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    OPTICAL DEVICE, AND LASER CHAMBER AND GAS LASER APPARATUS USING THE SAME
    12.
    发明申请
    OPTICAL DEVICE, AND LASER CHAMBER AND GAS LASER APPARATUS USING THE SAME 有权
    光学装置，以及使用其的激光室和气体激光装置

    公开(公告)号：US20140286366A1

    公开(公告)日：2014-09-25

    申请号：US14220956

    申请日：2014-03-20

    Applicant: GIGAPHOTON INC.

    Inventor： Takahito KUMAZAKI ,  Kouji KAKIZAKI ,  Masanori YASHIRO

    IPC: H01S3/038 ,  G02B5/30

    CPC classification number: H01S3/038 ,  G02B5/208 ,  G03F7/20 ,  G03F7/70025 ,  H01S3/034 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/225

    Abstract: An optical device includes a plate-like optical element made of a calcium fluoride crystal, a holding member to sandwich and hold the optical element, a seal member provided between the holding member and one surface of the optical element in close contact therewith, and a cushioning member provided between the holding member and the other surface of the optical element in contact therewith. The cushioning member is made of one of a 304 stainless steel, a 303 stainless steel, a 316 stainless steel, a Hastelloy™ alloy, a carbon steel for machine construction S45C, and Inconel™.

    Abstract translation: 光学装置包括由氟化钙晶体制成的板状光学元件，夹持并保持光学元件的保持构件，设置在保持构件与光学元件的与其紧密接触的一个表面之间的密封构件， 缓冲构件设置在保持构件与光学元件的与其接触的另一表面之间。 缓冲构件由304不锈钢，303不锈钢，316不锈钢，Hastelloy™合金，用于机械结构S45C的碳素钢和Inconel™中的一种制成。

    LINE NARROWING GAS LASER DEVICE, WAVELENGTH CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
    13.
    发明申请
    LINE NARROWING GAS LASER DEVICE, WAVELENGTH CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD 有权

    公开(公告)号：US20230064314A1

    公开(公告)日：2023-03-02

    申请号：US18047596

    申请日：2022-10-18

    Applicant: Gigaphoton Inc.

    Inventor： Takahito KUMAZAKI ,  Osamu WAKABAYASHI

    IPC: H01S3/094 ,  H01S3/102

    Abstract: A line narrowing gas laser device includes an actuator changing a center wavelength of pulse laser light, and a processor controlling the actuator. The processor reads parameters including a number of irradiation pulses of pulse laser light to be radiated to one location of an irradiation receiving object, a shortest wavelength, and a longest wavelength; sets a first pattern with which the center wavelength is changed to approach the longest wavelength from the shortest wavelength and a second pattern with which the center wavelength is changed to approach the shortest wavelength from the longest wavelength such that at least one of the first pattern and the second pattern when the number of irradiation pulses is an even number is different from corresponding one when the number of irradiation pulses is an odd number; and controls the actuator so that the first pattern and the second pattern are alternately performed.

    LASER APPARATUS
    15.
    发明申请
    LASER APPARATUS 有权
    激光装置

    公开(公告)号：US20130315270A1

    公开(公告)日：2013-11-28

    申请号：US13895524

    申请日：2013-05-16

    Applicant: Gigaphoton Inc.

    Inventor： Takahito KUMAZAKI ,  Takashi Onose ,  Osamu Wakabayashi

    IPC: H01S3/10

    CPC classification number: H01S3/10069 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/0805 ,  H01S3/0811 ,  H01S3/0812 ,  H01S3/1055 ,  H01S3/106 ,  H01S3/1306 ,  H01S3/137 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

    Abstract: A laser apparatus may include an optical resonator, a laser chamber, an optical loss adjustment mechanism, and a spectral line width adjustment mechanism. The optical resonator includes a mirror configured to reflect a part of light and a grating. The laser chamber is provided in the optical resonator and contains a laser gain medium, configured to emit a laser beam. The optical loss adjustment mechanism is provided in the optical resonator and configured to adjust an optical loss of the laser beam. The spectral line width adjustment mechanism is provided in the optical resonator and configured to adjust a spectral line width of the laser beam.

    Abstract translation: 激光装置可以包括光学谐振器，激光室，光学损失调整机构和光谱线宽度调节机构。 光学谐振器包括被配置为反射一部分光和光栅的反射镜。 激光室设置在光学谐振器中并且包含被配置为发射激光束的激光增益介质。 光损耗调整机构设置在光谐振器中并且被配置为调整激光束的光损失。 光谱线宽度调节机构设置在光学谐振器中并且被配置为调整激光束的谱线宽度。

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