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公开(公告)号：US11454232B2
公开(公告)日：2022-09-27
申请号：US16825100
申请日：2020-03-20
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Chun-Yi Kuo
IPC: F04B43/04 , H01L41/09 , F04B45/047
Abstract: A micro-electromechanical systems pump includes a first substrate, a first oxide layer, a second substrate, and a piezoelectric element. The first oxide layer is stacked on the first substrate. The second substrate is combined with the first substrate, and the second substrate includes a silicon wafer layer, a second oxide layer, and a silicon material layer. The silicon wafer layer has an actuation portion. The actuation portion is circular and has a maximum stress value and an actuation stress value. The second oxide layer is formed on the silicon wafer layer. The silicon material layer is located at the second oxide layer and is combined with the first oxide layer. The piezoelectric element is stacked on the actuation portion, and has a piezoelectric stress value. The maximum stress value is greater than the actuation stress value, and the actuation stress value is greater than the piezoelectric stress value.
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公开(公告)号：US20200182233A1
公开(公告)日：2020-06-11
申请号：US16689755
申请日：2019-11-20
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Chun-Yi Kuo
Abstract: A MEMS pump module includes a microprocessor and a MEMS chip. The microprocessor outputs a constant voltage and a variable voltage. The MEMS chip includes a chip body, a plurality of MEMS pumps and at least one common electrode. The plurality of MEMS pumps are disposed on the chip body, and each MEMS pump includes a first electrode and a second electrode. The at least one common electrode is disposed on the chip body and electrically connected to the second electrodes of the plurality of MEMS pumps. The microprocessor is electrically connected to the first electrodes of the plurality of MEMS pumps and the at least one common electrode so as to transmit the constant voltage to the at least one common electrode and transmit the variable voltage to the first electrodes of the plurality of MEMS pumps.
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公开(公告)号：US09611843B2
公开(公告)日：2017-04-04
申请号：US14272272
申请日：2014-05-07
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Ta-Wei Hsueh , Ying-Lun Chang , Hsiang-Dyi Wu , Rong-Ho Yu , Shih-Chang Chen , Tsung-Pat Chou , Yau-Ji Lee , Jia-Yu Liao
CPC classification number: F04B43/046 , F04B49/22
Abstract: A micro-gas pressure driving apparatus includes a miniature gas transportation module and a miniature valve module. The miniature gas transportation module includes a gas inlet plate, a fluid channel plate, a resonance membrane and a piezoelectric actuator. A first chamber is defined between the resonance membrane and the piezoelectric actuator. After the piezoelectric actuator is activated to feed a gas through the gas inlet plate, the gas is transferred to the first chamber through the fluid channel plate and the resonance membrane and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve module includes a gas collecting plate, a valve membrane and a gas outlet plate. After the gas is transferred from the miniature gas transportation module to the gas-collecting chamber, the gas is transferred in one direction, so that a pressure-collecting operation or a pressure-releasing operation is selectively performed.
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公开(公告)号：US11536394B2
公开(公告)日：2022-12-27
申请号：US16661060
申请日：2019-10-23
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Hsuan-Kai Chen
Abstract: A micro fluid actuator includes an orifice layer, a flow channel layer, a substrate, a chamber layer, a vibration layer, a lower electrode layer, a piezoelectric actuation layer and an upper electrode layer, which are stacked sequentially. An outflow aperture, a plurality of first inflow apertures and a second inflow aperture are formed in the substrate by an etching process. A storage chamber is formed in the chamber layer by the etching process. An outflow opening and an inflow opening are formed in the orifice layer by the etching process. An outflow channel, an inflow channel and a plurality of columnar structures are formed in the flow channel layer by a lithography process. By providing driving power which have different phases to the upper electrode layer and the lower electrode layer, the vibration layer is driven to displace in a reciprocating manner, so as to achieve fluid transportation.
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公开(公告)号：US10883487B2
公开(公告)日：2021-01-05
申请号：US16053195
申请日：2018-08-02
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ta-Wei Hsueh , Ying-Lun Chang , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Yung-Lung Han , Chi-Feng Huang
IPC: F04B43/04 , F04B53/20 , F04B45/047
Abstract: A micro-electromechanical fluid control device includes at least one flow guiding unit. The at least one flow guiding unit includes an inlet plate, a substrate, a resonance membrane, an actuating membrane and an outlet plate sequentially stacked. A first chamber is defined between the resonance membrane and the actuating membrane and a second chamber is defined between the actuating membrane and the outlet plate. While the piezoelectric membrane of the flow guiding unit drives the actuating membrane, a fluid is inhaled into the convergence chamber via the inlet of the inlet plate, transported into the first chamber via the central aperture of the resonance membrane, transported into the second chamber via a vacant space of the actuating membrane, and discharged out from the outlet of the outlet plate, so as to control the fluid to flow.
