公开(公告)号：US20220009153A1

公开(公告)日：2022-01-13

申请号：US17484582

申请日：2021-09-24

Applicant: FUJIFILM Corporation

Inventor： Yuichiro GOTO ,  Naoya SHIMOJU ,  Akinori SHIBUYA ,  Akihiro HAKAMATA

IPC: B29C59/02 ,  C08F2/50 ,  C08F220/10 ,  G03F7/20 ,  G03F7/004

Abstract: Provided are: a composition for forming a pattern, which contains a polymerizable compound, a photopolymerization initiator, and a sensitizer containing two or more of at least one kind of atom selected from the group consisting of a nitrogen atom and a sulfur atom, in which a length of a specific atom chain from one atom to another atom among the two or more atoms is 2 or 3 in terms of the number of atoms; a kit to which the composition for forming a pattern is applied; a cured film; a laminate; a pattern producing method; and a method for manufacturing a semiconductor element.

公开(公告)号：US20210018833A1

公开(公告)日：2021-01-21

申请号：US17030496

申请日：2020-09-24

Applicant: FUJIFILM Corporation

Inventor： Yuichiro GOTO ,  Akihiro HAKAMATA ,  Naoya SHIMOJU

IPC: G03F7/00 ,  G03F7/004 ,  G03F7/029 ,  C08F2/50 ,  C08F22/10

Abstract: A curable composition for imprinting according to an embodiment of the present invention includes a monofunctional polymerizable compound having the following structure, a photopolymerization initiator, and a release agent represented by the following Formula (I) or Formula (II).
The monofunctional polymerizable compound has the following structure: a linear or branched alkyl group, or an alicyclic ring, an aromatic ring, or an aromatic heterocycle that is substituted with a linear or branched alkyl group. The release agent is represented by the following Formula (I) or Formula (II). A1-(B1)x1-(D1)y1-(E1)z1-F1  Formula (I), A2-(B2)x2-(D2)y2-(E2)z2-F2  Formula (II), A1 and A2 represent a linear aliphatic hydrocarbon group having 4 to 11 carbon atoms, D1 and D2 represent an alkylene oxide structure, F1 represents a polar functional group, and F2 represents a hydrogen atom, or a linear, branched, or cyclic aliphatic hydrocarbon group having 4 to 11 carbon atoms. Further, the present invention relates to a release agent, a cured product, a pattern forming method, and a lithography method that relate to the curable composition for imprinting.

公开(公告)号：US20180210339A1

公开(公告)日：2018-07-26

申请号：US15925779

申请日：2018-03-20

Applicant: FUJIFILM Corporation

Inventor： Akira Takada ,  Shuji HIRANO ,  Naoya SHIMOJU ,  Toshiya TAKAHASHI ,  Hidehiro MOCHIZUKI

IPC: G03F7/075 ,  G03F7/039 ,  G03F7/038 ,  G03F7/16 ,  G03F7/20 ,  G03F7/38 ,  G03F7/32 ,  G03F7/40

CPC classification number: G03F7/0758 ,  G03F7/038 ,  G03F7/039 ,  G03F7/0397 ,  G03F7/162 ,  G03F7/168 ,  G03F7/2004 ,  G03F7/2037 ,  G03F7/322 ,  G03F7/325 ,  G03F7/38 ,  G03F7/40

Abstract: Provided are a resist composition capable of forming a pattern having excellent pattern collapse performance, particularly in the formation of an ultrafine pattern (for example, a pattern with a line width 50 nm or less) using the resist composition containing a resin (A) having a repeating unit (a) having an aromatic ring group and a repeating unit (b) having a silicon atom in a side chain, as well as a resist film, a pattern forming method, and a method for manufacturing an electronic device, each using the resist composition.

公开(公告)号：US20160291211A1

公开(公告)日：2016-10-06

申请号：US15082730

申请日：2016-03-28

Applicant: FUJIFILM Corporation

Inventor： Aiko YOSHIDA ,  Naoya SHIMOJU ,  Naoki SANO ,  Nobutaka FUKAGAWA

IPC: G02B1/14 ,  G02B5/30

CPC classification number: G02B1/14 ,  G02B5/3033

Abstract: A polarizing plate protective film contains a compound represented by general formula (II-1) or (II-2). In general formulas (II-1) and (II-2), X represents a 6-membered cyclic acetal group; n represents an integer of 2 or more; and a plurality of Xs may be identical or different. In general formula (II-1), Z2 represents a linking group having a valence of n; R1 represents a substituent, when there are a plurality of R1s, at least two of the plurality of R1s may be taken together to form a ring, R1s in different benzene rings may be taken together to form a single bond; m represents an integer of 0-4; and the plurality of R1s may be identical or different. In general formula (II-2), Z3 represents an alkylene group having a valence of n, provided that Z3 does not have a ring structure.

