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    Test apparatus having a probe core with a latch mechanism
    3.
    发明授权
    Test apparatus having a probe core with a latch mechanism 有权

    公开(公告)号：US10254309B2

    公开(公告)日：2019-04-09

    申请号：US15108237

    申请日：2014-12-31

    Applicant: CELADON SYSTEMS, INC.

    Inventor： John L. Dunklee ,  William A. Funk ,  Bryan J. Root

    IPC: G01R31/28 ,  G01R1/067

    Abstract: A latch assembly that can lock and unlock a probe core with respect to a circuit board is provided. The latch assembly can engage with the probe core to align the probe core with respect to a circuit board, and press down the probe core against the circuit board by rotating to lock the probe core with the circuit board. An installation tool is provided to grip or release the probe core to/from a latch assembly or a probe core carrier. The installation tool can align with the probe core and/or the latch assembly to lock and unlock the probe core with respect to a circuit board.

    APPARATUS AND METHOD FOR TERMINATING PROBE APPARATUS OF SEMICONDUCTOR WAFER
    5.
    发明申请
    APPARATUS AND METHOD FOR TERMINATING PROBE APPARATUS OF SEMICONDUCTOR WAFER 审中-公开
    用于终止半导体波导探针装置的装置和方法

    公开(公告)号：US20160187379A1

    公开(公告)日：2016-06-30

    申请号：US15062423

    申请日：2016-03-07

    Applicant: Celadon Systems, Inc.

    Inventor： Bryan J. Root ,  William A. Funk

    IPC: G01R1/04 ,  G01R1/067 ,  G01R31/26

    CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

    Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

    Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

    APPARATUS AND METHOD FOR TERMINATING PROBE APPARATUS OF SEMICONDUCTOR WAFER
    6.
    发明申请
    APPARATUS AND METHOD FOR TERMINATING PROBE APPARATUS OF SEMICONDUCTOR WAFER 审中-公开
    用于终止半导体波导探针装置的装置和方法

    公开(公告)号：US20150084662A1

    公开(公告)日：2015-03-26

    申请号：US14504694

    申请日：2014-10-02

    Applicant: Celadon Systems, Inc.

    Inventor： Bryan J. Root ,  William A. Funk

    IPC: G01R1/04 ,  G01R31/26 ,  G01R1/067

    CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

    Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester site by site at a proximal end of the probe and a distal end of the signal cable. in one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

    Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端端接一个探测器，用于使用信号电缆从测试仪现场探测半导体器件。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

    TEST APPARATUS HAVING A PROBE CORE WITH A TWIST LOCK MECHANISM
    7.
    发明申请
    TEST APPARATUS HAVING A PROBE CORE WITH A TWIST LOCK MECHANISM 审中-公开
    具有双向锁定机构的探头芯的测试装置

    公开(公告)号：US20140139248A1

    公开(公告)日：2014-05-22

    申请号：US14166296

    申请日：2014-01-28

    Applicant: CELADON SYSTEMS, INC.

    Inventor： Bryan J. Root ,  William A. Funk

    IPC: G01R31/28 ,  G01R3/00 ,  G01R1/073

    CPC classification number: G01R31/2889 ,  G01R1/07378 ,  G01R3/00 ,  G01R31/2886 ,  H05K1/117 ,  H05K3/325 ,  H05K2201/09027 ,  H05K2201/09063 ,  H05K2201/09227 ,  H05K2203/167 ,  Y10T29/49126 ,  Y10T29/49128

    Abstract: A probe core includes a frame, a wire guide connected to the frame, a probe tile, and a plurality of probe wires supported by the wire guide and probe tile. Each probe wire includes an end configured to probe a device, such as a semiconductor wafer. Each probe wire includes a signal transmitting portion and a guard portion. The probe core further includes a lock mechanism supported by the frame. The lock mechanism is configured to allow the probe core to be connected and disconnected to another test equipment or component, such as a circuit board. As one example, the probe core is configured to connect and disconnect from the test equipment or component in a rotatable lock and unlock operation or twist lock/unlock operation, where the frame is rotated relative to remainder of the core to lock/unlock the probe core.

