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公开(公告)号：US20240264428A1
公开(公告)日：2024-08-08
申请号：US18432299
申请日：2024-02-05
Applicant: Hamamatsu Photonics K.K.
Inventor： Tomoyuki IDE , Daiki SUZUKI
CPC classification number: G02B26/0816 , G02B26/101
Abstract: A mirror device includes a support portion; a first movable portion including a body portion including a first surface and a second surface opposite to the first surface, a mirror surface being formed on the first surface and a rib portion being formed on the second surface; and a first torsion bar that couples the first movable portion to the support portion such that the first movable portion is swingable around an X-axis. The rib portion includes a first extending portion extending along an outer edge of the body portion when viewed in a direction perpendicular to the second surface. The first extending portion includes a protrusion portion protruding outward from the outer edge of the body portion and extending along the outer edge of the body portion when viewed in the direction perpendicular to the second surface.
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公开(公告)号：US20240053603A1
公开(公告)日：2024-02-15
申请号：US18382777
申请日：2023-10-23
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
CPC classification number: G02B27/0031 , G02B26/101 , G02B27/0006 , G02B26/085 , G02B26/0833 , G02B26/10
Abstract: A mirror unit includes an optical scanning device, a frame member, and a window member. The frame member includes first and second wall portions facing each other in an X-axis direction. The first wall portion is higher than the second wall portion. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface of the optical scanning device. In a cross-section parallel to the X-axis direction, the first wall portion is separated from a first line passing through a first end at a side of the first wall portion in the mirror surface and a first corner portion formed at the side of the first wall portion by an outer surface opposite to the frame member and a first side surface in the window member.
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公开(公告)号：US20230418025A1
公开(公告)日：2023-12-28
申请号：US18211667
申请日：2023-06-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoyuki IDE
IPC: G02B7/198
CPC classification number: G02B7/198
Abstract: An optical module includes a mirror unit, a magnet unit, and a package including a recess accommodating the magnet unit. The magnet unit includes a plurality of magnets arranged along a first direction. The recess includes a base wall portion which extends along the first direction and to which an upper surface of the magnet unit is fixed, and a side wall portion extending along a second direction intersecting the first direction, and facing a side surface of the magnet unit. The recess includes an opening portion that is delimited by the side wall portion and open to a lower side. The mirror unit is disposed on a second surface on an opposite side of the base wall portion from a first surface to which the magnet unit is fixed. The side wall portion protrudes to the lower side with respect to a bottom surface of the magnet unit.
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公开(公告)号：US20200249470A1
公开(公告)日：2020-08-06
申请号：US16775467
申请日：2020-01-29
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
Abstract: In a mirror unit, a first wall portion is higher than a second wall portion. A window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface. When any one of first to fourth wall portions is set as a first reference wall portion, in a cross-section perpendicular to the first reference wall portion, a first line passing through a first end at a side of the first reference wall portion in the mirror surface and a first corner portion formed at the side of the first reference wall portion by an outer surface and a first side surface in the window member intersects the first wall portion. A wiring portion includes a portion extending inside a base and leads outside a frame member.
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公开(公告)号：US20240329391A1
公开(公告)日：2024-10-03
申请号：US18623385
申请日：2024-04-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoyuki IDE
CPC classification number: G02B26/101 , G02B26/0816
Abstract: A mirror apparatus includes a base portion; a mirror unit; a frame member; and a window member. The frame member includes a first wall portion, a second wall portion, and a pair of standing wall portions. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion, and is inclined with respect to a mirror surface. A top surface of each of the pair of standing wall portions includes a flat portion. A width of the top surface and a width of a bottom surface of each of the pair of standing wall portions are wider than a width of the first wall portion and a width of the second wall portion. At least a part of the bottom surface of each of the pair of standing wall portions is in contact with the base portion.