公开(公告)号：US20160122516A1

公开(公告)日：2016-05-05

申请号：US14991551

申请日：2016-01-08

Applicant: FUJIFILM Corporation

Inventor： Masaki NORO ,  Yutaka NOZOE ,  Hiroshi INADA ,  Naoya SHIMOJU ,  Aiko YOSHIDA ,  Yu NAITO ,  Yasukazu KUWAYAMA

IPC: C08L1/12 ,  G02B5/30 ,  G02F1/1335 ,  G02B1/14

CPC classification number: C08L1/12 ,  C08K5/3462 ,  C08L1/10 ,  G02B1/14 ,  G02B5/3033 ,  G02B5/305 ,  G02F1/133528 ,  Y10T428/105

Abstract: The inventions are an optical film containing cellulose acylate and a compound having a structure denoted by General Formula (A) described below, and a polarizing plate and a liquid crystal display device employing the optical film. L represents n-valent connecting group, n represents an integer of greater than or equal to 2, and A represents a heterocyclic group denoted by General Formula (I). R1, R3, and R5 represent a hydrogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, an aryl group, or a heteroaryl group. Here, any one of R1, R3, and R5 is bonded to L.

Abstract translation: 本发明是含有纤维素酰化物和具有下述通式（A）表示的结构的化合物的光学膜，以及使用该光学膜的偏光板和液晶显示装置。 L表示n价连接基，n表示大于或等于2的整数，A表示通式（I）表示的杂环基。 R 1，R 3和R 5表示氢原子，烷基，环烷基，烯基，芳基或杂芳基。 这里，R 1，R 3和R 5中的任一个与L结合。

公开(公告)号：US20220204814A1

公开(公告)日：2022-06-30

申请号：US17696885

申请日：2022-03-17

Applicant: FUJIFILM Corporation

Inventor： Naoya SHIMOJU ,  Akihiro HAKAMATA

IPC: C09J7/30 ,  C09J7/20 ,  C09J125/18 ,  C09J125/02 ,  G03F7/00 ,  H01L21/027

Abstract: Provided are a composition for forming an adhesive film for imprinting, including a resin having a specific aromatic ring and a polymerizable functional group in a side chain, in which the specific aromatic ring is an unsubstituted aromatic ring, or an aromatic ring having one or more substituents, in which a formula weight of each of the one or more substituents is 1000 or less, and a proportion of a polymerizable functional group including a heterocyclic ring in the polymerizable functional group is less than 3 mol %; an adhesive film to which the composition for forming an adhesive film is applied; a laminate; a method for manufacturing a laminate; a pattern producing method; and a method for manufacturing a semiconductor element.

公开(公告)号：US20220002450A1

公开(公告)日：2022-01-06

申请号：US17476481

申请日：2021-09-16

Applicant: FUJIFILM Corporation

Inventor： Yuichiro GOTO ,  Naoya SHIMOJU

IPC: C08F20/10 ,  H01L21/306 ,  G03F7/00 ,  H01L21/3213

Abstract: Provided are: a composition for forming a pattern for imprinting, which contains a polymerizable compound, a photopolymerization initiator, and an organic halogen compound containing at least one atom selected from the group consisting of a chlorine atom, a bromine atom, and an iodine atom, in which the organic halogen compound is a compound which is stable to light of a mercury lamp, and a content of the organic halogen compound is 0.001% to 1.0% by mass with respect to a total solid content in the composition for forming a pattern; a kit including the composition for forming a pattern; a pattern producing method; a pattern; and a method for manufacturing a semiconductor element.

