公开(公告)号：US08045157B2

公开(公告)日：2011-10-25

申请号：US12377336

申请日：2008-06-05

Applicant: Katsumi Shibayama ,  Helmut Teichmann ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi Shibayama ,  Helmut Teichmann ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/18 ,  G01J3/2803

Abstract: Since a spectroscopic module (1) has a plate-shaped body section (2), the spectroscopic module can be reduced in size by reducing the thickness of the body section (2). Moreover, since the body section (2) is plate-shaped, the spectroscopic module (1) can be manufactured, for example, by using a wafer process. More specifically, by providing lens sections (3), diffraction layers (4), reflection layers (6) and light detecting elements (7) in a matrix form on a glass wafer which becomes many body sections (2) and dicing the glass wafer, many spectroscopic modules (1) can be manufactured. This enables easy mass production of spectroscopic modules (1).

Abstract translation: 由于分光模块（1）具有板状主体部（2），所以可以通过减小主体部（2）的厚度来减小分光模块的尺寸。 此外，由于主体部（2）是板状的，所以可以例如通过使用晶片工艺来制造分光模块（1）。 更具体地说，通过在成为许多主体部分（2）的玻璃晶片上提供矩阵形式的透镜部分（3），衍射层（4），反射层（6）和光检测元件（7），并将玻璃晶片 ，可以制造许多光谱模块（1）。 这使得能够容易地批量生产光谱模块（1）。

公开(公告)号：US07961317B2

公开(公告)日：2011-06-14

申请号：US12377306

申请日：2008-06-10

Applicant: Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/02 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0259 ,  G01J3/0291

Abstract: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.

公开(公告)号：US20100208257A1

公开(公告)日：2010-08-19

申请号：US12377300

申请日：2008-06-05

Applicant: Katsumi Shibayama ,  Helmut Teichmann ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi Shibayama ,  Helmut Teichmann ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/02

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/2803

Abstract: In the spectroscopy module 1, a light detecting element 4 is provided with a light passing opening 4b through which light made incident into a body portion 2 passes. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing opening 4b and a light detection portion 4a of the light detecting element 4. Further, an optical element 7, which guides light made incident into the body portion 2, is arranged at the light passing opening 4b. Therefore, light, which is to be made incident into the body portion 2, is not partially blocked at a light incident edge portion of the light passing opening 4b, but light, which is to be made incident into the body portion 2, can be guided securely. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.

Abstract translation: 在光谱模块1中，光检测元件4设置有入射到主体部分2中的光通过的光通过开口4b。 因此，能够防止光通过口4b与光检测元件4的光检测部4a之间的相对位置关系的偏差。此外，引导入射到主体部2的光的光学元件7， 布置在光通过开口4b处。 因此，入射到主体部分2中的光在光通过开口4b的光入射边缘部分处不被部分阻挡，而入射到主体部分2中的光可以是 引导安全。 因此，根据光谱模块1，可以提高可靠性。

公开(公告)号：US08045160B2

公开(公告)日：2011-10-25

申请号：US13086065

申请日：2011-04-13

Applicant: Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/02 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0259 ,  G01J3/0291

Abstract: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.

Abstract translation: 对准标记12a，12b，12c和12d形成在与衍射层8一体形成的周缘部分11的平面11a上，并且当透镜部分7安装到基板2上时，这些对准标记12a，12b ，12c和12d位于基板2上，从而使衍射层8相对于光检测元件4的光检测部分4a精确对准，例如不依赖于透镜的曲率半径的差异 特别地，对准标记12a，12b，12c和12d形成在平面11a上，由此，图像识别被精确地检测对准标记12a，12b，12c和12d的位置，从而可以 准确对齐。

公开(公告)号：US08045155B2

公开(公告)日：2011-10-25

申请号：US12377343

申请日：2008-06-05

Applicant: Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/26

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/04

Abstract: The spectroscopy module is provided with a body portion for transmitting light, a spectroscopic portion for dispersing light made incident from the front plane of the body portion into the body portion to reflect the light on the front plane, a light detecting element having a light detecting portion for detecting the light dispersed and reflected by the spectroscopic portion and electrically connected to a wiring formed on the front plane of the body portion by face-down bonding, and an underfill material filled in the body portion side of the light detecting element to transmit the light. The light detecting element is provided with a light-passing hole through which the light advancing into the spectroscopic portion passes, and a reservoir portion is formed on a rear plane of the body portion side in the light detecting element so as to enclose a light outgoing opening of the light-passing hole.

