公开(公告)号：US20140225064A1

公开(公告)日：2014-08-14

申请号：US14178133

申请日：2014-02-11

Applicant: California Institute of Technology

Inventor： Arezou Khoshakhlagh ,  David Z. Ting ,  Sarath D. Gunapala ,  Cory J. Hill

IPC: H01L31/0352 ,  H01L31/18 ,  H01L31/0304

CPC classification number: H01L31/035236 ,  H01L21/0237 ,  H01L21/02395 ,  H01L21/02463 ,  H01L21/02466 ,  H01L21/02507 ,  H01L21/02546 ,  H01L21/02549 ,  H01L31/03046 ,  H01L31/101 ,  H01L31/1844 ,  H01L31/1852 ,  Y02E10/544

Abstract: Systems and methods of implementing barrier infrared detectors on lattice mismatched substrates are provided. The barrier infrared detector systems combine an active detector structure (e.g., contact/barrier/absorber pairs) with a non-lattice matched substrate through a multi-layered transitional structure that forms a virtual substrate that can be strain balanced with the detector structure. The transitional metamorphic layer may include one or both of at least one graded metamorphic buffer layer or interfacial misfit array (IMF). A further interfacial layer may be interposed within the transitional structure, in some embodiments this interfacial layer includes at least one layer of AlSb.

Abstract translation: 提供了在晶格失配衬底上实施屏障红外探测器的系统和方法。 屏障红外探测器系统通过形成可与检测器结构应变平衡的虚拟衬底的多层过渡结构将活性检测器结构（例如，接触/阻挡/吸收体对）与非晶格匹配衬底组合。 过渡变质层可以包括至少一个梯度变质缓冲层或界面失配阵列（IMF）中的一个或两个。 在过渡结构中可以插入另外的界面层，在一些实施例中，该界面层包括至少一层AlSb。