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公开(公告)号：US06992495B2
公开(公告)日：2006-01-31
申请号：US10607768
申请日：2003-06-27
Applicant: Bryan J. Root , William A. Funk
Inventor： Bryan J. Root , William A. Funk
IPC: G01R32/02
CPC classification number: G01R1/067 , G01R1/06711 , G01R1/18
Abstract: A shielded probe apparatus is provided with a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis. The shielded probe apparatus is capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300 C.
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公开(公告)号：US06237602B1
公开(公告)日：2001-05-29
申请号：US09128234
申请日：1998-08-03
Applicant: Kevin L. Nickels , Matthew J. Dunfee , David A. Lung , Roy A. Facklam , William A. Funk , Francis C. Peterson
Inventor： Kevin L. Nickels , Matthew J. Dunfee , David A. Lung , Roy A. Facklam , William A. Funk , Francis C. Peterson
IPC: A61F537
Abstract: An force generator includes an elongate force generator body that has a longitudinal dimension and has a fluid chamber defined therein. The force generator body exhibits a dimensional extension responsive to an increase in fluid in the fluid chamber and a dimensional retraction responsive to a decrease in fluid in the fluid chamber. A restraint apparatus channels the dimensional extension/retraction into the longitudinal dimension and restrains dimensional extension in a dimension transverse thereto.
Abstract translation: 力发生器包括具有纵向尺寸并具有限定在其中的流体室的细长力发生器本体。 该力发生器主体响应于流体室中的流体的增加而呈现尺寸延伸，并且响应于流体室中的流体的减少而呈现尺寸缩回。 约束装置将尺寸延伸/缩回引导到纵向尺寸并限制在与其横向的尺寸上的尺寸延伸。
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公开(公告)号：US08698515B2
公开(公告)日：2014-04-15
申请号：US13210750
申请日：2011-08-16
Applicant: Bryan J. Root , William A. Funk
Inventor： Bryan J. Root , William A. Funk
IPC: G01R31/00
CPC classification number: G01R1/07307 , G01R31/2887 , G01R31/2889
Abstract: A test apparatus is described that can be useful as test equipment in various applications, including for example testing a semiconductor device. The test apparatus has a circuit board, a probe card, and a card holder. The circuit board includes a contact layout that electrically connects with a probe card at one portion and electrically connects with a probe card holder at another portion. The probe card has probes for electrically contacting a device to be tested, and has a contact configuration that electrically connects with the circuit board. The apparatus allows for electrical signals to be sent to and from the probe card, through the probe card holder and circuit board, in testing a device such as for example a semiconductor device. The circuit board and probe card holder have an attachment structure, configured for example as a notch and catch finger attachment arrangement.
Abstract translation: 描述了一种测试装置，其可用作各种应用中的测试设备，包括例如测试半导体器件。 测试装置具有电路板，探针卡和卡夹。 电路板包括一个接触布局，其一部分与探针卡电连接并且在另一部分与探针卡夹持器电连接。 探针卡具有用于电接触待测试装置的探针，并具有与电路板电连接的接触构造。 该装置允许在测试诸如半导体器件的器件时通过探针卡夹持器和电路板将电信号发送到探针卡和从探针卡发送。 电路板和探针卡保持器具有附接结构，例如配置为凹口和卡爪指状物附接装置。
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公开(公告)号：US20120038380A1
公开(公告)日：2012-02-16
申请号：US13210750
申请日：2011-08-16
Applicant: Bryan J. Root , William A. Funk
Inventor： Bryan J. Root , William A. Funk
IPC: G01R31/20
CPC classification number: G01R1/07307 , G01R31/2887 , G01R31/2889
Abstract: A test apparatus is described that can be useful as test equipment in various applications, including for example testing a semiconductor device. The test apparatus has a circuit board, a probe card, and a card holder. The circuit board includes a contact layout that electrically connects with a probe card at one portion and electrically connects with a probe card holder at another portion. The probe card has probes for electrically contacting a device to be tested, and has a contact configuration that electrically connects with the circuit board. The apparatus allows for electrical signals to be sent to and from the probe card, through the probe card holder and circuit board, in testing a device such as for example a semiconductor device. The circuit board and probe card holder have an attachment structure, configured for example as a notch and catch finger attachment arrangement.
