01P1/10 ,  H01H59/00

    CPC classification number: H01H59/0009 ,  Y10T29/49105

    Abstract: A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.

    Abstract translation: 提供了一种用于在共面波导中的阻抗变化的部件，其包括两个接地导体和位于接地导体之间的信号线，以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件， 并且是电绝缘的，使得在每种情况下都形成电容器。 连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容，但是连接元件和信号线之间的电容器具有可变电容。 还提供了一种结构，其中以相反的方式，接地导体和连接元件之间的相应电容器具有可变电容，但是连接元件和信号线之间的电容器具有不变的电容。 此外，还提供了这种组分的制造方法。

    Anti-stiction technique for electromechanical systems and electromechanical device employing same
    15.
    发明授权
    Anti-stiction technique for electromechanical systems and electromechanical device employing same 有权
    机电系统的抗静电技术和采用该机电系统的机电装置

    公开(公告)号：US07449355B2

    公开(公告)日：2008-11-11

    申请号：US11115828

    申请日：2005-04-27

    Applicant: Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    Inventor： Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    IPC: H01L21/00 ,  H01L21/461

    CPC classification number: B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

    Abstract: A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

    Abstract translation: 机械结构设置在室中，其至少一部分由封装结构限定。 第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。 第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 该至少一个部分与机电装置分开制造，然后固定在机电装置上。 第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。 一种器件包括衬底，封装结构和机械结构。 抗静电层设置在机械结构的至少一部分上。 在基板和封装结构中的至少一个中形成抗静电通道。 帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。

    Electrical system, especially a microelectronic or microelectromechanical high frequency system
    16.
    发明申请
    Electrical system, especially a microelectronic or microelectromechanical high frequency system 审中-公开
    电气系统，特别是微电子或微机电高频系统

    公开(公告)号：US20060097388A1

    公开(公告)日：2006-05-11

    申请号：US10520218

    申请日：2003-06-24

    Applicant: Klaus Breitschwerdt ,  Markus Ulm ,  Andrea Urban ,  Mathias Reimann

    Inventor： Klaus Breitschwerdt ,  Markus Ulm ,  Andrea Urban ,  Mathias Reimann

    IPC: H01L23/34

    CPC classification number: H01L23/66 ,  H01L2223/6616 ,  H01L2223/6627 ,  H01L2924/15313 ,  H01L2924/16152 ,  H01L2924/1903 ,  H01L2924/3011 ,  H01P1/047 ,  H01P11/00

    Abstract: An electrical component is proposed, in particular a high-frequency microelectronic or microelectromechanical component having a base element that is provided with a feedthrough, a first conductive structure extending on an upper side of the base element being connected by the feedthrough, continuously for high-frequency electromagnetic waves, to a second conductive structure extending on a lower side of the base element. The feedthrough has the form of a right prism or cylinder, and the first and/or the second conductive structure is embodied as a planar waveguide, in particular as a coplanar waveguide. Also proposed is a method for producing an electrical component having a feedthrough for high-frequency electromagnetic waves through a base element, an electrically conductive layer being applied on an upper side of the base element and an etching mask being applied on a lower side of the base element; a trench, having at least almost perpendicular sidewalls and penetrating through the base element, then being etched into the base element in a plasma etching step; an electrically conductive layer being applied on the lower side after the etching and after removal of the etching mask; and the trench lastly being filled or lined with an electrically conductive material.

    Abstract translation: 提出了一种电气元件，特别是具有设置有馈通的基座元件的高频微电子或微机电元件，在基座元件的上侧延伸的第一导电结构，通过馈通连接， 到基底元件的下侧延伸的第二导电结构。 馈通具有右棱镜或圆筒的形式，并且第一和/或第二导电结构被实施为平面波导，特别是作为共面波导。 还提出了一种用于制造具有通过基底元件的高频电磁波的馈通的电气元件的方法，将导电层施加在基底元件的上侧，并且将蚀刻掩模施加在基底元件的下侧 基本元素 沟槽，具有至少几乎垂直的侧壁并穿过基底元件，然后在等离子体蚀刻步骤中蚀刻到基底元件中; 在蚀刻之后和去除蚀刻掩模之后，在下侧施加导电层; 并且沟槽最后被填充或衬有导电材料。

    Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch
    17.
    发明授权
    Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch 失效
    具有可变电容的电容器的装置，特别是高频微动开关

    公开(公告)号：US06882255B2

    公开(公告)日：2005-04-19

    申请号：US10220683

    申请日：2001-12-13

    Applicant: Roland Mueller-Fiedler ,  Thomas Walter ,  Markus Ulm

    Inventor： Roland Mueller-Fiedler ,  Thomas Walter ,  Markus Ulm

    IPC: H01H59/00 ,  H01P1/12 ,  H01P3/02 ,  H01P1/10

    CPC classification number: H01P1/127 ,  H01H59/0009

    Abstract: A capacitor with alterable capacitance for changing the impedance of a section of a coplanar waveguide, which may be used in particular as a high-frequency microswitch, is provided. A ground lead and a signal lead interrupted by an electroconductive connection which is self-supporting at least in some areas are provided, the capacitor including the electroconductive connection and an additional electroconductive connection connected to the ground lead. A structure connected to the electroconductive connection is provided, which is designed in such a manner that it reduces mechanical stresses which occurs in the electroconductive connection. An exemplary embodiment of the device provides for the electroconductive connection to be made of a material having coefficients of thermal expansion similar to that of silicon and a high modulus of elasticity compared to metals, in particular of molybdenum, tantalum or tungsten. The two exemplary embodiments may be combined.

    Abstract translation: 提供了具有可变电容的电容器，用于改变可以特别用作高频微型开关的共面波导的一部分的阻抗。 至少在一些区域中，由导电连接中断的接地引线和信号引线被提供，该电容器包括导电连接和连接到接地引线的附加导电连接。 提供连接到导电连接的结构，其被设计成使得其减小在导电连接中发生的机械应力。 该装置的一个示例性实施例提供了导电连接，该导电连接由具有类似于硅的热膨胀系数的材料制成，并且与金属特别是钼，钽或钨相比具有高的弹性模量。 两个示例性实施例可以组合。

    Coplanar switch
    18.
    发明授权
    Coplanar switch 失效
    共面开关

    公开(公告)号：US06762923B2

    公开(公告)日：2004-07-13

    申请号：US10149943

    申请日：2002-08-27

    Applicant: Roland Mueller-Fiedler ,  Thomas Walter ,  Markus Ulm

    Inventor： Roland Mueller-Fiedler ,  Thomas Walter ,  Markus Ulm

    IPC: H01G500

    CPC classification number: H01P1/2013 ,  H01H59/0009 ,  H01P1/127 ,  H01P3/003

    Abstract: A device including a capacitor system for varying the impedance of a section of a coplanar waveguide. The capacitance of the capacitor system is variable. The capacitor system includes a first electrically conductive connection, a second electrically conductive connection, and a third electrically conductive connection at least partially. The signal line of the section of the waveguide is interrupted over a predetermined length, the first connection connecting the ground lines of the waveguide, the second connection connecting the ground lines of the waveguide, and the third connection connecting the two parts of the interrupted signal line.

    Abstract translation: 一种包括用于改变共面波导的一部分的阻抗的电容器系统的装置。 电容器系统的电容是可变的。 电容器系统至少部分地包括第一导电连接，第二导电连接和第三导电连接。 波导部分的信号线被中断预定长度，连接波导的接地线的第一连接，连接波导的接地线的第二连接和连接中断信号的两部分的第三连接 线。

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