公开(公告)号：US11313902B2

公开(公告)日：2022-04-26

申请号：US16847111

申请日：2020-04-13

Applicant: CELADON SYSTEMS, INC.

Inventor： John L. Dunklee ,  William A. Funk ,  Bryan J. Root

IPC: G01R31/00 ,  G01R31/28 ,  B23Q1/00

Abstract: The systems, apparatuses, and methods herein can provide a multi-site positioning mechanism suitable for long-term testing of a device(s) under test (DUT) (e.g. semiconductor wafers) across a range of temperatures with or without a controlled environment. The systems, apparatuses, and methods herein include mounting components, mechanisms, and structures that can provide excellent mechanical stability, permit relatively close working distance optics with high resolution, enable fine positioning at elevated temperature in a controlled environment with minimal thermal perturbation. The systems, apparatuses, and methods herein can be provided with modularity, for example as modular with rails and test sites that can be easily added or removed, and that can permit access to probe modules in a densely packed array.

公开(公告)号：US11275106B2

公开(公告)日：2022-03-15

申请号：US16594443

申请日：2019-10-07

Applicant: CELADON SYSTEMS, INC.

Inventor： Adam J. Schultz ,  William A. Funk ,  Bryan J. Root

IPC: G01R31/00 ,  G01R31/26 ,  G01R31/28 ,  G01R1/04 ,  G01R1/067 ,  G01R1/073 ,  G01R1/44

Abstract: A test assembly for testing a device under test includes a probe card assembly and a cap secured to the probe card assembly. The probe card assembly includes a probe tile having a plurality of openings. The probe tile includes a plurality of probe wires including a probe needle portion and a probe tip portion. A seal is disposed on a surface of the probe tile and forms an outer perimeter of a pressurized area. The probe tile includes an insulation layer formed within the pressurized area that is configured to separate the probe needle portion from the device under test. The insulation layer includes an aperture through which the probe tip portion extends to contact the device under test. The cap includes a fluid inlet and a fluid return outlet that are in fluid communication with the plurality of openings of the probe tile.

公开(公告)号：US10976347B2

公开(公告)日：2021-04-13

申请号：US16047091

申请日：2018-07-27

Applicant: CELADON SYSTEMS, INC.

Inventor： William A. Funk ,  Bryan J. Root

IPC: G01R1/07 ,  G01R33/02 ,  G01R31/28 ,  G01R1/073 ,  G01R33/00

Abstract: A magnet extension, magnetic test assembly, and probe card assembly includes a magnet having a first end and a second end, the first end of the magnet being geometrically configured to provide a selected magnetic field. A resilient member 5 is disposed around the magnet between the first end and the second end. A retaining member is disposed between the first end and the second end. The retaining member surrounds at least a portion of the resilient member.

公开(公告)号：US10295565B2

公开(公告)日：2019-05-21

申请号：US15512249

申请日：2015-09-18

Applicant: CELADON SYSTEMS, INC.

Inventor： John L. Dunklee ,  William A. Funk

IPC: G01R1/073 ,  G01R1/04 ,  G01R1/067 ,  G01R31/28

Abstract: A probe card assembly is disclosed. The probe card assembly includes a probe card plate, a probe core, and an expansion gap defined in the probe card plate. The probe core includes a bonding portion for fixing the probe core to the probe plate. The expansion gap surrounds the probe core. Another probe card assembly is disclosed. The another probe card assembly includes a probe card plate, a tube, and a probe core. The tube is configured to be inserted into an opening of the probe card plate and configured to be securely fixed to the probe card plate. The probe core includes a bonding portion for fixing the probe core to the tube.

公开(公告)号：US10261124B2

公开(公告)日：2019-04-16

申请号：US16066990

申请日：2016-12-28

Applicant: CELADON SYSTEMS, INC.

Inventor： John L. Dunklee ,  William A. Funk ,  Bryan J. Root

IPC: G01R31/00 ,  G01R31/28

Abstract: The systems, apparatuses, and methods herein can provide a multi-site positioning mechanism suitable for long-term testing of a device(s) under test (DUT) (e.g. semiconductor wafers) across a range of temperatures with or without a controlled environment. The systems, apparatuses, and methods herein include mounting components, mechanisms, and structures that can provide excellent mechanical stability, permit relatively close working distance optics with high resolution, enable fine positioning at elevated temperature in a controlled environment with minimal thermal perturbation. The systems, apparatuses, and methods herein can be provided with modularity, for example as modular with rails and test sites that can be easily added or removed, and that can permit access to probe modules in a densely packed array.

公开(公告)号：US09726694B2

公开(公告)日：2017-08-08

申请号：US14672830

申请日：2015-03-30

Applicant: CELADON SYSTEMS, INC.

Inventor： William A. Funk ,  John L. Dunklee ,  Bryan J. Root

IPC: G01R31/20 ,  G01R1/073 ,  G01R31/28 ,  G01R1/04 ,  G01R31/26

CPC classification number: G01R1/07364 ,  G01R1/0466 ,  G01R1/073 ,  G01R31/26 ,  G01R31/2889

Abstract: A probe apparatus has probe wires with a contact pattern on one side. The contact pattern is for contacting a respective contact pattern on another test equipment or component, such as a circuit board. The probe wires have tips that probe a device desired for testing. Signals are transmitted through the probe wires from the probe card, for example, through a circuit board to other diagnostic equipment. The contact of the probe card with the circuit board allows signals to be transferred through the probe wires to the other diagnostic equipment. On another side of the probe card is a connector structure. The connector structure includes a retainer that can allow the probe card to be replaced from a test system, such as allowing it to be connected and disconnected from a holder.

公开(公告)号：US09678149B2

公开(公告)日：2017-06-13

申请号：US14166296

申请日：2014-01-28

Applicant: CELADON SYSTEMS, INC.

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/28 ,  G01R1/073 ,  G01R3/00 ,  H05K1/11 ,  H05K3/32

CPC classification number: G01R31/2889 ,  G01R1/07378 ,  G01R3/00 ,  G01R31/2886 ,  H05K1/117 ,  H05K3/325 ,  H05K2201/09027 ,  H05K2201/09063 ,  H05K2201/09227 ,  H05K2203/167 ,  Y10T29/49126 ,  Y10T29/49128

Abstract: A probe core includes a frame, a wire guide connected to the frame, a probe tile, and a plurality of probe wires supported by the wire guide and probe tile. Each probe wire includes an end configured to probe a device, such as a semiconductor wafer. Each probe wire includes a signal transmitting portion and a guard portion. The probe core further includes a lock mechanism supported by the frame. The lock mechanism is configured to allow the probe core to be connected and disconnected to another test equipment or component, such as a circuit board. As one example, the probe core is configured to connect and disconnect from the test equipment or component in a rotatable lock and unlock operation or twist lock/unlock operation, where the frame is rotated relative to remainder of the core to lock/unlock the probe core.

公开(公告)号：USD722031S1

公开(公告)日：2015-02-03

申请号：US29478155

申请日：2013-12-31

Applicant: Celadon Systems, Inc.

Designer： John L. Dunklee ,  William A. Funk ,  Matthew Page ,  Dennis Flanders ,  Bryan J. Root