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公开(公告)号:US20210291523A1
公开(公告)日:2021-09-23
申请号:US17206816
申请日:2021-03-19
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han
IPC: B41J2/14
Abstract: A narrow type inkjet print head chip is disclosed and includes a silicon substrate, an active component layer and a passive component layer. The active component layer is stacked on the silicon substrate and includes plural ESD protection units, plural encoder switches, plural discharge protection units and plural heater switches. The ESD protection units, the encoder switches, the discharge protection units and the heater switches are disposed in each of at least two high-precision regions of the active component layer. The corresponding positions and quantities of these components are the same in the at least two high-precision regions. The passive component layer is stacked on the active component layer and includes plural heaters, plural electrode pads, plural encoders and plural circuit traces. The circuit traces are electrically connected to the ESD protection units, the encoder switches, the heater switches, the heaters, the electrode pads and the encoders.
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公开(公告)号:US10800653B2
公开(公告)日:2020-10-13
申请号:US16661508
申请日:2019-10-23
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Chang-Yen Tsai
Abstract: A manufacturing method of micro channel structure is disclosed and includes steps of: providing a substrate; depositing and etching to form a first insulation layer; depositing and etching to form a supporting layer; depositing and etching to form a valve layer; depositing and etching to form a second insulation layer; depositing and etching to form a vibration layer, a lower electrode layer and a piezoelectric actuating layer; providing a photoresist layer and depositing and etching to form a plurality of bonding pads; depositing and etching to from a mask layer; etching to form a first chamber; and etching to form a second chamber.
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公开(公告)号:US20200166155A1
公开(公告)日:2020-05-28
申请号:US16661060
申请日:2019-10-23
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Hsuan-Kai Chen
Abstract: A micro fluid actuator includes an orifice layer, a flow channel layer, a substrate, a chamber layer, a vibration layer, a lower electrode layer, a piezoelectric actuation layer and an upper electrode layer, which are stacked sequentially. An outflow aperture, a plurality of first inflow apertures and a second inflow aperture are formed in the substrate by an etching process. A storage chamber is formed in the chamber layer by the etching process. An outflow opening and an inflow opening are formed in the orifice layer by the etching process. An outflow channel, an inflow channel and a plurality of columnar structures are formed in the flow channel layer by a lithography process. By providing driving power which have different phases to the upper electrode layer and the lower electrode layer, the vibration layer is driven to displace in a reciprocating manner, so as to achieve fluid transportation.
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公开(公告)号:US12005711B2
公开(公告)日:2024-06-11
申请号:US17205297
申请日:2021-03-18
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han
IPC: B41J2/16
CPC classification number: B41J2/1635 , B41J2/162
Abstract: The method of the present disclosure includes steps of: (S1) providing a silicon substrate; (S2) arranging and disposing an active component layer by utilizing a first type photomask on at least two high-precision regions of each of a plurality of inkjet print head chip regions on the silicon substrate; (S3) arranging and disposing a passive component layer by utilizing a second type photomask on the active component layer; and (S4) cutting the silicon substrate according to the inkjet print head chip regions so as to form the plurality of narrow type inkjet print head chips.
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公开(公告)号:US11440322B2
公开(公告)日:2022-09-13
申请号:US17206816
申请日:2021-03-19
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han
IPC: B41J2/14
Abstract: A narrow type inkjet print head chip is disclosed and includes a silicon substrate, an active component layer and a passive component layer. The active component layer is stacked on the silicon substrate and includes plural ESD protection units, plural encoder switches, plural discharge protection units and plural heater switches. The ESD protection units, the encoder switches, the discharge protection units and the heater switches are disposed in each of at least two high-precision regions of the active component layer. The corresponding positions and quantities of these components are the same in the at least two high-precision regions. The passive component layer is stacked on the active component layer and includes plural heaters, plural electrode pads, plural encoders and plural circuit traces. The circuit traces are electrically connected to the ESD protection units, the encoder switches, the heater switches, the heaters, the electrode pads and the encoders.
