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    Novel structure/method to form bottom spin valves for ultra-high density
    15.
    发明申请
    Novel structure/method to form bottom spin valves for ultra-high density 失效
    用于形成超高密度底部旋转阀的新型结构/方法

    公开(公告)号：US20040252416A1

    公开(公告)日：2004-12-16

    申请号：US10460088

    申请日：2003-06-12

    Applicant: Headway Technologies, Inc.

    Inventor： Cheng T. Horng ,  Ru-Ying Tong

    IPC: G11B005/39

    CPC classification number: B82Y25/00 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/3903 ,  G11B5/3929 ,  H01F10/3259 ,  H01F10/3272 ,  H01F10/3295 ,  H01F41/302 ,  Y10T29/49034 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49052

    Abstract: Two embodiments of a GMR sensor of the bottom spin valve (BSV) spin filter spin valve (SFSV) type are provided together with methods for their fabrication. In each embodiment the sensor includes an in-situ naturally oxidized specularly reflecting layer (NOL) which is a more uniform and dense layer than such layers formed by high temperature annealing or reactive-ion etching. In one embodiment, the sensor has an ultra thin composite free layer and a high-conductance layer (HCL), providing high output and low coercivity. In a second embodiment, along with the same NOL, the sensor has a laminated free layer which includes a non-magnetic conductive layer, which also provides high output and low coercivity. The sensors are capable of reading densities exceeding 60 Gb/in2.

    Abstract translation: 底部自旋阀（BSV）旋转过滤器自旋阀（SFSV）型的GMR传感器的两个实施例与其制造方法一起提供。 在每个实施例中，传感器包括原位自然氧化的镜面反射层（NOL），其比通过高温退火或反应离子蚀刻形成的这种层更均匀和致密的层。 在一个实施例中，传感器具有超薄的复合自由层和高电导层（HCL），提供高输出和低矫顽力。 在第二实施例中，与相同的NOL一起，传感器具有包括非磁性导电层的层叠自由层，其也提供高输出和低矫顽力。 传感器能够读取超过60Gb / in <2>的密度。

    Synthetic anti-parallel spin valve with thin AFM layer for very high density application
    16.
    发明申请
    Synthetic anti-parallel spin valve with thin AFM layer for very high density application 失效
    具有薄AFM层的合成反并联自旋阀，用于非常高密度的应用

    公开(公告)号：US20040240125A1

    公开(公告)日：2004-12-02

    申请号：US10883930

    申请日：2004-07-02

    Applicant: HEADWAY TECHNOLOGIES, INC.

    Inventor： Cheng T. Horng ,  Kochan Ju ,  Mao-Min Chen ,  Min Li ,  Ru-Ying Tong ,  Simon Liao

    IPC: G11B005/39

    CPC classification number: B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G11B5/3163 ,  G11B5/3903 ,  G11B2005/3996 ,  H01F10/3268 ,  H01F10/3295 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49039 ,  Y10T29/49044 ,  Y10T29/49055

    Abstract: A method for forming top and bottom spin valve sensors and the sensors so formed, the sensors having a strongly coupled SyAP pinned layer and an ultra-thin antiferromagnetic pinning layer. The two strongly coupled ferromagnetic layers comprising the SyAP pinned layer in the top valve configuration are separated by a Ru spacer layer approximately 3 angstroms thick, while the two layers in the bottom spin valve configuration are separated by a Rh spacer layer approximately 5 angstroms thick. This allows the use of an ultra thin MnPt antiferromagnetic pinning layer of thickness between approximately 80 and approximately 150 angstroms. The sensor structure produced thereby is suitable for high density applications.

    Abstract translation: 用于形成顶部和底部自旋阀传感器和如此形成的传感器的方法，所述传感器具有强耦合的SyAP钉扎层和超薄反铁磁钉扎层。 包括顶阀配置中的SyAP钉扎层的两个强耦合铁磁层由大约3埃厚的Ru隔离层隔开，而底部自旋阀结构中的两个层被大约5埃厚的Rh间隔层隔开。 这允许使用厚度在大约80和大约150埃之间的超薄MnPt反铁磁性钉扎层。 由此生产的传感器结构适用于高密度应用。

    Ferromagnetic/antiferromagnetic bilayer, including decoupler, for longitudinal bias
    17.
    发明申请
    Ferromagnetic/antiferromagnetic bilayer, including decoupler, for longitudinal bias 失效
    铁磁/反铁磁双层，包括去耦器，用于纵向偏置

    公开(公告)号：US20040169962A1

    公开(公告)日：2004-09-02

    申请号：US10791015

    申请日：2004-03-02

    Applicant: HEADWAY TECHNOLOGIES, INC.

    Inventor： You Feng Zheng ,  Kochan Ju ,  Cheng T. Horng ,  Simon Liao ,  Ru Ying Tong

    IPC: G11B005/127 ,  G11B005/33

    CPC classification number: B82Y25/00 ,  B82Y10/00 ,  G11B5/3163 ,  G11B5/3903 ,  G11B2005/3996 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052

    Abstract: As the dimensions of spin valve heads continue to be reduced, a number of difficulties are being encountered. One such is with the longitudinal bias when an external magnetic field can cause reversal of the hard magnet, thereby causing a hysteric response by the head. This coercivity reduction becomes more severe as the hard magnet becomes thinner. This problem has been overcome by inserting a decoupling layer between the antiferromagnetic layer that is used to stabilize the pinned layer of the spin valve itself and the soft ferromagnetic layer that is used for longitudinal biasing. This soft ferromagnetic layer is pinned by a second antiferromagnetic layer deposited on it on its far side away from the first antiferromagnetic layer. The presence of the decoupling layer ensures that the magnetization of the soft layer is determined only by the second antiferromagnetic layer. The inclusion of said decoupling layer allows more latitude in etch depth control during manufacturing.

