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    Polishing jig assembly for a new or refurbished electrostatic chuck
    11.
    发明授权
    Polishing jig assembly for a new or refurbished electrostatic chuck 有权

    公开(公告)号：US11648639B2

    公开(公告)日：2023-05-16

    申请号：US17457423

    申请日：2021-12-02

    Applicant: Applied Materials, Inc.

    Inventor： William Ming-ye Lu ,  Wendell Glenn Boyd, Jr. ,  Stacy Meyer

    IPC: B24B37/04 ,  B24B37/32 ,  H01L21/683

    CPC classification number: B24B37/044 ,  B24B37/32 ,  H01L21/6831

    Abstract: Embodiments of the present invention provide a polishing ring assembly suitable for polishing an electrostatic chuck and method of using the same. In one embodiment, the polishing ring assembly has a retaining ring assembly and an electrostatic chuck fixture. The retaining ring assembly includes an inner diameter and a top surface, a plurality of outer drive rings wherein the plurality of outer drive rings are placed on the top surface of the ceramic retaining ring. The electrostatic chuck fixture includes an electrostatic chuck drive plate adjacent to the inner diameter of in the ceramic retaining ring. The electrostatic chuck drive plate has a lock to secure retaining ring assembly with the electrostatic chuck fixture without transferring the weight from one assembly over to the other through the locking mechanism.

    Using A Carrier Head With Shims
    14.
    发明申请
    Using A Carrier Head With Shims 审中-公开
    使用带垫片的载体头

    公开(公告)号：US20160136780A1

    公开(公告)日：2016-05-19

    申请号：US15006622

    申请日：2016-01-26

    Applicant: Applied Materials, Inc.

    Inventor： Stacy Meyer ,  Young J. Paik ,  Christopher R. Mahon

    IPC: B24B37/32

    CPC classification number: B24B37/32 ,  Y10T29/49826

    Abstract: A carrier head includes a base, a substrate mounting surface, a retaining ring secured to the base, and a plurality of stacked shims located between the base and the retaining ring. The retaining ring has a bottom surface for contacting a polishing pad during polishing.

    Abstract translation: 承载头包括基座，基板安装表面，固定到基座的保持环以及位于基座和保持环之间的多个堆叠的垫片。 保持环具有用于在抛光期间接触抛光垫的底表面。

    Two-part retaining ring with interlock features
    16.
    发明授权
    Two-part retaining ring with interlock features 有权
    两部分保持环具有联锁功能

    公开(公告)号：US09168631B2

    公开(公告)日：2015-10-27

    申请号：US13907658

    申请日：2013-05-31

    Applicant: Applied Materials, Inc.

    Inventor： Irfanulla Khuddus Rahmathullah ,  Bopanna Ichettira Vansantha ,  Padma Gopalakrishnan ,  Aswathnarayanaiah Ravi ,  Abraham Palaty ,  Young J. Paik ,  Stacy Meyer ,  James Klingler ,  Ashish Bhatnagar

    IPC: B24B37/32

    CPC classification number: B24B37/32

    Abstract: A retaining ring includes an annular lower portion and an annular upper portion. The annular lower portion has a main body with a bottom surface for contacting a polishing pad during polishing, an inner rim projecting upward from the main body, an outer rim projecting upward from the main body and separated from the inner rim by a gap, and a plurality of azimuthally separated interlock features positioned between the inner rim and the outer rim, each interlock feature projecting upwardly from the main body. The annular upper portion has a top surface and a bottom surface and a plurality of azimuthally separated recesses in the bottom surface, the recesses defining thin portions of the upper portion, the plurality of interlock features fitting into the plurality of recesses. The lower portion is a plastic and the upper portion is a material that is more rigid than the plastic.

    Abstract translation: 保持环包括环形下部和环形上部。 环形下部具有主体，其具有用于在抛光期间接触抛光垫的底面，从主体向上突出的内边缘，从主体向上突出并与内边缘分开的外缘间隙， 位于内缘和外缘之间的多个方位分离的互锁特征，每个互锁特征从主体向上突出。 环形上部具有顶表面和底表面以及在底表面中的多个方位分离的凹槽，所述凹部限定上部的薄部分，多个互锁特征装配到多个凹部中。 下部是塑料，上部是比塑料更硬的材料。

    REINFORCEMENT RING FOR CARRIER HEAD
    17.
    发明申请
    REINFORCEMENT RING FOR CARRIER HEAD 有权
    运输车头加固环

    公开(公告)号：US20140273776A1

    公开(公告)日：2014-09-18

    申请号：US14163914

    申请日：2014-01-24

    Applicant: Applied Materials, Inc.

    Inventor： Jamie Stuart Leighton ,  Stacy Meyer ,  Young J. Paik

    IPC: B24B41/00

    CPC classification number: B24B37/30 ,  B24B41/061

    Abstract: A reinforcement ring is for placement in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane. The reinforcement ring includes a substantially vertical cylindrical portion, a first flange projecting inwardly from the bottom of the cylindrical portion, and a second flange projecting outwardly from a bottom of the cylindrical portion. The second flange projects downwardly at a non-zero angle from vertical.

    Abstract translation: 加强环用于放置在承载头中以邻接柔性膜的周边部分的内表面。 加强环包括基本上垂直的圆柱形部分，从圆柱形部分的底部向内突出的第一凸缘和从圆柱形部分的底部向外突出的第二凸缘。 第二凸缘与垂直方向成非零角度向下突出。

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