    Abstract translation: 探针芯包括框架，连接到框架的导线引导件，探针瓦片和由导线器和探针瓦片支撑的多个探针线。 每个探针线包括构造成探测诸如半导体晶片的器件的端部。 每个探针线包括信号传输部分和防护部分。 探针芯还包括由框架支撑的锁定机构。 锁定机构被配置为允许探针芯与诸如电路板的另一个测试设备或部件连接和断开。 作为一个示例，探针芯被配置为在可旋转的锁定和解锁操作或扭转锁定/解锁操作中连接和断开测试设备或组件，其中框架相对于芯的其余部分旋转以锁定/解锁探针 核心。

    Test systems with a probe apparatus and index mechanism
    8.
    发明授权
    Test systems with a probe apparatus and index mechanism 有权

    公开(公告)号：US10145863B2

    公开(公告)日：2018-12-04

    申请号：US15670722

    申请日：2017-08-07

    Applicant: CELADON SYSTEMS, INC.

    Inventor： William A. Funk ,  John L. Dunklee ,  Bryan J. Root

    IPC: G01R31/20 ,  G01R1/073 ,  G01R31/28 ,  G01R1/04 ,  G01R31/26

    Abstract: A probe apparatus has probe wires with a contact pattern on one side. The contact pattern is for contacting a respective contact pattern on another test equipment or component, such as a circuit board. The probe wires have tips that probe a device desired for testing. Signals are transmitted through the probe wires from the probe card, for example, through a circuit board to other diagnostic equipment. The contact of the probe card with the circuit board allows signals to be transferred through the probe wires to the other diagnostic equipment. On another side of the probe card is a connector structure. The connector structure includes a retainer that can allow the probe card to be replaced from a test system, such as allowing it to be connected and disconnected from a holder.

    Modular rail systems, rail systems, mechanisms, and equipment for devices under test
    9.
    发明授权
    Modular rail systems, rail systems, mechanisms, and equipment for devices under test 有权

    公开(公告)号：US11313902B2

    公开(公告)日：2022-04-26

    申请号：US16847111

    申请日：2020-04-13

    Applicant: CELADON SYSTEMS, INC.

    Inventor： John L. Dunklee ,  William A. Funk ,  Bryan J. Root

    IPC: G01R31/00 ,  G01R31/28 ,  B23Q1/00

    Abstract: The systems, apparatuses, and methods herein can provide a multi-site positioning mechanism suitable for long-term testing of a device(s) under test (DUT) (e.g. semiconductor wafers) across a range of temperatures with or without a controlled environment. The systems, apparatuses, and methods herein include mounting components, mechanisms, and structures that can provide excellent mechanical stability, permit relatively close working distance optics with high resolution, enable fine positioning at elevated temperature in a controlled environment with minimal thermal perturbation. The systems, apparatuses, and methods herein can be provided with modularity, for example as modular with rails and test sites that can be easily added or removed, and that can permit access to probe modules in a densely packed array.

    High voltage probe card system
    10.
    发明授权
    High voltage probe card system 有权

    公开(公告)号：US11275106B2

    公开(公告)日：2022-03-15

    申请号：US16594443

    申请日：2019-10-07

    Applicant: CELADON SYSTEMS, INC.

    Inventor： Adam J. Schultz ,  William A. Funk ,  Bryan J. Root

    IPC: G01R31/00 ,  G01R31/26 ,  G01R31/28 ,  G01R1/04 ,  G01R1/067 ,  G01R1/073 ,  G01R1/44

    Abstract: A test assembly for testing a device under test includes a probe card assembly and a cap secured to the probe card assembly. The probe card assembly includes a probe tile having a plurality of openings. The probe tile includes a plurality of probe wires including a probe needle portion and a probe tip portion. A seal is disposed on a surface of the probe tile and forms an outer perimeter of a pressurized area. The probe tile includes an insulation layer formed within the pressurized area that is configured to separate the probe needle portion from the device under test. The insulation layer includes an aperture through which the probe tip portion extends to contact the device under test. The cap includes a fluid inlet and a fluid return outlet that are in fluid communication with the plurality of openings of the probe tile.

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