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11.发明授权公开(公告)号：US07643196B2
公开(公告)日：2010-01-05
申请号：US11305053
申请日：2005-12-16
Applicant: Jonathan Bernstein , Fran J. Rogomentich , Tommy Lee , Mathew Varghese , Gregory A. Kirkos
Inventor： Jonathan Bernstein , Fran J. Rogomentich , Tommy Lee , Mathew Varghese , Gregory A. Kirkos
IPC: G02B26/08
CPC classification number: G02B26/085 , G02B7/1821 , G02B26/101 , Y10S359/90
Abstract: Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.
Abstract translation: 这里提出的是与微型可致动平台系统相关的系统，方法和设备。 根据一个实施例，系统，方法和装置涉及可控地致动的微型平台组件，包括微型反射镜。
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公开(公告)号：US20070240294A1
公开(公告)日：2007-10-18
申请号：US11253451
申请日：2005-10-19
Applicant: Amy Duwel , David Carter , Mark Mescher , Mathew Varghese , Bernard Antkowiak , Marc Weinberg
Inventor： Amy Duwel , David Carter , Mark Mescher , Mathew Varghese , Bernard Antkowiak , Marc Weinberg
IPC: H04R17/00
CPC classification number: H03H3/02 , H03H9/172 , H03H9/564 , H03H9/586 , H03H2003/027 , H03H2009/241 , H04R17/00 , Y10T29/42 , Y10T29/435
Abstract: A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.
Abstract translation: 一种纵模式谐振器，其包括相对于衬底悬挂的衬底和棒。 该杆被悬挂使得响应于其整个厚度上的电场的应用而使它自由地纵向膨胀和收缩。 棒的膨胀和收缩响应于具有与棒的基本频率基本相等的频率的场来实现谐振。
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13.发明申请Resonator system with a plurality of individual mechanically coupled resonators and method of making same 有权具有多个单独的机械耦合谐振器的谐振器系统及其制造方法公开(公告)号：US20050140467A1
公开(公告)日：2005-06-30
申请号：US10946541
申请日：2004-09-21
Applicant: Amy Duwel , Luke Hohreiter , Joung-Mo Kang , Douglas White , David Carter , Mathew Varghese
Inventor： Amy Duwel , Luke Hohreiter , Joung-Mo Kang , Douglas White , David Carter , Mathew Varghese
CPC classification number: H03H3/02 , H03H9/564 , H03H9/582 , H03H9/586 , H03H2003/027 , H03H2009/241 , Y10T29/42
Abstract: A resonator system wherein a plurality of resonators each including piezoelectric material are suspended relative to a substrate. An edge of each resonator is mechanically coupled to an edge of another resonator and the plurality of resonators expand and contract reaching resonance in response to an applied electric field.
Abstract translation: 一种谐振器系统，其中包括压电材料的多个谐振器相对于衬底悬挂。 每个谐振器的边缘机械耦合到另一个谐振器的边缘，并且多个谐振器响应于所施加的电场而扩大和收缩达到谐振。
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公开(公告)号：US09573802B2
公开(公告)日：2017-02-21
申请号：US13397174
申请日：2012-02-15
Applicant: Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
Inventor： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
CPC classification number: B81C1/00007 , B81B2203/0109 , B81C1/0019 , Y10T29/49002
Abstract: The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.
Abstract translation: 本发明一般涉及用于形成三维MEMS的方法和装置。 更具体地说，本公开涉及一种控制微结构装置中的平面外屈曲的方法，以便产生具有1×，5×，10×，100×或500× 膜的厚度或晶片表面之上。 根据所公开的原理形成的示例性装置包括具有在晶片表面上方和下方延伸的微桥的三维加速度计。
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公开(公告)号：US09511995B2
公开(公告)日：2016-12-06
申请号：US13397230
申请日：2012-02-15
Applicant: Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
Inventor： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
CPC classification number: B05D3/10 , B81B2201/0235 , B81B2203/0109 , B81C1/00007 , B81C1/0019 , G01P15/0802 , Y10T428/24612
Abstract: The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.
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Patent Agency Ranking
公开(公告)号：US09217755B2
公开(公告)日：2015-12-22
申请号：US13397318
申请日：2012-02-15
Applicant: Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
Inventor： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
CPC classification number: B81C1/00007 , B81B2201/0207 , B81B2201/0235 , B81C1/00142 , B81C1/00158 , B81C1/0019 , G01P15/00 , G01P15/008 , G01P15/0802 , Y10T29/49117 , Y10T29/49155
Abstract: The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.
