公开(公告)号：US09154057B2

公开(公告)日：2015-10-06

申请号：US13702059

申请日：2011-06-02

Applicant: Takahiro Akiyama ,  Chienliu Chang

Inventor： Takahiro Akiyama ,  Chienliu Chang

IPC: H02N11/00 ,  B06B1/06 ,  G01N29/00 ,  H02N1/00

CPC classification number: H02N1/08 ,  B06B1/067 ,  G01N29/00 ,  G01N29/2418 ,  G01N2291/101 ,  H02N1/00 ,  H02N11/002

Abstract: To suggest an electromechanical transducer device with a high S/N ratio, an electromechanical transducer device includes a first substrate; electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals; an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate; a first acoustic matching layer provided between the first substrate and the second substrate; an acoustic attenuating member arranged on a back surface of the second substrate; and a second acoustic matching layer provided between the second substrate and the acoustic attenuating member.

Abstract translation: 为了提出具有高S / N比的机电换能器件，机电换能器装置包括第一基片; 机电换能器元件二维排列在第一基板的前表面上并被配置为提供声波和电信号之间的转换; 电接线基板，其是与所述第一基板的背面电连接的第二基板; 设置在所述第一基板和所述第二基板之间的第一声匹配层; 设置在所述第二基板的背面上的声衰减部件; 以及设置在第二基板和声衰减部件之间的第二声匹配层。

公开(公告)号：US20130081471A1

公开(公告)日：2013-04-04

申请号：US13702059

申请日：2011-06-02

Applicant: Takahiro Akiyama ,  Chienliu Chang

Inventor： Takahiro Akiyama ,  Chienliu Chang

IPC: H02N11/00 ,  G01N29/00 ,  H02N1/00

CPC classification number: H02N1/08 ,  B06B1/067 ,  G01N29/00 ,  G01N29/2418 ,  G01N2291/101 ,  H02N1/00 ,  H02N11/002

Abstract: To suggest an electromechanical transducer device with a high S/N ratio, an electromechanical transducer device includes a first substrate; electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals; an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate; a first acoustic matching layer provided between the first substrate and the second substrate; an acoustic attenuating member arranged on a back surface of the second substrate; and a second acoustic matching layer provided between the second substrate and the acoustic attenuating member.

公开(公告)号：US08099854B2

公开(公告)日：2012-01-24

申请号：US12488588

申请日：2009-06-22

Applicant: Ayako Kato ,  Chienliu Chang

Inventor： Ayako Kato ,  Chienliu Chang

IPC: G01R3/00

CPC classification number: H04R31/00 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908

Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.

Abstract translation: 沟槽形成在处理构件上，待固定在元件上的表面上，沟槽构成固定在元件上的外部沟槽的一部分。 在基板和处理构件的定影处理中，处理构件被固定成使得振动膜支撑部分的边缘方向和处理构件的槽的边缘方向相交。 因此，减少在处理或处理衬底期间膜会破裂的可能性，并且处理构件可以快速地从衬底移除。

公开(公告)号：US07960289B2

公开(公告)日：2011-06-14

申请号：US12514209

申请日：2007-11-20

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H01L21/302 ,  H01L21/461

CPC classification number: H01L29/7869 ,  H01L21/465 ,  H01L29/66969

Abstract: An etching method is provided in which selective etching can be carried out for an amorphous oxide semiconductor film including at least one of gallium and zinc, and indium. In the etching method, the selective etching is performed using an alkaline etching solution. The alkaline etching solution contains especially ammonia in a specific concentration range.

Abstract translation: 提供了一种蚀刻方法，其中可以对包括镓和锌中的至少一种以及铟的非晶氧化物半导体膜进行选择性蚀刻。 在蚀刻方法中，使用碱性蚀刻溶液进行选择性蚀刻。 碱性蚀刻溶液特别含有特定浓度范围的氨。

公开(公告)号：US07959843B2

公开(公告)日：2011-06-14

申请号：US12486749

申请日：2009-06-18

Applicant: Yoshitaka Zaitsu ,  Chienliu Chang ,  Masao Majima ,  Hironobu Maeda

Inventor： Yoshitaka Zaitsu ,  Chienliu Chang ,  Masao Majima ,  Hironobu Maeda

IPC: B29C59/02

CPC classification number: B81C1/00634 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/019 ,  G02B26/0833 ,  Y10T29/49833 ,  Y10T29/49861 ,  Y10T29/49908

Abstract: In a method of fabricating a structure by plastically deforming a processing portion provided at a movable segment, a restraint segment configured to restrain movement of the movable segment is provided before an external force is applied to the processing portion. After processing of the processing portion is completed, the restraint segment is removed.

