公开(公告)号：US11454232B2

公开(公告)日：2022-09-27

申请号：US16825100

申请日：2020-03-20

Applicant: MICROJET TECHNOLOGY CO., LTD.

Inventor： Hao-Jan Mou ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Chi-Feng Huang ,  Yung-Lung Han ,  Chun-Yi Kuo

IPC: F04B43/04 ,  H01L41/09 ,  F04B45/047

Abstract: A micro-electromechanical systems pump includes a first substrate, a first oxide layer, a second substrate, and a piezoelectric element. The first oxide layer is stacked on the first substrate. The second substrate is combined with the first substrate, and the second substrate includes a silicon wafer layer, a second oxide layer, and a silicon material layer. The silicon wafer layer has an actuation portion. The actuation portion is circular and has a maximum stress value and an actuation stress value. The second oxide layer is formed on the silicon wafer layer. The silicon material layer is located at the second oxide layer and is combined with the first oxide layer. The piezoelectric element is stacked on the actuation portion, and has a piezoelectric stress value. The maximum stress value is greater than the actuation stress value, and the actuation stress value is greater than the piezoelectric stress value.

公开(公告)号：US20200182233A1

公开(公告)日：2020-06-11

申请号：US16689755

申请日：2019-11-20

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Chi-Feng Huang ,  Yung-Lung Han ,  Chun-Yi Kuo

IPC: F04B43/04 ,  B81B7/00

Abstract: A MEMS pump module includes a microprocessor and a MEMS chip. The microprocessor outputs a constant voltage and a variable voltage. The MEMS chip includes a chip body, a plurality of MEMS pumps and at least one common electrode. The plurality of MEMS pumps are disposed on the chip body, and each MEMS pump includes a first electrode and a second electrode. The at least one common electrode is disposed on the chip body and electrically connected to the second electrodes of the plurality of MEMS pumps. The microprocessor is electrically connected to the first electrodes of the plurality of MEMS pumps and the at least one common electrode so as to transmit the constant voltage to the at least one common electrode and transmit the variable voltage to the first electrodes of the plurality of MEMS pumps.

公开(公告)号：US11536394B2

公开(公告)日：2022-12-27

申请号：US16661060

申请日：2019-10-23

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Chi-Feng Huang ,  Yung-Lung Han ,  Hsuan-Kai Chen

IPC: B81C1/00 ,  F16K99/00

Abstract: A micro fluid actuator includes an orifice layer, a flow channel layer, a substrate, a chamber layer, a vibration layer, a lower electrode layer, a piezoelectric actuation layer and an upper electrode layer, which are stacked sequentially. An outflow aperture, a plurality of first inflow apertures and a second inflow aperture are formed in the substrate by an etching process. A storage chamber is formed in the chamber layer by the etching process. An outflow opening and an inflow opening are formed in the orifice layer by the etching process. An outflow channel, an inflow channel and a plurality of columnar structures are formed in the flow channel layer by a lithography process. By providing driving power which have different phases to the upper electrode layer and the lower electrode layer, the vibration layer is driven to displace in a reciprocating manner, so as to achieve fluid transportation.

公开(公告)号：US10883487B2

公开(公告)日：2021-01-05

申请号：US16053195

申请日：2018-08-02

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Ta-Wei Hsueh ,  Ying-Lun Chang ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Yung-Lung Han ,  Chi-Feng Huang

IPC: F04B43/04 ,  F04B53/20 ,  F04B45/047

Abstract: A micro-electromechanical fluid control device includes at least one flow guiding unit. The at least one flow guiding unit includes an inlet plate, a substrate, a resonance membrane, an actuating membrane and an outlet plate sequentially stacked. A first chamber is defined between the resonance membrane and the actuating membrane and a second chamber is defined between the actuating membrane and the outlet plate. While the piezoelectric membrane of the flow guiding unit drives the actuating membrane, a fluid is inhaled into the convergence chamber via the inlet of the inlet plate, transported into the first chamber via the central aperture of the resonance membrane, transported into the second chamber via a vacant space of the actuating membrane, and discharged out from the outlet of the outlet plate, so as to control the fluid to flow.

公开(公告)号：US20200309111A1

公开(公告)日：2020-10-01

申请号：US16825100

申请日：2020-03-20

Applicant: MICROJET TECHNOLOGY CO., LTD.

