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公开(公告)号：US20230208094A1
公开(公告)日：2023-06-29
申请号：US18177088
申请日：2023-03-01
Applicant: Gigaphoton Inc.
Inventor： Takahito KUMAZAKI , Osamu WAKABAYASHI
CPC classification number: H01S3/137 , H01S3/1305 , G03F7/70025
Abstract: A laser device includes a first actuator configured to adjust an oscillation wavelength of pulse laser light; a second actuator configured to adjust a spectral line width of the pulse laser light; and a processor configured to determine a target spectral line width by reading data specifying a number of irradiation pulses of the pulse laser light with which one location of an irradiation receiving object is irradiated and a difference between a shortest wavelength and a longest wavelength, control the second actuator based on the target spectral line width, and control the first actuator so that the oscillation wavelength periodically changes every number of the irradiation pulses between the shortest wavelength and the longest wavelength.
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2.发明公开公开(公告)号：US20230155343A1
公开(公告)日：2023-05-18
申请号：US18149986
申请日：2023-01-04
Applicant: Gigaphoton Inc.
Inventor： Junichi FUJIMOTO , Takahito KUMAZAKI , Akiyoshi SUZUKI
CPC classification number: H01S3/139 , H01S3/097 , H01S3/1305 , G01B11/26 , G01D5/26 , G03F7/7055 , H01S3/11
Abstract: A laser apparatus includes a first optical element, a second optical element, a first actuator configured to change a first wavelength component included in a pulse laser beam by changing a posture of the first optical element, a second actuator configured to change a second wavelength component included in the pulse laser beam by changing a posture of the second optical element, a first encoder configured to measure a position of the first actuator, a second encoder configured to measure a position of the second actuator, and a processor. The processor reads a first relation and a second relation and performs control of the first actuator based on the first relation and the position of the first actuator measured by the first encoder and control of the second actuator based on the second relation and the position of the second actuator measured by the second encoder.
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公开(公告)号：US20150380893A1
公开(公告)日：2015-12-31
申请号：US14852120
申请日：2015-09-11
Applicant: Gigaphoton Inc.
Inventor： Takashi MATSUNAGA , Takahito KUMAZAKI , Keisuke ISHIDA , Osamu WAKABAYASHI
CPC classification number: H01S3/137 , H01S3/104 , H01S3/1055 , H01S3/1305 , H01S3/139 , H01S3/225 , H01S3/2251 , H01S3/2256
Abstract: A laser device (100) may include: a laser resonator (20, 30) configured to output pulsed laser light (L); an actuator (35, 36, 37) configured to change wavelength of the pulsed laser light; and a controller (110) configured to receive data of target wavelength for a plurality of pulses of the pulsed laser light before the pulsed laser light is output, and to control the actuator, based on the data of the target wavelength for the plurality of pulses, such that the wavelength of the pulsed laser light approaches the data of the target wavelength.
Abstract translation: 激光装置（100）可以包括：激光谐振器（20,30），被配置为输出脉冲激光（L）; 被配置为改变脉冲激光的波长的致动器（35,36,37）; 以及控制器（110），被配置为在脉冲激光输出之前接收脉冲激光的多个脉冲的目标波长的数据，并且基于多个脉冲的目标波长的数据来控制致动器 使得脉冲激光的波长接近目标波长的数据。
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公开(公告)号：US20130208744A1
公开(公告)日：2013-08-15
申请号：US13738028
申请日：2013-01-10
Applicant: Gigaphoton Inc.
Inventor： Takahito KUMAZAKI , Takashi MATSUNAGA , Kazuya TAKEZAWA
IPC: H01S3/04
CPC classification number: H01S3/04 , G02B7/008 , H01S3/0401 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/106 , H01S3/225 , H01S3/2333
Abstract: An excimer laser may include a frame, a base plate on which the frame is disposed, an excimer laser configured to oscillate and output laser light by discharge-pumping within a chamber containing a laser gas, an optical element that is mounted upon the frame and that is disposed in the optical path of the outputted laser light and a heat removal mechanism connected to both the frame and the base plate.
Abstract translation: 准分子激光器可以包括框架，设置框架的基板，被配置为通过在包含激光气体的腔室内的放电泵送来振荡和输出激光的准分子激光器，安装在框架上的光学元件和 其设置在输出的激光的光路中，以及连接到框架和基板的散热机构。
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公开(公告)号：US20180323568A1
公开(公告)日：2018-11-08
申请号：US16033030
申请日：2018-07-11
Applicant: Gigaphoton Inc.
Inventor： Hiroshi FURUSATO , Takeshi OHTA , Natsuhiko KOUNO , Osamu WAKABAYASHI , Takahito KUMAZAKI
CPC classification number: H01S3/11 , H01S3/034 , H01S3/038 , H01S3/08009 , H01S3/134 , H01S3/137 , H01S3/2207 , H01S3/2222
Abstract: The line narrowed laser apparatus configured to perform a plurality of burst oscillations including a first burst oscillation and a second burst oscillation next to the first burst oscillation to output a pulse laser beam. The line narrowed laser apparatus comprises a laser resonator, a chamber provided in the laser resonator, a pair of electrodes provided in the chamber, an electric power source configured to apply a pulsed voltage to the pair of electrodes, a wavelength-selecting element provided in the laser resonator, a spectral width varying unit provided in the laser resonator, a wavelength variable unit configured to change a selected wavelength selected by the wavelength-selecting element, and a controller. The controller is configured to control the wavelength variable unit based on an amount of control of the spectral width varying unit in a period from a time of ending the first burst oscillation to a time of starting the second burst oscillation.