公开(公告)号：US20210232049A1

公开(公告)日：2021-07-29

申请号：US17210519

申请日：2021-03-24

Applicant: FUJIFILM Corporation

Inventor： Yuichiro GOTO ,  Naoya SHIMOJU

IPC: G03F7/038 ,  B29C59/02 ,  C08F2/48 ,  H01L21/033

Abstract: Provided are a curable composition for imprinting including a polymerizable compound, a photopolymerization initiator, and a particulate metal which has a particle diameter of 1 nm or larger, as measured by a single particle ICP-MASS method, and includes at least one kind of iron, copper, titanium, or lead, in which a content of the particulate metal is 100 ppt by mass to 30 ppb by mass with respect to a solid content of the composition; a method for producing the curable composition for imprinting; a cured product using the curable composition for imprinting; a pattern producing method; and a method for manufacturing a semiconductor element.

公开(公告)号：US20170226317A1

公开(公告)日：2017-08-10

申请号：US15497824

申请日：2017-04-26

Applicant: FUJIFILM Corporation

Inventor： Nobutaka FUKAGAWA ,  Naoki SANO ,  Mayumi NOJIRI ,  Aiko YOSHIDA ,  Naoya SHIMOJU

IPC: C08K5/12 ,  C07C69/76 ,  C08K5/101 ,  C07D319/06 ,  C08K5/1575 ,  C07C47/575 ,  C08K5/07 ,  C07D317/32 ,  C08K5/1565 ,  C07F5/02 ,  C08K5/55 ,  C07C47/52 ,  G02B1/14 ,  G02B5/30 ,  G02F1/1335 ,  C08L1/10

CPC classification number: C08K5/12 ,  C07C47/52 ,  C07C47/575 ,  C07C69/76 ,  C07D317/32 ,  C07D319/06 ,  C07F5/025 ,  C08K5/06 ,  C08K5/07 ,  C08K5/101 ,  C08K5/1565 ,  C08K5/1575 ,  C08K5/55 ,  C08L1/10 ,  C08L1/12 ,  G02B1/14 ,  G02B5/3025 ,  G02F1/133528

Abstract: A polarizing plate protective film which prevents deterioration of polarization performance in a high temperature, high humidity environment, and a polarizing plate and display device using the film including a compound represented by the following General Formula (I). (X-Lnz  General Formula (I) X represents a formyl group, a boronic acid group, or a group represented by the following General Formula (I-B) or a group represented by the following General Formula (I-C), where L represents a single bond or divalent linking group, and n represents an integer equal to or greater than 2. When n is 2, Z represents a single bond or a divalent group, and when n≧3, Z represents an n-valent group. RA and RB represent an alkyl group, a cycloalkyl group, an aryl group, or an acyl group. RA and RB may be bonded to each other to form a ring. * represents a bond to be bonded to L.

公开(公告)号：US20160369115A1

公开(公告)日：2016-12-22

申请号：US15254649

申请日：2016-09-01

Applicant: FUJIFILM Corporation

Inventor： Naoya SHIMOJU ,  Aiko YOSHIDA ,  Mayumi NOJIRI

IPC: C09D7/12 ,  C07F7/18 ,  C07D231/52 ,  C07D215/32 ,  C07F5/02 ,  C07F5/04 ,  C09D101/12 ,  C09J101/12 ,  C09J11/06 ,  C09J129/04 ,  C09D145/00 ,  C09J145/00 ,  G02F1/1335 ,  G02B5/30 ,  C07D239/60

CPC classification number: C07F7/1804 ,  B32B7/022 ,  B32B7/12 ,  C07D215/32 ,  C07D231/52 ,  C07D239/60 ,  C07F5/025 ,  C07F5/04 ,  C08K5/3462 ,  C09D7/63 ,  C09D101/12 ,  C09D145/00 ,  C09J7/20 ,  C09J11/06 ,  C09J101/12 ,  C09J129/04 ,  C09J145/00 ,  C09J201/00 ,  C09J2203/318 ,  C09J2433/001 ,  G02B1/14 ,  G02B5/3025 ,  G02B5/3033 ,  G02F1/133528

Abstract: Provided are a polarizing plate composition, a polarizing plate protective film, a polarizer, a polarizing plate, and a liquid crystal display device, which contain a compound represented by the following Formula (I), and a compound. In Formula (I), each of R1 and R2 represents a substituent. X represents an electron-withdrawing group, and Y represents a substituent having a heteroatom or a carbon atom as an atom bonded to a carbon atom substituted with —OR1. Y and X may form a ring by being bonded to each other.

Abstract translation: 在式（I）中，R 1和R 2各自表示取代基。 X表示吸电子基团，Y表示具有与-OR 1取代的碳原子键合的原子的杂原子或碳原子的取代基。 Y和X可以通过彼此键合形成环。