MAGNETIC CORE WITH VERTICAL LAMINATIONS HAVING HIGH ASPECT RATIO

    公开(公告)号:US20210065959A1

    公开(公告)日:2021-03-04

    申请号:US16557476

    申请日:2019-08-30

    Applicant: Ferric Inc.

    Abstract: A method for manufacturing a vertically-laminated ferromagnetic core includes (a) depositing a conductive seed layer on or over a first side of a substrate; (b) depositing a masking layer on or over a second side of the substrate, the first and second sides on opposite sides of the substrate; (c) forming a pattern in the masking layer; (d) dry etching the substrate, based on the pattern in the masking layer, from the second side to the first side to expose portions of the conductive seed layer; and (e) depositing a ferromagnetic material onto the exposed portions of the conductive seed layer to form vertically-oriented ferromagnetic layers.

    Integrated circuit with laminated magnetic core inductor and magnetic flux closure layer

    公开(公告)号:US11058001B2

    公开(公告)日:2021-07-06

    申请号:US16007631

    申请日:2018-06-13

    Applicant: Ferric Inc.

    Abstract: A structure comprises a semiconductor integrated circuit, an inductor, and a magnetic flux closure layer. The inductor is integrated into a multilevel wiring network in the semiconductor integrated circuit. The inductor includes a planar laminated magnetic core and a conductive winding that turns around in a generally spiral manner on the outside of the planar laminated magnetic core. The planar laminated magnetic core includes an alternating sequence of a magnetic layer and a non-magnetic layer. The magnetic flux closure layer is disposed within about 100 μm of a face of the planar laminated magnetic core, the face of the planar magnetic core parallel to a principal plane of the planar laminated magnetic core. A second magnetic flux closure layer can be disposed within about 100 μm of an opposing face of the planar laminated magnetic core.

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