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公开(公告)号：US20110025350A1
公开(公告)日：2011-02-03
申请号：US11378596
申请日：2006-03-17
Applicant: Jason Vaughn Clark
Inventor： Jason Vaughn Clark
IPC: G01R27/26
CPC classification number: G01N27/22 , B81B2201/033 , B81C99/003
Abstract: This invention is a novel methodology for precision metrology, sensing, and actuation at the micro- and nano-scale. It is well-suited for tiny technology because it leverages off the electromechanical benefits of the scale. The invention makes use of electrical measurands of micro- or nano-scale devices to measure and characterize themselves, other devices, and whatever the devices subsequently interact with. By electronically measuring the change in capacitance, change in voltage, and/or resonant frequency of just a few simple test structures, a multitude of geometric, dynamic, and material properties may be extracted with a much higher precision than conventional methods.
Abstract translation: 本发明是用于精密计量，感测和在微尺度和纳米尺度下的致动的新颖方法。 它非常适合微小的技术，因为它利用了秤的机电效益。 本发明利用微尺度或纳米级装置的电测量来测量和表征其本身，其他装置以及随后的装置与之相互作用的任何装置。 通过电子测量仅仅几个简单测试结构的电容变化，电压变化和/或谐振频率，可以以比传统方法更高的精度提取多种几何，动态和材料特性。
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12.发明授权公开(公告)号：US07721587B2
公开(公告)日：2010-05-25
申请号：US12075503
申请日：2008-03-12
Applicant: Jason Vaughn Clark
Inventor： Jason Vaughn Clark
IPC: G01B3/30
CPC classification number: G01Q40/00
Abstract: An apparatus and method for improving the precision of nanoscale force and/or displacement measurements using electro micro metrology (EMM).
Abstract translation: 使用电微量测（EMM）提高纳米力和/或位移测量精度的装置和方法。
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13.发明申请Monolithic Comb Drive System and method for Large-Deflection Multi-Dof Microtransduction 失效大型多变量微转移单片梳驱动系统及方法公开(公告)号：US20100064395A1
公开(公告)日：2010-03-11
申请号：US12456759
申请日：2009-06-22
Applicant: Jason Vaughn Clark
Inventor： Jason Vaughn Clark
CPC classification number: G01Q40/00 , G01R1/06727
Abstract: A scanning probe microscope includes a plate moveable in an x-axis direction, a y-axis direction, and a z-axis direction, and a probe tip coupled to the plate. A plurality of actuators cooperate to move the probe tip with three degrees of freedom of movement.
Abstract translation: 扫描探针显微镜包括可在x轴方向，y轴方向和z轴方向上移动的板以及与板连接的探针头。 多个致动器协作以三个移动自由度来移动探针尖端。
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14.发明申请公开(公告)号：US20080245140A1
公开(公告)日：2008-10-09
申请号：US12075503
申请日：2008-03-12
Applicant: Jason Vaughn Clark
Inventor： Jason Vaughn Clark
IPC: G01B5/28
CPC classification number: G01Q40/00
Abstract: An apparatus and method for improving the precision of nanoscale force and/or displacement measurements using electro micro metrology (EMM).
Abstract translation: 使用电微量测（EMM）提高纳米力和/或位移测量精度的装置和方法。
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