Abstract translation: 光谱模块设置有用于透射光的主体部分，用于将从主体部分的前平面入射的光分散到主体部分中以将光反射到前平面上的光谱部分，具有光检测的光检测元件 用于检测由分光部分分散和反射的光并通过面朝下接合与形成在主体部分的前平面上的布线电连接的光;以及填充在光检测元件的主体部分侧的底部填充材料， 光。 光检测元件设置有通向分光部分的光通过的通光孔，并且在光检测元件中的主体部分侧的后平面上形成储存部分，以便包围光出射 打开通光孔。

公开(公告)号：US20110205538A1

公开(公告)日：2011-08-25

申请号：US13086065

申请日：2011-04-13

Applicant: Katsumi SHIBAYAMA ,  Takafumi YOKINO ,  Tomofumi SUZUKI ,  Helmut TEICHMANN ,  Dietmar HILLER ,  Ulrich STARKER

Inventor： Katsumi SHIBAYAMA ,  Takafumi YOKINO ,  Tomofumi SUZUKI ,  Helmut TEICHMANN ,  Dietmar HILLER ,  Ulrich STARKER

IPC: G01J3/18

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0259 ,  G01J3/0291

Abstract: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.

Abstract translation: 对准标记12a，12b，12c和12d形成在与衍射层8一体形成的周缘部分11的平面11a上，并且当透镜部分7安装到基板2上时，这些对准标记12a，12b ，12c和12d位于基板2上，从而使衍射层8相对于光检测元件4的光检测部分4a精确对准，例如不依赖于透镜的曲率半径的差异 特别地，对准标记12a，12b，12c和12d形成在平面11a上，由此，图像识别被精确地检测对准标记12a，12b，12c和12d的位置，从而可以 准确对齐。

公开(公告)号：US07605917B2

公开(公告)日：2009-10-20

申请号：US11596066

申请日：2005-07-08

Applicant: Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/18

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/18

Abstract: A spectrometer 1A is made up of: an optical body 10 within which a light separation path is set along which an object light to be separated propagates; a light entry slit 16 through which the object light enters; a diffraction grating 17 for spectrally separating the incident object light; and a photodiode array 18 for detecting the object light separated by the diffraction grating 17. As an optical member for optically interconnecting the optical body 10 and the photodiode array 18, an optical connection member 20 is provided, with its light entry surface 21 for the separated object light in contact with the upper surface 11 of the optical body 10, with its light exit surface 22 in contact with the photodiode array 18, with the light exit surface 22 tilted by a specified angle relative to the light entry surface 21. Thus, the spectrometer capable of bringing about sufficient accuracy of placing optical elements in a simple constitution while bringing down cost is realized.

Abstract translation: 光谱仪1A由以下部分组成：光学体10，其中设置有光分离路径，待分离的物体沿着该光分离路径传播; 物体光进入的光入口狭缝16; 用于光谱分离入射物体光的衍射光栅17; 以及用于检测由衍射光栅17分离的物体光的光电二极管阵列18.作为用于光学互连光学体10和光电二极管阵列18的光学构件，设置有光学连接构件20，其光入射表面21用于 分离的物体光与光学体10的上表面11接触，其光出射表面22与光电二极管阵列18接触，光出射表面22相对于光入射表面21倾斜一定的角度。因此 能够实现能够以简单的结构放置光学元件的足够精度的光谱仪，同时降低成本。