Abstract translation: 描述了一种测试装置，其可用作各种应用中的测试设备，包括例如测试半导体器件。 测试装置具有电路板，探针卡和卡夹。 电路板包括一个接触布局，其一部分与探针卡电连接并且在另一部分与探针卡夹持器电连接。 探针卡具有用于电接触待测试装置的探针，并具有与电路板电连接的接触构造。 该装置允许在测试诸如半导体器件的器件时通过探针卡夹持器和电路板将电信号发送到探针卡和从探针卡发送。 电路板和探针卡保持器具有附接结构，例如配置为凹口和卡爪指状物附接装置。
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公开(公告)号：US20100203758A1
公开(公告)日：2010-08-12
申请号：US12762413
申请日：2010-04-19
Applicant: Bryan J. Root , William A. Funk
Inventor： Bryan J. Root , William A. Funk
IPC: H01R13/73
CPC classification number: G01R1/0491 , G01R1/07364
Abstract: A probe apparatus is provided with a plurality of probe tiles, an interchangeable plate for receiving the probe tiles, a floating plate being disposed between the respective probe tile and a receiving hole on the interchangeable plate, and a control mechanism providing multi-dimensional freedom of motions to control a position of the probe tile relative to the respective receiving hole of the interchangeable plate. A method of controlling the floating plate is also provided by inserting a pair of joysticks into two respective adjustment holes disposed on the floating plate and moving the pair of joysticks to provide translational motions (X-Y) and rotational (theta) motion of the floating plate, and turning the pair of jack screws clockwise and counter-clockwise to provide a translational motion (Z) and two rotational (pitch and roll) motions of the floating plate.
Abstract translation: 探针装置设置有多个探针瓦片，用于接收探针瓦片的可互换板，设置在相应探针瓦片和可互换板材上的接收孔之间的浮动板，以及提供多维自由度的控制机构 用于控制探针瓦片相对于可互换板的相应容纳孔的位置的运动。 通过将一对操纵杆插入设置在浮动板上的两个相应的调节孔并移动该对操纵杆以提供浮动板的平移运动（XY）和旋转（theta）运动，也提供了一种控制浮动板的方法， 并顺时针和逆时针转动一对千斤顶螺丝，以提供浮动板的平移运动（Z）和两个旋转（俯仰和滚动）运动。
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Patent Agency Ranking
公开(公告)号：US07545157B2
公开(公告)日：2009-06-09
申请号：US11779669
申请日：2007-07-18
Applicant: Bryan J. Root , William A. Funk
Inventor： Bryan J. Root , William A. Funk
IPC: G01R31/02
CPC classification number: G01R1/067 , G01R1/06711 , G01R1/18
Abstract: A shielded probe apparatus is provided with a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis. The shielded probe apparatus is capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300 C.
Abstract translation: 屏蔽探针装置设置有屏蔽探针和三线电缆，其在屏蔽的机壳内电连接。 屏蔽探针装置能够以低于100fA的工作电流和高达300℃的工作温度对半导体器件进行电测试。
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公开(公告)号：US06963207B2
公开(公告)日：2005-11-08
申请号：US10383079
申请日：2003-03-06
Applicant: Bryan J. Root , William A. Funk
Inventor： Bryan J. Root , William A. Funk
CPC classification number: G01R1/07342 , G01R1/06772 , G01R1/44
Abstract: A method and apparatus for terminating a probe that probes a semiconductor device with a signal cable from a tester is provided to connect layers of the probe to layers of the signal cable side by side. The probe and signal cable can be a co-axial or tri-axial probe and signal cable, respectively. A center conductive probe needle of the probe is disposed side by side with and electrically connects to a center signal conductor of the signal cable. A dielectric layer of the probe is disposed side by side with and connects to a dielectric layer of the signal cable. A conductive guard layer of the probe is disposed side by side with and electrically connects to a conductive dispersion/guard layer of the signal cable, and a sleeve of the probe is disposed side by side with and connects to a sleeve of the signal cable. In a tri-axial embodiment, a second dielectric layer of the probe is disposed side by side with and connects to a second dielectric layer of the signal cable.
