-
公开(公告)号:US20230058423A1
公开(公告)日:2023-02-23
申请号:US17408429
申请日:2021-08-22
Applicant: Applied Materials, Inc.
Inventor: Christophe J. Chevallier , Siddarth Krishnan
Abstract: A method of correcting bias temperature instability in memory arrays may include applying a first bias to a memory cell, where the memory cell may include a memory element and a select element, and the first bias may causes a value to be stored in the memory element. The first bias causes a bias temperature instability (BTI) associated with the memory cell to increase. The method may also include applying a second bias to the memory cell, where the second bias may have a polarity that is opposite of the first bias, and the value stored in the memory element remains in the memory element after the second bias is applied. The second bias may also cause the BTI associated with the memory cell to decrease while maintaining any value stored in the memory cell.
-
公开(公告)号:US20220310531A1
公开(公告)日:2022-09-29
申请号:US17214411
申请日:2021-03-26
Applicant: Applied Materials, Inc.
Inventor: Amirhasan Nourbakhsh , Lan Yu , Joseph F. Salfelder , Ki Cheol Ahn , Tyler Sherwood , Siddarth Krishnan , Michael Jason Fronckowiak , Xing Chen
IPC: H01L23/00 , H01L21/311 , H01L21/308 , H01L21/304
Abstract: Exemplary methods of processing a semiconductor substrate may include forming a layer of dielectric material on the semiconductor substrate. The methods may include performing an edge exclusion removal of the layer of dielectric material. The methods may include forming a mask material on the semiconductor substrate. The mask material may contact the dielectric material at an edge region of the semiconductor substrate. The methods may include patterning an opening in the mask material overlying a first surface of the semiconductor substrate. The methods may include etching one or more trenches through the semiconductor substrate.
-
公开(公告)号:US20220165574A1
公开(公告)日:2022-05-26
申请号:US17102148
申请日:2020-11-23
Applicant: Applied Materials, Inc.
Inventor: Joshua S. Holt , Lan Yu , Tyler Sherwood , Archana Kumar , Nicolas Louis Gabriel Breil , Siddarth Krishnan
IPC: H01L21/28 , H01L29/66 , H01L29/861 , H01L29/45
Abstract: Exemplary methods of forming a semiconductor structure may include forming a layer of metal on a semiconductor substrate. The layer of metal may extend along a first surface of the semiconductor substrate. The semiconductor substrate may be or include silicon. The methods may include performing an anneal to produce a metal silicide. The methods may include implanting ions in the metal silicide to increase a barrier height over 0.65 V.
-
公开(公告)号:US11830824B2
公开(公告)日:2023-11-28
申请号:US17214411
申请日:2021-03-26
Applicant: Applied Materials, Inc.
Inventor: Amirhasan Nourbakhsh , Lan Yu , Joseph F. Salfelder , Ki Cheol Ahn , Tyler Sherwood , Siddarth Krishnan , Michael Jason Fronckowiak , Xing Chen
IPC: H01L23/00 , H01L21/304 , H01L21/308 , H01L21/311
CPC classification number: H01L23/562 , H01L21/304 , H01L21/3086 , H01L21/31111
Abstract: Exemplary methods of processing a semiconductor substrate may include forming a layer of dielectric material on the semiconductor substrate. The methods may include performing an edge exclusion removal of the layer of dielectric material. The methods may include forming a mask material on the semiconductor substrate. The mask material may contact the dielectric material at an edge region of the semiconductor substrate. The methods may include patterning an opening in the mask material overlying a first surface of the semiconductor substrate. The methods may include etching one or more trenches through the semiconductor substrate.
-
公开(公告)号:US11769665B2
公开(公告)日:2023-09-26
申请号:US17572963
申请日:2022-01-11
Applicant: Applied Materials, Inc.