公开(公告)号：US20090135420A1

公开(公告)日：2009-05-28

申请号：US12066546

申请日：2005-09-22

Applicant: Dietmar Hiller ,  Helmut Teichmann ,  Ulrich Starker

Inventor： Dietmar Hiller ,  Helmut Teichmann ,  Ulrich Starker

IPC: G01J3/00

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/0259 ,  G01J3/0289 ,  G01J3/0291

Abstract: A spectrometer 1A is constituted with an optical body 10, a glass member 11 formed with a light entry slit 12, and a connecting flange 20. The connecting flange 20 is provided with an opening 21 to which the glass member 11 is positioned and inserted, and with positioning rods 25 provided in positions in front of and behind the opening 21 as positioned relative to the opening 21. Using the positioning rods 25, when the spectrometer 1A is applied to the measuring apparatus, makes it possible to connect the spectrometer 1A and other components of the measuring apparatus through a passive alignment method simply with high accuracy. Thus, a spectrometer capable of favorably achieving optical connection to light to be optically separated and a measuring apparatus using the spectrometer can be realized.

Abstract translation: 光谱仪1A由光学体10，形成有光入口狭缝12的玻璃构件11和连接凸缘20构成。连接凸缘20设置有玻璃构件11定位和插入的开口21， 并且定位杆25设置在相对于开口21定位的开口21的前方和后方的位置。使用定位杆25，当将光谱仪1A应用于测量装置时，可以将光谱仪1A和 测量装置的其他部件通过无源对准方法简单地具有高精度。 因此，可以实现能够有利地实现与光分离的光的光学连接的光谱仪和使用光谱仪的测量装置。

公开(公告)号：US20080259331A1

公开(公告)日：2008-10-23

申请号：US10580841

申请日：2004-11-24

Applicant: Mitsuaki Kageyama ,  Katsumi Shibayama ,  Seiichiro Mizuno ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Mitsuaki Kageyama ,  Katsumi Shibayama ,  Seiichiro Mizuno ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/10

CPC classification number: H01L27/1446 ,  G01J3/0243 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/2803

Abstract: A photodiode array, having a plurality of photodiodes 12 (n-type channel regions 121), and a light entrance portion 13, formed of an opening that is used to make light to be detected by photodiodes 12 enter, are provided in a substrate 10 of a photodetector 1A having an n-type substrate 101 and a p-type epitaxial layer 102. Furthermore, a carrier capturing portion 60, for capturing carriers generated at a substrate portion near the light entrance portion 13 and removes the captured carriers to the exterior via an electrode 61, is arranged from a layer portion of the epitaxial layer 102 that is positioned between the photodiode array 11 and the light entrance portion 13. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.

Abstract translation: 具有多个光电二极管12（n型沟道区域121）的光电二极管阵列以及由用于使由光电二极管12检测出的光的开口形成的光入射部分13设置在基板10中 具有n型衬底101和p型外延层102的光电检测器1A。 此外，用于捕获在光入口部分13附近的基板部分处产生的载流子并且经由电极61将捕获的载流子移除到外部的载体捕获部分60从外延层102的位于 光电二极管阵列11和光入射部13。 一种简单布置的光电检测器，当应用于光谱仪时，可以提高光谱仪的部件的定位精度，从而实现使用该光电检测器的光谱仪。

公开(公告)号：US20100315633A1

公开(公告)日：2010-12-16

申请号：US12377306

申请日：2008-06-10

Applicant: Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/28

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0259 ,  G01J3/0291

Abstract: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.

Abstract translation: 对准标记12a，12b，12c和12d形成在与衍射层8一体形成的周缘部分11的平面11a上，并且当透镜部分7安装到基板2上时，这些对准标记12a，12b ，12c和12d位于基板2上，从而使衍射层8相对于光检测元件4的光检测部分4a精确对准，例如不依赖于透镜的曲率半径的差异 特别地，对准标记12a，12b，12c和12d形成在平面11a上，由此，图像识别被精确地检测对准标记12a，12b，12c和12d的位置，从而可以 准确对齐。