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Patent Agency Ranking
公开(公告)号：US20200309111A1
公开(公告)日：2020-10-01
申请号：US16825100
申请日：2020-03-20
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Chun-Yi Kuo
Abstract: A micro-electromechanical systems pump includes a first substrate, a first oxide layer, a second substrate, and a piezoelectric element. The first oxide layer is stacked on the first substrate. The second substrate is combined with the first substrate, and the second substrate includes a silicon wafer layer, a second oxide layer, and a silicon material layer. The silicon wafer layer has an actuation portion. The actuation portion is circular and has a maximum stress value and an actuation stress value. The second oxide layer is formed on the silicon wafer layer. The silicon material layer is located at the second oxide layer and is combined with the first oxide layer. The piezoelectric element is stacked on the actuation portion, and has a piezoelectric stress value. The maximum stress value is greater than the actuation stress value, and the actuation stress value is greater than the piezoelectric stress value.
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公开(公告)号：US20200224791A1
公开(公告)日：2020-07-16
申请号：US16740839
申请日：2020-01-13
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Hsuan-Kai Chen
Abstract: A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.
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公开(公告)号：US20140377099A1
公开(公告)日：2014-12-25
申请号：US14272272
申请日：2014-05-07
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Ta-Wei Hsueh , Ying-Lun Chang , Hsiang-Dyi Wu , Rong-Ho Yu , Shih-Chang Chen , Tsung-Pat Chou , Yau-Ji Lee , Jia-Yu Liao
CPC classification number: F04B43/046 , F04B49/22
Abstract: A micro-gas pressure driving apparatus includes a miniature gas transportation module and a miniature valve module. The miniature gas transportation module includes a gas inlet plate, a fluid channel plate, a resonance membrane and a piezoelectric actuator. A first chamber is defined between the resonance membrane and the piezoelectric actuator. After the piezoelectric actuator is activated to feed a gas through the gas inlet plate, the gas is transferred to the first chamber through the fluid channel plate and the resonance membrane and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve module includes a gas collecting plate, a valve membrane and a gas outlet plate. After the gas is transferred from the miniature gas transportation module to the gas-collecting chamber, the gas is transferred in one direction, so that a pressure-collecting operation or a pressure-releasing operation is selectively performed.
Abstract translation: 微型气体压力驱动装置包括微型气体输送模块和微型阀模块。 微型气体输送模块包括气体入口板，流体通道板，共振膜和压电致动器。 在共振膜和压电致动器之间限定第一腔室。 在激活压电致动器以通过气体入口板供给气体之后，气体通过流体通道板和共振膜转移到第一室，然后向下传送。 因此，产生压力梯度以连续地推动气体。 微型阀模块包括气体收集板，阀膜和气体出口板。 在气体从微型气体输送模块传送到气体收集室之后，气体沿一个方向传送，从而选择性地执行压力收集操作或压力释放操作。
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公开(公告)号：US11478794B2
公开(公告)日：2022-10-25
申请号：US16660890
申请日：2019-10-23
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Chun-Yi Kuo
Abstract: A micro channel structure includes a substrate, a supporting layer, a valve layer, a second insulation layer, a vibration layer and a bonding-pad layer. A flow channel is formed on the substrate. A conductive part and a movable part are formed on the supporting layer and the valve layer, respectively. A first chamber is formed at the interior of a base part and communicates to the hollow aperture. A supporting part is formed on the second insulation layer. A second chamber is formed at the interior of the supporting layer and communicates to the first chamber through the hollow aperture. A suspension part is formed on the vibration layer. By providing driving power sources having different phases to the bonding-pad layer, the suspension part moves upwardly and downwardly, and a relative displacement is generated between the movable part and the conductive part, to achieve fluid transportation.
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公开(公告)号：US11359618B2
公开(公告)日：2022-06-14
申请号：US16110204
申请日：2018-08-23
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chang-Yen Tsai
IPC: F04B43/02 , F04B43/04 , F04B43/00 , F04B49/06 , F04B45/047 , G05D7/06 , H01L41/09 , H01L41/318 , H01L41/04 , F16K99/00
Abstract: The present disclosure provides a control method of a fluid device. The control method includes the steps of (a) providing the fluid device, which includes a plurality of flow guiding units manufactured by a micro-electro-mechanical-system process; (b) dividing the flow guiding units into a plurality of groups, which are electrically connected to and controlled by a control module; and (c) generating a driving signal by the control module for a corresponding one of the groups, wherein the control module generates a high level signal to a specific one of the groups, so that the flow guiding units of the specific one of the groups are driven to transport fluid, and thereby controlling the fluid device to discharge a specific amount of fluid.
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