Inventor: Amirhasan Nourbakhsh , Raman Gaire , Tyler Sherwood , Lan Yu , Roger Quon , Siddarth Krishnan
IPC: H01L21/02
CPC classification number: H01L21/02576 , H01L21/02532 , H01L21/02579
Abstract: Exemplary semiconductor processing methods may include forming a p-type silicon-containing material on a substrate including a first n-type silicon-containing material defining one or more features. The p-type silicon-containing material may extend along at least a portion of the one or more features defined in the first n-type silicon-containing material. The methods may include removing a portion of the p-type silicon-containing material. The portion of the p-type silicon-containing material may be removed from a bottom of the one or more features. The methods may include providing a silicon-containing material. The methods may include depositing a second n-type silicon-containing material on the substrate. The second n-type silicon-containing material may fill the one or more features formed in the first n-type silicon-containing material and may separate regions of remaining p-type silicon-containing material.
-
公开(公告)号:US11616195B2
公开(公告)日:2023-03-28
申请号:US16883009
申请日:2020-05-26
Applicant: Applied Materials, Inc.
Inventor: Deepak Kamalanathan , Archana Kumar , Siddarth Krishnan
IPC: H01L45/00
Abstract: Exemplary semiconductor structures for neuromorphic applications may include a first layer overlying a substrate material. The first layer may be or include a first oxide material. The structures may include a second layer disposed adjacent the first layer. The second layer may be or include a second oxide material. The structures may also include an electrode material deposited overlying the second layer.
-
公开(公告)号:US20210280247A1
公开(公告)日:2021-09-09
申请号:US17329008
申请日:2021-05-24
Applicant: Applied Materials, Inc.
Inventor: Deepak Kamalanathan , Siddarth Krishnan , Archana Kumar , Fuxi Cai , Federico Nardi
IPC: G11C13/00
Abstract: A method for setting memory elements in a plurality of states includes applying a set signal to a memory element to transition the memory element from a low-current state to a high-current state; applying a partial reset signal to the memory element to transition the memory element from the high-current state to a state between the high-current state and the low-current state; determining whether the state corresponds to a predetermined state; and applying one or more additional partial reset signals to the memory element until the state corresponds to the predetermined current state. The memory element may be coupled in series with a transistor, and a voltage control circuit may apply voltages to the transistor to set and partially reset the memory element.
-
公开(公告)号:US11017856B1
公开(公告)日:2021-05-25
申请号:US16793794
申请日:2020-02-18
Applicant: Applied Materials, Inc.
Inventor: Deepak Kamalanathan , Siddarth Krishnan , Archana Kumar , Fuxi Cai , Federico Nardi
Abstract: A method for setting memory elements in a plurality of states includes applying a set signal to a memory element to transition the memory element from a low-current state to a high-current state; applying a partial reset signal to the memory element to transition the memory element from the high-current state to a state between the high-current state and the low-current state; determining whether the state corresponds to a predetermined state; and applying one or more additional partial reset signals to the memory element until the state corresponds to the predetermined current state. The memory element may be coupled in series with a transistor, and a voltage control circuit may apply voltages to the transistor to set and partially reset the memory element.
-
公开(公告)号:US20200234959A1
公开(公告)日:2020-07-23
申请号:US16841625
申请日:2020-04-06
Applicant: Applied Materials, Inc.
Inventor: Siddarth Krishnan , Rajesh Sathiyanarayanan , Atashi Basu , Paul F. Ma
IPC: H01L21/28 , H01L29/49 , H01L29/40 , H01L21/285 , H01L29/51 , H01L21/321
Abstract: Methods of modifying the threshold voltage of metal oxide stacks are discussed. These methods utilize materials which provide larger shifts in threshold voltage while also being annealed at lower temperatures.
-
公开(公告)号:US20190181011A1
公开(公告)日:2019-06-13
申请号:US16216500
申请日:2018-12-11
Applicant: Applied Materials, Inc.
Inventor: Siddarth Krishnan , Rajesh Sathiyanarayanan , Atashi Basu , Paul F. Ma
IPC: H01L21/28 , H01L21/321 , H01L29/51 , H01L21/285 , H01L29/49 , H01L29/40
Abstract: Methods of modifying the threshold voltage of metal oxide stacks are discussed. These methods utilize materials which provide larger shifts in threshold voltage while also being annealed at lower temperatures.
-
-
-
-
-
-
-
-
-