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公开(公告)号:US11085554B2
公开(公告)日:2021-08-10
申请号:US16740839
申请日:2020-01-13
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Hsuan-Kai Chen
Abstract: A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.
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公开(公告)号:US20200088185A1
公开(公告)日:2020-03-19
申请号:US16570352
申请日:2019-09-13
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor: Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Chang-Yen Tsai
IPC: F04B43/04 , H01L41/083
Abstract: A MEMS pump includes a first substrate, a first oxide layer, a second substrate, a second oxide layer, a third substrate and a piezoelectric element sequentially stacked to form the entire structure of the MEMS pump. The first substrate has a first thickness and at least one inlet aperture. The first oxide layer has at least one fluid inlet channel and a convergence chamber, wherein the fluid inlet channel communicates with the convergence chamber and the inlet aperture. The second substrate has a second thickness and a through hole, and the through hole is misaligned with the inlet aperture and communicates with the convergence chamber. The second oxide layer has a first chamber with a concave central portion. The third substrate has a third thickness and a plurality of gas flow channels, wherein the gas flow channels are misaligned with the through hole.
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公开(公告)号:US20180209410A1
公开(公告)日:2018-07-26
申请号:US15875451
申请日:2018-01-19
Applicant: Microjet Technology Co., Ltd.
Inventor: Shih-Chang Chen , Jia-Yu Liao , Ying-Lun Chang , Rong-Ho Yu , Chi-Feng Huang , Yung-Lung Han
CPC classification number: F04B43/046 , F04B17/003 , F04B19/006 , F04B19/20 , F04B53/16 , H01L41/09
Abstract: A fluid transportation device comprises a valve main body, a valve chamber base, a valve membrane, an actuator and a cover body. The valve main body comprises an inlet passage and an outlet passage. The valve chamber base comprises an inlet valve passage, an outlet valve passage and a compressible chamber communicating therewith. The valve membrane is arranged between the valve main body and the valve chamber base, having two valve plates respectively form a valve switch structure which seal the inlet valve passage and the outlet valve passage. The actuator covers the compressible chamber. The cover body covers the actuator and has a plurality of screw holes, which are corresponding to the penetration holes of the valve main body, the valve chamber base and the actuator, and several locking elements are inserting the penetration holes and locked with the screw holes to assemble the fluid transportation device.
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公开(公告)号:US11536260B2
公开(公告)日:2022-12-27
申请号:US16570352
申请日:2019-09-13
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor: Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Chang-Yen Tsai
IPC: F04B43/04 , H01L41/083
Abstract: A MEMS pump includes a first substrate, a first oxide layer, a second substrate, a second oxide layer, a third substrate and a piezoelectric element sequentially stacked to form the entire structure of the MEMS pump. The first substrate has a first thickness and at least one inlet aperture. The first oxide layer has at least one fluid inlet channel and a convergence chamber, wherein the fluid inlet channel communicates with the convergence chamber and the inlet aperture. The second substrate has a second thickness and a through hole, and the through hole is misaligned with the inlet aperture and communicates with the convergence chamber. The second oxide layer has a first chamber with a concave central portion. The third substrate has a third thickness and a plurality of gas flow channels, wherein the gas flow channels are misaligned with the through hole.
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公开(公告)号:US11204335B2
公开(公告)日:2021-12-21
申请号:US16012207
申请日:2018-06-19
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Ta-Wei Hsueh , Ying-Lun Chang , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Yung-Lung Han , Chi-Feng Huang
IPC: G01N27/407 , G01D21/02 , G01N33/00 , G01N1/22
Abstract: An actuating and sensing module includes a substrate, at least one sensor and at least one actuating device. The at least one sensor is disposed on the substrate. The at least one actuating device is disposed on the substrate, and has at least one guiding channel between the actuating device and the substrate. The at least one guiding channel is disposed on one side of the at least one sensor. When the at least one actuating device is enabled, a fluid is transferred to the at least one sensor through the at least one guiding channel, so that the fluid is sensed by the at least one sensor.
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