Abstract translation: 本发明一般涉及用于形成三维MEMS的方法和装置。 更具体地说，本公开涉及一种控制微结构装置中的平面外屈曲的方法，以便产生具有1×，5×，10×，100×或500× 膜的厚度或晶片表面之上。 根据所公开的原理形成的示例性装置包括具有在晶片表面上方和下方延伸的微桥的三维加速度计。
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公开(公告)号：US07862229B2
公开(公告)日：2011-01-04
申请号：US12229525
申请日：2008-08-22
Applicant: Alexander Dribinsky , Gregory P. Pucci , Yongyao Cai , Mathew Varghese , Gary J. O'Brien
Inventor： Alexander Dribinsky , Gregory P. Pucci , Yongyao Cai , Mathew Varghese , Gary J. O'Brien
IPC: G01K3/00
CPC classification number: G01K3/14 , G01P15/008
Abstract: A system, device, and method for minimizing x-axis and/or y-axis offset shift due to internally produced as well as externally produced on chip temperature imbalances. At least one temperature gradient canceling device is disposed on a substrate including a temperature gradient sensitive device having at least one pair of sensors. Voltage signals generated by the temperature gradient canceling devices can be combined with voltage signals generated by each of the pair of sensors to account for the offset.
Abstract translation: 用于最小化由于内部产生的x轴和/或y轴偏移偏移以及外部产生的片上温度失衡的系统，装置和方法。 至少一个温度梯度消除装置设置在包括具有至少一对传感器的温度梯度敏感装置的基板上。 由温度梯度消除装置产生的电压信号可与由该对传感器中的每一个生成的电压信号组合以考虑偏移。
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公开(公告)号：US20100045362A1
公开(公告)日：2010-02-25
申请号：US12229525
申请日：2008-08-22
Applicant: Alexander Dribinsky , Gregory P. Pucci , Yongyao Cai , Mathew Varghese , Gary J. O'Brien
Inventor： Alexander Dribinsky , Gregory P. Pucci , Yongyao Cai , Mathew Varghese , Gary J. O'Brien
IPC: H01L35/00
CPC classification number: G01K3/14 , G01P15/008
Abstract: A system, device, and method for minimizing x-axis and/or y-axis offset shift due to internally produced as well as externally produced on chip temperature imbalances. At least one temperature gradient canceling device is disposed on a substrate including a temperature gradient sensitive device having at least one pair of sensors. Voltage signals generated by the temperature gradient canceling devices can be combined with voltage signals generated by each of the pair of sensors to account for the offset.
Abstract translation: 用于最小化由于内部产生的x轴和/或y轴偏移偏移以及外部产生的片上温度失衡的系统，装置和方法。 至少一个温度梯度消除装置设置在包括具有至少一对传感器的温度梯度敏感装置的基板上。 由温度梯度消除装置产生的电压信号可以与由一对传感器中的每一个生成的电压信号相组合以考虑偏移。
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19.发明授权Resonator system with a plurality of individual mechanically coupled resonators and method of making same 有权具有多个单独的机械耦合谐振器的谐振器系统及其制造方法公开(公告)号：US07312674B2
公开(公告)日：2007-12-25
申请号：US10946541
申请日：2004-09-21
Applicant: Amy Duwel , Luke Hohreiter , Joung-Mo Kang , Douglas W. White , David J. Carter , Mathew Varghese
Inventor： Amy Duwel , Luke Hohreiter , Joung-Mo Kang , Douglas W. White , David J. Carter , Mathew Varghese
IPC: H03H9/54
CPC classification number: H03H3/02 , H03H9/564 , H03H9/582 , H03H9/586 , H03H2003/027 , H03H2009/241 , Y10T29/42
Abstract: A resonator system wherein a plurality of resonators each including piezoelectric material are suspended relative to a substrate. An edge of each resonator is mechanically coupled to an edge of another resonator and the plurality of resonators expand and contract reaching resonance in response to an applied electric field.
Abstract translation: 一种谐振器系统，其中包括压电材料的多个谐振器相对于衬底悬挂。 每个谐振器的边缘机械耦合到另一个谐振器的边缘，并且多个谐振器响应于所施加的电场而扩大和收缩达到谐振。
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公开(公告)号：US07005946B2
公开(公告)日：2006-02-28
申请号：US10631695
申请日：2003-07-31
Applicant: Amy E. Duwel , David J. Carter , Mark J. Mescher , Mathew Varghese , Bernard M. Antkowiak , Marc S. Weinberg
Inventor： Amy E. Duwel , David J. Carter , Mark J. Mescher , Mathew Varghese , Bernard M. Antkowiak , Marc S. Weinberg
CPC classification number: H03H3/02 , H03H9/172 , H03H9/564 , H03H9/586 , H03H2003/027 , H03H2009/241 , H04R17/00 , Y10T29/42 , Y10T29/435
Abstract: A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.
Abstract translation: 一种纵模式谐振器，其包括相对于衬底悬挂的衬底和棒。 该杆被悬挂使得响应于其整个厚度上的电场的应用而使它自由地纵向膨胀和收缩。 棒的膨胀和收缩响应于具有与棒的基本频率基本相等的频率的场来实现谐振。
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