    Abstract translation: 随着自旋阀头的尺寸不断减小，正在遇到许多困难。 当外部磁场可能导致硬磁体的反转时，其中之一是具有纵向偏置，从而导致头部的歇斯底里响应。 随着硬磁体变薄，矫顽力降低变得更严重。 通过在用于稳定自旋阀本身的被钉扎层的反铁磁性层和用于纵向偏置的软铁磁层之间插入去耦层已经克服了这个问题。 该软铁磁层由沉积在其上的远离第一反铁磁性层的远侧的第二反铁磁层固定。 去耦层的存在确保了软层的磁化仅由第二反铁磁层确定。 包含所述去耦层在制造过程中允许蚀刻深度控制的更大的纬度。

    Ferromagnetic/antiferromagnetic bilayer, including decoupler, for longitudinal bias
    18.
    发明申请
    Ferromagnetic/antiferromagnetic bilayer, including decoupler, for longitudinal bias 失效
    铁磁/反铁磁双层，包括去耦器，用于纵向偏置

    公开(公告)号：US20030039079A1

    公开(公告)日：2003-02-27

    申请号：US09933963

    申请日：2001-08-22

    Applicant: Headway Technologies, Inc.

    Inventor： You Feng Zheng ,  Kochan Ju ,  Cheng T. Horng ,  Simon Liao ,  Ru Ying Tong

    IPC: G11B005/39

    CPC classification number: B82Y25/00 ,  B82Y10/00 ,  G11B5/3163 ,  G11B5/3903 ,  G11B2005/3996 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052

    Abstract: As the dimensions of spin valve heads continue to be reduced, a number of difficulties are being encountered. One such is with the longitudinal bias when an external magnetic field can cause reversal of the hard magnet, thereby causing a hysteric response by the head. This coercivity reduction becomes more severe as the hard magnet becomes thinner. This problem has been overcome by inserting a decoupling layer between the antiferromagnetic layer that is used to stabilize the pinned layer of the spin valve itself and the soft ferromagnetic layer that is used for longitudinal biasing. This soft ferromagnetic layer is pinned by a second antiferromagnetic layer deposited on it on its far side away from the first antiferromagnetic layer. The presence of the decoupling layer ensures that the magnetization of the soft layer is determined only by the second antiferromagnetic layer. The inclusion of said decoupling layer allows more latitude in etch depth control during manufacturing.

    Abstract translation: 随着自旋阀头的尺寸不断减小，正在遇到许多困难。 当外部磁场可能导致硬磁体的反转时，其中之一是具有纵向偏置，从而导致头部的歇斯底里响应。 随着硬磁体变薄，矫顽力降低变得更严重。 通过在用于稳定自旋阀本身的被钉扎层的反铁磁性层和用于纵向偏置的软铁磁层之间插入去耦层已经克服了这个问题。 该软铁磁层由沉积在其上的远离第一反铁磁性层的远侧的第二反铁磁层固定。 去耦层的存在确保了软层的磁化仅由第二反铁磁层确定。 包含所述去耦层在制造过程中允许蚀刻深度控制的更大的纬度。

    Spin valve head having lead overlay
    19.
    发明申请
    Spin valve head having lead overlay 失效
    旋转阀头具有铅覆盖

    公开(公告)号：US20020174533A1

    公开(公告)日：2002-11-28

    申请号：US09747234

    申请日：2000-12-26

    Applicant: Headway Technologies, Inc.

    Inventor： Cheng T. Horng ,  Ru-Ying Tong ,  Kochan Ju

    IPC: G11B005/127 ,  H04R031/00 ,  B44C001/22

    CPC classification number: B82Y25/00 ,  B82Y10/00 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3903 ,  G11B2005/3996 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046

    Abstract: This invention describes a spin valve based magnetic read head that is suitable for use with ultra-high recording densities along with a process for manufacturing it. This process produces a product that is free of conductor lead bridging and conductor lead fencing. A key sub-process of the present invention is the deposition of a first capping layer through DC sputtering followed by, without breaking vacuum, a lead overlay layer This is followed by deposition, also by DC sputtering, of a second capping layer which is patterned so that it becomes a hard mask. Then, using this hard mask, the lead overlay layer is removed from the center of the structure by means of ion beam etching. Hard bias and conductor lead layers are then formed inside parallel trenches without the use of liftoff processes.

    Abstract translation: 本发明描述了一种适用于超高记录密度的基于自旋阀的磁读头及其制造方法。 该工艺生产的产品不含导体引线桥接和导线栅栏。 本发明的关键子方法是通过DC溅射沉积第一覆盖层，然后在不破坏真空的情况下沉积引线覆盖层。然后也通过DC溅射沉积图案化的第二覆盖层 使它成为一个硬面具。 然后，使用该硬掩模，通过离子束蚀刻从引线覆盖层的中心除去引线覆盖层。 然后在平行沟槽内形成硬偏压和导体引线层，而不使用脱扣工艺。

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