公开(公告)号：US20210065959A1

公开(公告)日：2021-03-04

申请号：US16557476

申请日：2019-08-30

Applicant: Ferric Inc.

Inventor： Noah Sturcken ,  Denis Shishkov ,  Matthew Cavallaro ,  Michael Lekas ,  Ryan Davies

IPC: H01F27/24 ,  H01F10/06 ,  H01F10/08

Abstract: A method for manufacturing a vertically-laminated ferromagnetic core includes (a) depositing a conductive seed layer on or over a first side of a substrate; (b) depositing a masking layer on or over a second side of the substrate, the first and second sides on opposite sides of the substrate; (c) forming a pattern in the masking layer; (d) dry etching the substrate, based on the pattern in the masking layer, from the second side to the first side to expose portions of the conductive seed layer; and (e) depositing a ferromagnetic material onto the exposed portions of the conductive seed layer to form vertically-oriented ferromagnetic layers.