Inventor： Hao-Jan Mou ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Chi-Feng Huang ,  Yung-Lung Han ,  Chun-Yi Kuo

IPC: F04B43/04 ,  H01L41/09

Abstract: A micro-electromechanical systems pump includes a first substrate, a first oxide layer, a second substrate, and a piezoelectric element. The first oxide layer is stacked on the first substrate. The second substrate is combined with the first substrate, and the second substrate includes a silicon wafer layer, a second oxide layer, and a silicon material layer. The silicon wafer layer has an actuation portion. The actuation portion is circular and has a maximum stress value and an actuation stress value. The second oxide layer is formed on the silicon wafer layer. The silicon material layer is located at the second oxide layer and is combined with the first oxide layer. The piezoelectric element is stacked on the actuation portion, and has a piezoelectric stress value. The maximum stress value is greater than the actuation stress value, and the actuation stress value is greater than the piezoelectric stress value.

公开(公告)号：US20200224791A1

公开(公告)日：2020-07-16

申请号：US16740839

申请日：2020-01-13

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Chi-Feng Huang ,  Yung-Lung Han ,  Hsuan-Kai Chen

IPC: F16K99/00 ,  B81C1/00

Abstract: A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.

公开(公告)号：US12005711B2

公开(公告)日：2024-06-11

申请号：US17205297

申请日：2021-03-18

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Chi-Feng Huang ,  Yung-Lung Han

IPC: B41J2/16

CPC classification number: B41J2/1635 ,  B41J2/162

Abstract: The method of the present disclosure includes steps of: (S1) providing a silicon substrate; (S2) arranging and disposing an active component layer by utilizing a first type photomask on at least two high-precision regions of each of a plurality of inkjet print head chip regions on the silicon substrate; (S3) arranging and disposing a passive component layer by utilizing a second type photomask on the active component layer; and (S4) cutting the silicon substrate according to the inkjet print head chip regions so as to form the plurality of narrow type inkjet print head chips.

公开(公告)号：US11440322B2

公开(公告)日：2022-09-13

申请号：US17206816

申请日：2021-03-19

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Chi-Feng Huang ,  Yung-Lung Han

IPC: B41J2/14

Abstract: A narrow type inkjet print head chip is disclosed and includes a silicon substrate, an active component layer and a passive component layer. The active component layer is stacked on the silicon substrate and includes plural ESD protection units, plural encoder switches, plural discharge protection units and plural heater switches. The ESD protection units, the encoder switches, the discharge protection units and the heater switches are disposed in each of at least two high-precision regions of the active component layer. The corresponding positions and quantities of these components are the same in the at least two high-precision regions. The passive component layer is stacked on the active component layer and includes plural heaters, plural electrode pads, plural encoders and plural circuit traces. The circuit traces are electrically connected to the ESD protection units, the encoder switches, the heater switches, the heaters, the electrode pads and the encoders.

公开(公告)号：US11085554B2

公开(公告)日：2021-08-10

申请号：US16740839

申请日：2020-01-13

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Chi-Feng Huang ,  Yung-Lung Han ,  Hsuan-Kai Chen

IPC: F16K99/00 ,  B81C1/00

Abstract: A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.

公开(公告)号：US20200088185A1

公开(公告)日：2020-03-19

申请号：US16570352

申请日：2019-09-13

Applicant: MICROJET TECHNOLOGY CO., LTD.

Inventor： Hao-Jan Mou ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Chi-Feng Huang ,  Yung-Lung Han ,  Chang-Yen Tsai

IPC: F04B43/04 ,  H01L41/083

Abstract: A MEMS pump includes a first substrate, a first oxide layer, a second substrate, a second oxide layer, a third substrate and a piezoelectric element sequentially stacked to form the entire structure of the MEMS pump. The first substrate has a first thickness and at least one inlet aperture. The first oxide layer has at least one fluid inlet channel and a convergence chamber, wherein the fluid inlet channel communicates with the convergence chamber and the inlet aperture. The second substrate has a second thickness and a through hole, and the through hole is misaligned with the inlet aperture and communicates with the convergence chamber. The second oxide layer has a first chamber with a concave central portion. The third substrate has a third thickness and a plurality of gas flow channels, wherein the gas flow channels are misaligned with the through hole.