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Patent Agency Ranking
公开(公告)号：US20180254600A1
公开(公告)日：2018-09-06
申请号：US15973896
申请日：2018-05-08
Applicant: Gigaphoton Inc.
Inventor： Takahito KUMAZAKI , Keisuke ISHIDA , Hiroshi FURUSATO
CPC classification number: H01S3/137 , G01J3/0205 , G01J3/0218 , G01J3/027 , G01J3/10 , G01J3/26 , G01J3/28 , G01J2003/2859 , G03F7/70025 , G03F7/70575 , G03F7/70725 , H01S3/005 , H01S3/0078 , H01S3/034 , H01S3/08004 , H01S3/08009 , H01S3/10038 , H01S3/10061 , H01S3/10069 , H01S3/106 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2308
Abstract: A narrowband laser apparatus may be provided with a laser resonator including optical elements for narrowing a spectral linewidth, a spectrometer configured to detect spectral intensity distributions of multiple pulses included in a pulsed laser beam output from the laser resonator, a spectral waveform producer configured to produce a spectral waveform by adding up the spectral intensity distributions of the multiple pulses, a device function storage configured to store a device function of the spectrometer, a wavelength frequency function generator configured to generate a wavelength frequency function which represents a frequency distribution of center wavelengths of the multiple pulses, and a deconvolution processor configured to perform deconvolution processing on the spectral waveform with the device function and the wavelength frequency function.
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公开(公告)号：US20180123312A1
公开(公告)日：2018-05-03
申请号：US15857894
申请日：2017-12-29
Applicant: Gigaphoton Inc.
Inventor： Hiroshi FURUSATO , Keisuke ISHIDA , Takeshi OHTA , Takahito KUMAZAKI , Osamu WAKABAYASHI
CPC classification number: H01S3/11 , H01S3/0078 , H01S3/08004 , H01S3/08009 , H01S3/134 , H01S3/137 , H01S3/1398 , H01S3/225 , H01S2301/04
Abstract: The line narrowed laser apparatus configured to perform a plurality of burst oscillations including a first burst oscillation and a second burst oscillation next to the first burst oscillation to output a pulse laser beam. The line narrowed laser apparatus comprises a laser resonator, a chamber provided in the laser resonator, a pair of electrodes provided in the chamber, an electric power source configured to apply pulsed voltage to the pair of electrodes, a wavelength selecting element provided in the laser resonator, a spectral width varying unit provided in the laser resonator, and a controller. The controller is configured to measure a duty in a predetermined period before starting the second burst oscillation and a length of a suspension period from a time of ending the first burst oscillation to a time of starting the second burst oscillation, and perform a first control of the spectral width varying unit based on the duty and the length of the suspension period.
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公开(公告)号：US20150340837A1
公开(公告)日：2015-11-26
申请号：US14818939
申请日：2015-08-05
Applicant: Gigaphoton Inc.
Inventor： Takashi MATSUNAGA , Takahito KUMAZAKI , Osamu WAKABAYASHI
CPC classification number: H01S3/08004 , H01S3/1305 , H01S3/137 , H01S3/2251 , H01S3/2256 , H01S3/2366
Abstract: There is provided a method of controlling the wavelength of a laser beam. The method includes measuring an absolute wavelength of the laser beam; calculating a difference between a reference wavelength and the absolute wavelength of the laser beam; and adjusting the reference wavelength of the laser beam based on the difference between the reference wavelength and the absolute wavelength of the laser beam, at an interval shorter than an interval for which the absolute wavelength of the laser beam is measured.
Abstract translation: 提供了一种控制激光束波长的方法。 该方法包括测量激光束的绝对波长; 计算参考波长和激光束的绝对波长之间的差; 并且以比测量激光束的绝对波长的间隔短的间隔，基于激光束的参考波长和绝对波长之间的差来调整激光束的参考波长。
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公开(公告)号：US20220385027A1
公开(公告)日：2022-12-01
申请号：US17818916
申请日：2022-08-10
Applicant: Gigaphoton Inc.
Inventor： Takahito KUMAZAKI , Osamu WAKABAYASHI
Abstract: A line narrowing device includes first and second prisms disposed at positions different in a wavelength dispersion direction of any of the first and second prisms, a third prism disposed on the optical path of an optical beam and through which the beam width of the optical beam is enlarged and first and second parts of the optical beam are incident on the first and second prisms, respectively, a grating disposed across the optical path of the first part having passed through the first prism and the optical path of the second part having passed through the second prism, a first actuator configured to adjust the incident angle of the first part on the grating, a second actuator configured to adjust the incident angle of the second part on the grating, and a third actuator configured to adjust an energy ratio of the first and second parts.
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10.发明申请公开(公告)号：US20220385022A1
公开(公告)日：2022-12-01
申请号：US17818180
申请日：2022-08-08
Applicant: Gigaphoton Inc.
Inventor： Takahito KUMAZAKI , Osamu WAKABAYASHI
IPC: H01S3/036 , H01S3/1055 , H01S3/225
Abstract: A control method of a line narrowing gas laser device includes receiving a command of either a single-wavelength mode command or a multi-wavelength mode command from an external apparatus, and controlling the line narrowing gas laser device to generate pulse laser light in accordance with the command.
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