公开(公告)号：US20180130685A1

公开(公告)日：2018-05-10

申请号：US15348967

申请日：2016-11-10

Applicant: Applied Materials, Inc.

Inventor： Luke W. Bonecutter ,  David T. Blahnik ,  Paul B. Reuter

IPC: H01L21/677

CPC classification number: H01L21/67766 ,  H01L21/67772 ,  H01L21/67775

Abstract: Embodiments provide systems, apparatus, and methods for an improved load port that includes a frame supporting a dock and a carrier opener; an elevator operable to raise and lower the carrier opener; an isolation compartment within which the elevator is operable to move, the isolation compartment including a volume isolated from a volume of an equipment front end module (EFEM); and a purge supply within the isolation compartment operable to purge the isolation compartment of reactive gas trapped within the isolation compartment. Numerous additional aspects are disclosed.

公开(公告)号：US20230124350A1

公开(公告)日：2023-04-20

申请号：US17506185

申请日：2021-10-20

Applicant: Applied Materials, Inc.

Inventor： Costel Biloiu ,  David T. Blahnik ,  Wai-Ming Tam ,  Charles T. Carlson ,  Frank Sinclair

IPC: H05H7/02 ,  H05H9/00 ,  H05H7/12

Abstract: An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.

公开(公告)号：US11596051B2

公开(公告)日：2023-02-28

申请号：US17108747

申请日：2020-12-01

Applicant: Applied Materials, Inc.

Inventor： Costel Biloiu ,  Charles T. Carlson ,  Frank Sinclair ,  Paul J. Murphy ,  David T. Blahnik

IPC: H05H7/22 ,  H01J37/317

Abstract: An apparatus may include a drift tube assembly, arranged to transmit an ion beam. The drift tube assembly may include a first ground electrode; an RF drift tube assembly, disposed downstream of the first ground electrode; and a second ground electrode, disposed downstream of the RF drift tube assembly. The RF drift tube assembly may define a triple gap configuration. The apparatus may include a resonator, where the resonator comprises a toroidal coil, having a first end, connected to a first RF drift tube of the RF drift tube assembly, and a second end, connected to a second RF drift tube of the RF drift tube assembly.

公开(公告)号：US11171029B2

公开(公告)日：2021-11-09

申请号：US16600241

申请日：2019-10-11

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik ,  Paul B. Reuter ,  Luke W. Bonecutter ,  Douglas B. Baumgarten

IPC: H01L21/677 ,  H01L21/67

Abstract: A carrier door opener includes one or more connector devices configured to interface with a door of a substrate carrier located at a load port. The carrier door opener further includes an outer surface forming a groove and a load port seal seated in the groove. The load port seal is configured to seal against a first portion of a planar surface of a panel of the load port around a panel opening formed by the panel. A second portion of the planar surface of the panel is configured to seal to a factory interface.

公开(公告)号：US20200043770A1

公开(公告)日：2020-02-06

申请号：US16600241

申请日：2019-10-11

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik ,  Paul B. Reuter ,  Luke W. Bonecutter ,  Douglas B. Baumgarten

IPC: H01L21/677 ,  H01L21/67

Abstract: A carrier door opener includes one or more connector devices configured to interface with a door of a substrate carrier located at a load port. The carrier door opener further includes an outer surface forming a groove and a load port seal seated in the groove. The load port seal is configured to seal against a first portion of a planar surface of a panel of the load port around a panel opening formed by the panel. A second portion of the planar surface of the panel is configured to seal to a factory interface.

公开(公告)号：US10283379B2

公开(公告)日：2019-05-07

申请号：US15001716

申请日：2016-01-20

Applicant: Applied Materials, Inc.

Inventor： Jason M. Schaller ,  Robert Brent Vopat ,  Paul E. Pergande ,  Benjamin B. Riordon ,  David T. Blahnik ,  William T. Weaver

IPC: H01L21/00 ,  H01L21/67 ,  H01L21/673 ,  H01L21/687

Abstract: Apparatus and methods for heating and cooling a plurality of substrate wafers are provided. LED lamps are positioned against the back sides of a plurality of cold plates. In some embodiments, wafers are supported on a wafer lift which can move all wafers together. In some embodiments, wafers are supported on independent lift pins which can move individual wafers for heating and cooling. Some embodiments of the disclosure provide for decreased time between wafer switching in a processing chamber.

公开(公告)号：US12279359B2

公开(公告)日：2025-04-15

申请号：US18431579

申请日：2024-02-02

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik ,  Charles T. Carlson ,  Robert B. Vopat ,  Frank Sinclair ,  Paul J. Murphy ,  Krag R. Senior

IPC: H05H7/22

Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.

公开(公告)号：US11812539B2

公开(公告)日：2023-11-07

申请号：US17506185

申请日：2021-10-20

Applicant: Applied Materials, Inc.

Inventor： Costel Biloiu ,  David T. Blahnik ,  Wai-Ming Tam ,  Charles T. Carlson ,  Frank Sinclair

IPC: H05H7/02 ,  H05H7/12 ,  H05H9/00

CPC classification number: H05H7/02 ,  H05H7/12 ,  H05H9/00 ,  H05H2007/025

Abstract: An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.

公开(公告)号：US20210057249A1

公开(公告)日：2021-02-25

申请号：US17093391

申请日：2020-11-09

Applicant: Applied Materials, Inc.

Inventor： Luke W. Bonecutter ,  David T. Blahnik ,  Paul B. Reuter

IPC: H01L21/673 ,  H01L21/677

Abstract: A load port system includes an isolation compartment coupled to an equipment front end module (EFEM). Reactive gas is to be removed from the isolation compartment. The load port system further includes an elevator disposed in the isolation compartment. The elevator is coupled to an elevator arm that extends from the isolation compartment into the EFEM through an opening to raise and lower a carrier opener within the EFEM.

公开(公告)号：US10741432B2

公开(公告)日：2020-08-11

申请号：US15426037

申请日：2017-02-06

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673

Abstract: Embodiments provide systems, apparatus, and methods for an improved load port operable to purge air trapped between the substrate carrier door and the carrier door opener. Embodiments include a docking tray adapted to receive a substrate carrier including a carrier door; a door opener adjacent the docking tray and adapted to couple to the carrier door and to open the carrier door, wherein the door opener includes a purge gas inlet port; at least one exhaust outlet port, and a ridge wall defining a perimeter channel in cooperation with a docked substrate carrier, wherein the ridge wall includes openings proximate the ports and wherein the door opener further includes a diverter structure disposed to direct purge gas from the inlet port to at least one of the openings in the ridge wall. Numerous additional aspects are disclosed.