NARROW TYPE INKJET PRINT HEAD CHIP
    11.
    发明申请

    公开(公告)号:US20210291523A1

    公开(公告)日:2021-09-23

    申请号:US17206816

    申请日:2021-03-19

    Abstract: A narrow type inkjet print head chip is disclosed and includes a silicon substrate, an active component layer and a passive component layer. The active component layer is stacked on the silicon substrate and includes plural ESD protection units, plural encoder switches, plural discharge protection units and plural heater switches. The ESD protection units, the encoder switches, the discharge protection units and the heater switches are disposed in each of at least two high-precision regions of the active component layer. The corresponding positions and quantities of these components are the same in the at least two high-precision regions. The passive component layer is stacked on the active component layer and includes plural heaters, plural electrode pads, plural encoders and plural circuit traces. The circuit traces are electrically connected to the ESD protection units, the encoder switches, the heater switches, the heaters, the electrode pads and the encoders.

    MICRO FLUID ACTUATOR
    13.
    发明申请

    公开(公告)号:US20200166155A1

    公开(公告)日:2020-05-28

    申请号:US16661060

    申请日:2019-10-23

    Abstract: A micro fluid actuator includes an orifice layer, a flow channel layer, a substrate, a chamber layer, a vibration layer, a lower electrode layer, a piezoelectric actuation layer and an upper electrode layer, which are stacked sequentially. An outflow aperture, a plurality of first inflow apertures and a second inflow aperture are formed in the substrate by an etching process. A storage chamber is formed in the chamber layer by the etching process. An outflow opening and an inflow opening are formed in the orifice layer by the etching process. An outflow channel, an inflow channel and a plurality of columnar structures are formed in the flow channel layer by a lithography process. By providing driving power which have different phases to the upper electrode layer and the lower electrode layer, the vibration layer is driven to displace in a reciprocating manner, so as to achieve fluid transportation.

    Narrow type inkjet print head chip
    15.
    发明授权

    公开(公告)号:US11440322B2

    公开(公告)日:2022-09-13

    申请号:US17206816

    申请日:2021-03-19

    Abstract: A narrow type inkjet print head chip is disclosed and includes a silicon substrate, an active component layer and a passive component layer. The active component layer is stacked on the silicon substrate and includes plural ESD protection units, plural encoder switches, plural discharge protection units and plural heater switches. The ESD protection units, the encoder switches, the discharge protection units and the heater switches are disposed in each of at least two high-precision regions of the active component layer. The corresponding positions and quantities of these components are the same in the at least two high-precision regions. The passive component layer is stacked on the active component layer and includes plural heaters, plural electrode pads, plural encoders and plural circuit traces. The circuit traces are electrically connected to the ESD protection units, the encoder switches, the heater switches, the heaters, the electrode pads and the encoders.

    Micro fluid actuator
    16.
    发明授权

    公开(公告)号:US11085554B2

    公开(公告)日:2021-08-10

    申请号:US16740839

    申请日:2020-01-13

    Abstract: A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.

    MICRO-ELECTROMECHANICAL SYSTEM PUMP
    17.
    发明申请

    公开(公告)号:US20200088185A1

    公开(公告)日:2020-03-19

    申请号:US16570352

    申请日:2019-09-13

    Abstract: A MEMS pump includes a first substrate, a first oxide layer, a second substrate, a second oxide layer, a third substrate and a piezoelectric element sequentially stacked to form the entire structure of the MEMS pump. The first substrate has a first thickness and at least one inlet aperture. The first oxide layer has at least one fluid inlet channel and a convergence chamber, wherein the fluid inlet channel communicates with the convergence chamber and the inlet aperture. The second substrate has a second thickness and a through hole, and the through hole is misaligned with the inlet aperture and communicates with the convergence chamber. The second oxide layer has a first chamber with a concave central portion. The third substrate has a third thickness and a plurality of gas flow channels, wherein the gas flow channels are misaligned with the through hole.

    FLUID TRANSPORTATION DEVICE
    18.
    发明申请

    公开(公告)号:US20180209410A1

    公开(公告)日:2018-07-26

    申请号:US15875451

    申请日:2018-01-19

    Abstract: A fluid transportation device comprises a valve main body, a valve chamber base, a valve membrane, an actuator and a cover body. The valve main body comprises an inlet passage and an outlet passage. The valve chamber base comprises an inlet valve passage, an outlet valve passage and a compressible chamber communicating therewith. The valve membrane is arranged between the valve main body and the valve chamber base, having two valve plates respectively form a valve switch structure which seal the inlet valve passage and the outlet valve passage. The actuator covers the compressible chamber. The cover body covers the actuator and has a plurality of screw holes, which are corresponding to the penetration holes of the valve main body, the valve chamber base and the actuator, and several locking elements are inserting the penetration holes and locked with the screw holes to assemble the fluid transportation device.

    Micro-electromechanical system pump

    公开(公告)号:US11536260B2

    公开(公告)日:2022-12-27

    申请号:US16570352

    申请日:2019-09-13

    Abstract: A MEMS pump includes a first substrate, a first oxide layer, a second substrate, a second oxide layer, a third substrate and a piezoelectric element sequentially stacked to form the entire structure of the MEMS pump. The first substrate has a first thickness and at least one inlet aperture. The first oxide layer has at least one fluid inlet channel and a convergence chamber, wherein the fluid inlet channel communicates with the convergence chamber and the inlet aperture. The second substrate has a second thickness and a through hole, and the through hole is misaligned with the inlet aperture and communicates with the convergence chamber. The second oxide layer has a first chamber with a concave central portion. The third substrate has a third thickness and a plurality of gas flow channels, wherein the gas flow channels are misaligned with the through hole.

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