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公开(公告)号:US11064610B2
公开(公告)日:2021-07-13
申请号:US16006450
申请日:2018-06-12
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Ryan Davies , Michael Lekas
IPC: H01F27/28 , H05K1/18 , H01F41/04 , H01F41/02 , H01F27/24 , H05K1/16 , H05K1/02 , H05K1/11 , H01L49/02 , H01F10/26 , H01F41/32 , H01F17/00 , H05K1/03
Abstract: An inductor includes a planar laminated magnetic core and a conductive winding. The planar magnetic core includes an alternating sequence of a magnetic layer and a non-magnetic layer. The non-magnetic layer includes an insulating layer that is disposed between first and second interface layers. The conductive winding turns around in a generally spiral manner on the outside of the planar laminated magnetic core. The inductor can be integrated into a multilevel wiring network in a semiconductor integrated circuit to form a microelectronic device, such as a transformer, a power converter, or a microprocessor.
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公开(公告)号:US20210065959A1
公开(公告)日:2021-03-04
申请号:US16557476
申请日:2019-08-30
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Denis Shishkov , Matthew Cavallaro , Michael Lekas , Ryan Davies
Abstract: A method for manufacturing a vertically-laminated ferromagnetic core includes (a) depositing a conductive seed layer on or over a first side of a substrate; (b) depositing a masking layer on or over a second side of the substrate, the first and second sides on opposite sides of the substrate; (c) forming a pattern in the masking layer; (d) dry etching the substrate, based on the pattern in the masking layer, from the second side to the first side to expose portions of the conductive seed layer; and (e) depositing a ferromagnetic material onto the exposed portions of the conductive seed layer to form vertically-oriented ferromagnetic layers.
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13.
公开(公告)号:US10893609B2
公开(公告)日:2021-01-12
申请号:US16007158
申请日:2018-06-13
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Ryan Davies , Michael Lekas
IPC: H01F27/28 , H05K1/18 , H01F41/04 , H01F41/02 , H01F27/24 , H05K1/02 , H05K1/11 , H01F17/00 , H01F41/32 , H05K1/16 , H05K1/03
Abstract: A structure includes a semiconductor integrated circuit comprising a multilevel wiring network and an inductor integrated into the multilevel wiring network. The inductor includes a planar laminated magnetic core and a conductive winding that turns around in a generally spiral manner on the outside of the planar laminated magnetic core. The planar laminated magnetic core includes an alternating sequence of a magnetic layer and a non-magnetic layer. The magnetic layer comprises a ferromagnetic alloy having an iron composition of about 10 atomic percent to about 90 atomic percent.
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公开(公告)号:US10431371B2
公开(公告)日:2019-10-01
申请号:US15255804
申请日:2016-09-02
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Ryan Davies , Hao Wu
IPC: H01F27/24 , H01F41/04 , H01F41/06 , H01F1/147 , H01F13/00 , H01F17/00 , H01F17/04 , H01F17/06 , H01F27/255 , H01F27/38 , H01F27/28 , H01F41/14 , H01L49/02 , C23C14/14 , H01F10/12
Abstract: A method of forming an inductor assembly includes depositing a magnetic core on a planar substrate lying in a core plane, forming an inductor coil that generates a magnetic field that passes through the magnetic core in a closed loop parallel to the core plane, and annealing the magnetic core while applying an external magnetic field that passes through the magnetic core in a radial direction to permanently fix the easy axis of magnetization parallel to the radial direction. As a result, the hard axis of magnetization of the magnetic core is permanently oriented in a generally circular closed path parallel to the closed loop of the inductor's magnetic field.
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15.
公开(公告)号:US20190172624A1
公开(公告)日:2019-06-06
申请号:US16257392
申请日:2019-01-25
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Ryan Davies , Michael Lekas
IPC: H01F27/24 , H01F17/00 , H01F1/147 , H01L49/02 , H01F41/14 , H01F41/06 , H01F17/04 , H01F13/00 , H01F27/38 , H01F27/255 , H01F17/06 , H01F27/28
Abstract: Inductive elements comprising anisotropic media and a bias coil for magnetically biasing thereof and methods of manufacture and operation for use in applications such as microelectronics. The bias coil generates a magnetic field that biases a magnetic core material during deposition thereof such that a desirable orientation of anisotropy is achieved throughout the magnetic core and enables modulation of the inductive response of the device. The bias coil can generate the magnetic field by application of electrical current therethrough. Alternatively, the bias coil can include or can be replaced with a permanent magnet that can generate the magnetic field without application of electrical current therethrough.