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公开(公告)号：US09024651B2
公开(公告)日：2015-05-05
申请号：US14131058
申请日：2012-07-06
Applicant: Bryan J. Root , William A. Funk , Michael Palumbo , John L. Dunklee
Inventor： Bryan J. Root , William A. Funk , Michael Palumbo , John L. Dunklee
CPC classification number: G01R1/07307 , G01R1/07364 , G01R31/2601 , G01R31/2889
Abstract: A test apparatus for testing a semiconductor device includes a circuit board having a contact pattern on one side and an opening therethrough, and a probe card supporting a probe needle array. The probe needle array is insertable into the opening of the circuit board and is configured to probe a device under test. The probe needle array is in electrical contact with the contact pattern of the circuit board, to allow signals through the probe card and circuit board to a test equipment. A holder supports the probe card and other probe cards. The holder has multiple sides, each of which is supportable of a probe card having a probe needle array. The holder is rotatable to manipulate and position the probe needle arrays of the probe cards relative to a device under test. The holder allows disconnection and replacement of the probe needle arrays from the holder.
Abstract translation: 用于测试半导体器件的测试装置包括：一侧具有接触图案的电路板和穿过其的开口;以及支撑探针针阵列的探针卡。 探针针阵列可插入电路板的开口中，并配置成探测被测器件。 探针针阵列与电路板的接触图形电接触，以允许通过探针卡和电路板的信号到测试设备。 支架支持探针卡和其他探针卡。 保持器具有多个侧面，每个侧面可支撑具有探针针阵列的探针卡。 保持器可旋转以相对于被测设备操纵和定位探针卡的探针针阵列。 支架允许从保持器断开和更换探针针阵列。
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公开(公告)号：US09018966B2
公开(公告)日：2015-04-28
申请号：US14131072
申请日：2012-07-06
Applicant: Bryan J. Root , William A. Funk , John L. Dunklee
Inventor： Bryan J. Root , William A. Funk , John L. Dunklee
CPC classification number: G01R1/07307 , G01R1/07364 , G01R31/2601 , G01R31/2889
Abstract: A probe apparatus has probe wires with a contact pattern on one side. The contact pattern is for contacting a respective contact pattern on another test equipment or component, such as a circuit board. The probe wires have tips that probe a device desired for testing. Signals are transmitted through the probe wires from the probe card, for example, through a circuit board to other diagnostic equipment. The contact of the probe card with the circuit board allows signals to be transferred through the probe wires to the other diagnostic equipment. On another side of the probe card is a connector structure. The connector structure includes a retainer that can allow the probe card to be replaced from a test system, such as allowing it to be connected and disconnected from a holder.
Abstract translation: 探针装置具有在一侧具有接触图案的探针线。 接触图案用于接触另一测试设备或组件（例如电路板）上的相应接触图案。 探针线具有探测需要测试的设备的尖端。 信号通过探针线从探针卡传输，例如通过电路板传输到其他诊断设备。 探针卡与电路板的接触允许通过探针线将信号传输到另一个诊断设备。 在探针卡的另一侧是连接器结构。 连接器结构包括保持器，其可以允许探针卡从测试系统更换，例如允许探针卡与支架连接和断开。
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公开(公告)号：US08994390B2
公开(公告)日：2015-03-31
申请号：US14131080
申请日：2012-07-06
Applicant: Bryan J. Root , William A. Funk , John L. Dunklee
Inventor： Bryan J. Root , William A. Funk , John L. Dunklee
CPC classification number: G01R1/07364 , G01R1/0466 , G01R1/073 , G01R31/26 , G01R31/2889
Abstract: A probe apparatus has probe wires with a contact pattern on one side. The contact pattern is for contacting a respective contact pattern on another test equipment or component, such as a circuit board. The probe wires have tips that probe a device desired for testing. Signals are transmitted through the probe wires from the probe card, for example, through a circuit board to other diagnostic equipment. The contact of the probe card with the circuit board allows signals to be transferred through the probe wires to the other diagnostic equipment. On another side of the probe card is a connector structure. The connector structure includes a retainer that can allow the probe card to be replaced from a test system, such as allowing it to be connected and disconnected from a holder.
Abstract translation: 探针装置具有在一侧具有接触图案的探针线。 接触图案用于接触另一测试设备或组件（例如电路板）上的相应接触图案。 探针线具有探测需要测试的设备的尖端。 信号通过探针线从探针卡传输，例如通过电路板传输到其他诊断设备。 探针卡与电路板的接触允许通过探针线将信号传输到另一个诊断设备。 在探针卡的另一侧是连接器结构。 连接器结构包括保持器，其可以允许探针卡从测试系统更换，例如允许探针卡与支架连接和断开。
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