Abstract translation: 在通过使设置在可移动部分处的处理部分发生塑性变形来制造结构的方法中，在对加工部分施加外力之前，设置限制可动部分的移动的约束部分。 在处理部分的处理完成之后，约束段被去除。

公开(公告)号：US20110073968A1

公开(公告)日：2011-03-31

申请号：US12993536

申请日：2009-06-29

Applicant: Takahiro Ezaki ,  Chienliu Chang ,  Yasuhiro Soeda ,  Kenji Tamamori

Inventor： Takahiro Ezaki ,  Chienliu Chang ,  Yasuhiro Soeda ,  Kenji Tamamori

IPC: H01L29/84 ,  H01L23/48 ,  H01L21/28

CPC classification number: H01L23/5226 ,  B06B1/0292 ,  B81B2201/0257 ,  H01L21/76898 ,  H01L27/1203 ,  H01L29/84 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode being separated for each of the elements by grooves, an insulating connection substrate being bonded to the first electrode, and a wiring being made from each of the respective first electrodes separated for each of the elements through the connection substrate to the side opposite to the first electrodes.

Abstract translation: 元件阵列包括具有第一电极和第二电极的多个元件，其间具有间隙; 所述第一电极通过凹槽被分隔成每个所述元件，绝缘连接基板被接合到所述第一电极，并且布线由每个所述元件分别通过所述连接基板与所述第一电极相对的一侧制成 到第一电极。

公开(公告)号：US20100107758A1

公开(公告)日：2010-05-06

申请号：US12520878

申请日：2008-01-10

Applicant: Atsushi Kandori ,  Chienliu Chang

Inventor： Atsushi Kandori ,  Chienliu Chang

IPC: G01P3/44 ,  H05K1/11 ,  G01P15/00 ,  G01R19/00 ,  H02N1/00 ,  B05D5/12

CPC classification number: B81B3/0086

Abstract: A structural member having a plurality of conductive regions electrically insulated from each other, in which the plurality of conductive regions are electrically insulated from each other by continuous oxidized regions, and the oxidized regions are each formed of an oxide made of a material having a plurality of through holes or trenches formed therein.

Abstract translation: 一种结构构件，其具有多个导电区域，所述多个导电区域彼此电绝缘，其中所述多个导电区域通过连续氧化区域彼此电绝缘，并且所述氧化区域由氧化物形成，所述氧化物由具有多个 的通孔或沟槽。

公开(公告)号：US20090320274A1

公开(公告)日：2009-12-31

申请号：US12488590

申请日：2009-06-22

Applicant: Ayako Kato ,  Chienliu Chang

Inventor： Ayako Kato ,  Chienliu Chang

IPC: H02K15/00

CPC classification number: B81C1/0038 ,  B81C2201/0194 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/49009 ,  Y10T29/4908

Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.

Abstract translation: 沟槽形成在处理构件上，待固定在元件上的表面上，沟槽构成固定在元件上的外部通道的一部分。 处理构件被固定成使得振动膜的解理方向和处理构件的槽的边缘方向相交。 因此，减少在处理或处理衬底期间膜会破裂的可能性，并且处理构件可以快速地从衬底移除。

公开(公告)号：US08596121B2

公开(公告)日：2013-12-03

申请号：US12520878

申请日：2008-01-10

Applicant: Atsushi Kandori ,  Chienliu Chang

Inventor： Atsushi Kandori ,  Chienliu Chang

IPC: G01C19/00

CPC classification number: B81B3/0086

Abstract: A structural member having a plurality of conductive regions electrically insulated from each other, in which the plurality of conductive regions are electrically insulated from each other by continuous oxidized regions, and the oxidized regions are each formed of an oxide made of a material having a plurality of through holes or trenches formed therein.

Abstract translation: 一种结构构件，其具有多个导电区域，所述多个导电区域彼此电绝缘，其中所述多个导电区域通过连续氧化区域彼此电绝缘，并且所述氧化区域由氧化物形成，所述氧化物由具有多个 的通孔或沟槽。

公开(公告)号：US08288192B2

公开(公告)日：2012-10-16

申请号：US12918660

申请日：2009-04-28

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H01L21/00

CPC classification number: B06B1/0292 ,  B81B2201/038 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/04 ,  B81C1/00476 ,  B81C2201/0114

Abstract: In a method of manufacturing a capacitive electromechanical transducer, a first electrode (8) is formed on a substrate (4), an insulating layer (9) which has an opening (6) leading to the first electrode is formed on the first electrode (8), and a sacrificial layer is formed on the insulating layer. A membrane (3) having a second electrode (1) is formed on the sacrificial layer, and an aperture is provided as an etchant inlet in the membrane. The sacrificial layer is etched to form a cavity (10), and then the aperture serving as an etchant inlet is sealed. The etching is executed by electrolytic etching in which a current is caused to flow between the first electrode (8) and an externally placed counter electrode through the opening (6) and the aperture of the membrane.

Abstract translation: 在制造电容式机电换能器的方法中，在基板（4）上形成第一电极（8），在第一电极上形成具有通向第一电极的开口（6）的绝缘层（9） 8），并且在绝缘层上形成牺牲层。 在牺牲层上形成具有第二电极（1）的膜（3），并且在膜中设置有作为蚀刻剂入口的孔。 蚀刻牺牲层以形成空腔（10），然后密封用作蚀刻剂入口的孔。 蚀刻通过电解蚀刻进行，其中使电流通过开口（6）和膜的孔径在第一电极（8）和外部放置的对电极之间流动。