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公开(公告)号:US20180268982A1
公开(公告)日:2018-09-20
申请号:US15911778
申请日:2018-03-05
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Ryan Davies , Hao Wu
IPC: H01F27/24 , H01L49/02 , H01F27/28 , H01F13/00 , H01F41/14 , H01F41/06 , H01F27/38 , H01F1/147 , H01F27/255 , H01F17/06 , H01F17/04 , H01F17/00
CPC classification number: H01F27/24 , H01F1/14708 , H01F13/003 , H01F17/0013 , H01F17/04 , H01F17/062 , H01F27/255 , H01F27/2823 , H01F27/2895 , H01F27/38 , H01F41/046 , H01F41/06 , H01F41/14 , H01F2017/0066 , H01L28/10
Abstract: Inductive elements comprising anisotropic media and biasing coils for magnetically biasing thereof and methods of manufacture and operation for use in applications such as microelectronics. Application of an electrical current through the bias coils generates a magnetic field that biases the magnetic material such that a desirable orientation of anisotropy is achieved throughout the magnetic core and enables modulation of the inductive response of the device. Electrical conductors coupled to interconnects are magnetically coupled to magnetic core layers to produce self and/or mutual inductors.
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公开(公告)号:US20160372251A1
公开(公告)日:2016-12-22
申请号:US15255804
申请日:2016-09-02
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Ryan Davies , Hao Wu
CPC classification number: H01F27/24 , C23C14/14 , H01F1/14708 , H01F10/12 , H01F13/003 , H01F17/0013 , H01F17/04 , H01F17/062 , H01F27/255 , H01F27/2823 , H01F27/2895 , H01F27/38 , H01F41/046 , H01F41/06 , H01F41/14 , H01F2017/0066 , H01L28/10 , Y10T29/49073 , Y10T29/49075
Abstract: Inductive elements comprising anisotropic media and biasing coils for magnetically biasing thereof and methods of manufacture and operation for use in applications such as microelectronics. Application of an electrical current through the bias coils generates a magnetic field that biases the magnetic material such that a desirable orientation of anisotropy is achieved throughout the magnetic core and enables modulation of the inductive response of the device. Electrical conductors coupled to interconnects are magnetically coupled to magnetic core layers to produce self and/or mutual inductors.
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公开(公告)号:US20250157707A1
公开(公告)日:2025-05-15
申请号:US19024184
申请日:2025-01-16
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Michael Lekas , Ryan Davies , Denis Shishkov , Matthew Cavallaro
IPC: H01F1/03 , H01F1/26 , H01F10/32 , H01F17/04 , H01F27/24 , H01F27/28 , H01F41/00 , H01F41/02 , H01F41/16 , H01L23/522
Abstract: A ferromagnetic-polymer composite material comprises a polymer and a plurality of ferromagnetic film platelets disposed in the polymer. Each ferromagnetic film platelet comprises first and second insulator layers and a ferromagnetic layer disposed between the first and second insulator layers. The ferromagnetic layer can be magnetically anisotropic in which a hard axis of magnetization is aligned parallel to a plane that passes through and parallel to an interface between the first insulator layer and the ferromagnetic layer. The easy and/or hard axes of magnetization in the ferromagnetic film platelets can be aligned. An inductor can have a core formed of the ferromagnetic-polymer composite material.
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公开(公告)号:US20230326654A1
公开(公告)日:2023-10-12
申请号:US18332928
申请日:2023-06-12
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Denis Shishkov , Matthew Cavallaro , Michael Lekas , Ryan Davies
CPC classification number: H01F27/24 , H01F27/25 , H01F41/0213 , H01F41/18
Abstract: A method for manufacturing a vertically-laminated ferromagnetic core includes (a) depositing a conductive seed layer on or over a first side of a substrate; (b) depositing a masking layer on or over a second side of the substrate, the first and second sides on opposite sides of the substrate; (c) forming a pattern in the masking layer; (d) dry etching the substrate, based on the pattern in the masking layer, from the second side to the first side to expose portions of the conductive seed layer; and (e) depositing a ferromagnetic material onto the exposed portions of the conductive seed layer to form vertically-oriented ferromagnetic layers.
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20.
公开(公告)号:US11058001B2
公开(公告)日:2021-07-06
申请号:US16007631
申请日:2018-06-13
Applicant: Ferric Inc.
Inventor: Noah Sturcken , Ryan Davies , Michael Lekas
IPC: H01F27/28 , H05K1/18 , H01F41/04 , H01F41/02 , H01F27/24 , H05K1/02 , H05K1/11 , H01F17/00 , H01F41/32 , H05K1/16 , H05K1/03
Abstract: A structure comprises a semiconductor integrated circuit, an inductor, and a magnetic flux closure layer. The inductor is integrated into a multilevel wiring network in the semiconductor integrated circuit. The inductor includes a planar laminated magnetic core and a conductive winding that turns around in a generally spiral manner on the outside of the planar laminated magnetic core. The planar laminated magnetic core includes an alternating sequence of a magnetic layer and a non-magnetic layer. The magnetic flux closure layer is disposed within about 100 μm of a face of the planar laminated magnetic core, the face of the planar magnetic core parallel to a principal plane of the planar laminated magnetic core. A second magnetic flux closure layer can be disposed within about 100 μm of an opposing face of the planar laminated magnetic core.
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