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Patent Agency Ranking
公开(公告)号：US20240295727A1
公开(公告)日：2024-09-05
申请号：US18439947
申请日：2024-02-13
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Hidetaka KAWAOKA , Tomoyuki IDE
CPC classification number: G02B26/0816 , G02B26/101
Abstract: An actuator device includes: a first movable portion; a second movable portion; a magnet portion; a coil; and a controller configured to supply a first drive signal for resonantly driving the first movable portion and a second drive signal for non-resonantly driving the second movable portion to the coil. An abnormality detection method includes: supplying the second drive signal to the coil by the controller; acquiring an output value corresponding to a counter electromotive force generated in the coil while the second drive signal is supplied to the coil; and determining whether an abnormality has occurred in a tilted state of the second movable portion on the basis of the second drive signal supplied to the coil and the acquired output value.
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公开(公告)号：US20240092634A1
公开(公告)日：2024-03-21
申请号：US17766770
申请日：2020-08-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Takahiro MATSUMOTO , Tomoyuki IDE , Mikito TAKAHASHI
CPC classification number: B81C1/00142 , B81C1/00952 , G02B26/0833 , B81C2201/0112 , B81C2201/0132 , B81C2201/0133
Abstract: A method for manufacturing a mirror device, the method includes a first step of preparing a wafer having a support layer, a device layer, and an intermediate layer; a second step of forming a slit in the wafer such that the movable portion becomes movable with respect to the base portion by removing a part of each of the support layer, the device layer, and the intermediate layer from the wafer and forming a plurality of parts each corresponding to the structure in the wafer, after the first step; a third step of performing wet cleaning using a cleaning liquid after the second step; and a fourth step of cutting out each of the plurality of parts from the wafer after the third step. In the second step, a part of the intermediate layer is removed from the wafer by anisotropic etching.
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公开(公告)号：US20240027747A1
公开(公告)日：2024-01-25
申请号：US18224090
申请日：2023-07-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoyuki IDE , Yuki MORINAGA , Mikito TAKAHASHI
IPC: G02B26/08
CPC classification number: G02B26/085
Abstract: An optical module includes: a mirror unit; and a magnet unit including first, second, and third magnets arranged along a first direction. The mirror unit is disposed on the magnet unit in a second direction perpendicular to the first direction. A width of the first magnet is equal to or more than widths of the second and third magnets. An upper surface of the first magnet is located on a mirror unit side with respect to upper surfaces of the second and third magnets in the second direction, or is located at the same position as one of the upper surfaces of the second and third magnets and on the mirror unit side with respect to the other of the upper surfaces of the second and third magnets in the second direction. The mirror unit is fixed to at least the upper surface of the first magnet.
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公开(公告)号：US20240002219A1
公开(公告)日：2024-01-04
申请号：US18037142
申请日：2021-09-15
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoyuki IDE , Daiki SUZUKI , Mikito TAKAHASHI
CPC classification number: B81C1/00666 , G02B26/0833 , B81C1/00888 , B81C99/004
Abstract: A method for manufacturing a mirror device is a method for manufacturing a mirror device including a structural body that includes a support portion, a movable portion, and a coupling portion, and a mirror layer provided on the movable portion. The method for manufacturing a mirror device includes: a first forming step of forming a plurality of parts on a wafer, each of the plurality of parts corresponding to the structural body; a second forming step of forming the mirror layer on a part of each of the plurality of parts, the part corresponding to the movable portion; a heating step of heating the part of each of the plurality of parts, corresponding to the movable portion, after the first forming step and the second forming step; and a cutting step of cutting the wafer to separate the plurality of parts from one another, after the heating step.
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公开(公告)号：US20220404614A1
公开(公告)日：2022-12-22
申请号：US17777306
申请日：2020-09-16
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Tomoyuki IDE
Abstract: A mirror unit includes a mirror device includes a support portion and a movable mirror portion configured to be movable with respect to the support portion, and a package including a light incident opening and accommodating and holding the mirror device such that light incident from the light incident opening is able to be incident on the movable mirror portion. The package is provided with a ventilation port communicating an inside and an outside of the package.
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