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公开(公告)号：US09459099B2
公开(公告)日：2016-10-04
申请号：US13956147
申请日：2013-07-31
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Cenk Acar , Ravindra V. Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
IPC: G01C19/5769 , G01C19/5712 , G01C19/5747 , G01P15/08 , G01P15/125 , G01P15/18 , G01C25/00
CPC classification number: G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.
Abstract translation: 本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。 这种陀螺仪可以包括检测框架，设置在感测框架外部的检测质量块，一对锚固件和多个驱动梁。 多个驱动梁可以设置在感测框架的相对侧之间并且在一对锚固件之间。 驱动梁可将感应框架连接到检测质量块。 驱动梁可以被配置成基本上在驱动梁的第一平面中引起防弹块的扭转振荡。 感测框架可以与证明质量块的驱动运动基本上分离。 这样的设备可以被包括在诸如移动显示设备的移动设备中。
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公开(公告)号：US20140146435A1
公开(公告)日：2014-05-29
申请号：US13686524
申请日：2012-11-27
Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.
Inventor： Philip Jason Stephanou , Ming-Hau Tung , Ravindra V. Shenoy
Abstract: This disclosure provides systems, methods and apparatus for providing an in-plane electromechanical systems (EMS) varactor. In one aspect, the in-plane EMS varactor may include in-plane relative translation between a second portion and a first portion. Such translation may cause a change in a gap or overlap between first electrodes that remain fixed with respect to the first portion and second electrodes that remain fixed with respect to the second portion that may cause a change in capacitance between the first and second electrodes. In some implementations, the configuration of the second portion and the first portion may be either of two mechanically bi-stable states.
Abstract translation: 本公开提供了用于提供平面内机电系统（EMS）变容二极管的系统，方法和装置。 在一个方面，面内EMS变容二极管可以包括在第二部分和第一部分之间的面内相对平移。 这种平移可能导致相对于第一部分保持固定的第一电极之间的间隙或重叠的变化，以及相对于第二部分保持固定的第二电极可能导致第一和第二电极之间的电容变化。 在一些实施方式中，第二部分和第一部分的配置可以是两个机械双稳态。
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公开(公告)号：US20140125432A1
公开(公告)日：2014-05-08
申请号：US13667918
申请日：2012-11-02
Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.
Inventor： Philip Jason Stephanou , Chengjie Zuo , Changhan Hobie Yun , Sang-June Park , Charles Chengyea Leu , Jonghae Kim , Ravindra V. Shenoy
CPC classification number: H03H9/02149 , H03H3/02 , H03H2003/021 , H03H2003/025 , H03H2003/028 , Y10T29/42
Abstract: This disclosure provides implementations of methods, apparatus and systems for producing acoustic wave devices and for selectively modifying one or more acoustic or electromechanical characteristics of such devices. In one aspect, a method includes depositing a structural layer over a substrate. The structural layer includes a plurality of structural portions, each being positioned over a corresponding device region. The method also includes arranging a mask layer over the structural layer. The mask layer includes a plurality of mask portions, each including a number of mask openings that expose a corresponding region of the structural portion. The method also includes accelerating dopant particles toward the mask layer. The accelerated dopant particles that proceed through the mask openings are impacted into the corresponding structural portion. The impacted dopant particles modify material properties in the structural portion, which then effect a change in the acoustic or electromechanical characteristics of the acoustic wave device.
Abstract translation: 本公开提供了用于产生声波装置并用于选择性地修改这种装置的一个或多个声学或机电特性的方法，装置和系统的实现。 一方面，一种方法包括在衬底上沉积结构层。 结构层包括多个结构部分，每个结构部分位于相应的装置区域上。 该方法还包括在结构层上布置掩模层。 掩模层包括多个掩模部分，每个掩模部分包括暴露结构部分的对应区域的多个掩模开口。 该方法还包括向掩模层加速掺杂剂颗粒。 进入掩模开口的加速掺杂剂颗粒被冲击到相应的结构部分。 受影响的掺杂剂颗粒改变结构部分中的材料性质，其然后影响声波装置的声学或机电特性的变化。
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公开(公告)号：US20140104288A1
公开(公告)日：2014-04-17
申请号：US13682337
申请日：2012-11-20
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Ravindra V. Shenoy , Jitae Kim , Kwan-yu Lai , Jon Bradley Lasiter , Philip Jason Stephanou , Donald William Kidwell , Evgeni Petrovich Gousev
CPC classification number: H01F27/06 , G09G3/3466 , G09G5/00 , H01F17/0033 , H01F21/00 , H01F41/005 , H01F41/041 , H01F41/046 , Y10T29/49165 , Y10T156/1057
Abstract: This disclosure provides systems, methods, and apparatus for through substrate via inductors. In one aspect, a cavity is defined in a glass substrate. At least two metal bars are in the cavity. A first end of each metal bar is proximate a first surface of the substrate, and a second end of each metal bar is proximate a second surface of the substrate. A metal trace connects a first metal bar and a second metal bar. In some instances, one or more dielectric layers can be disposed on surfaces of the substrate. In some instances, the metal bars and the metal trace define an inductor. The inductor can have a degree of flexibility corresponding to a variable inductance. Metal turns can be arranged in a solenoidal or toroidal configuration. The toroidal inductor can have tapered traces and/or thermal ground planes. Transformers and resonator circuitry can be realized.
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公开(公告)号：US10115671B2
公开(公告)日：2018-10-30
申请号：US13748294
申请日：2013-01-23
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Ravindra V. Shenoy , Kwan-Yu Lai , Philip Jason Stephanou , Mario Francisco Velez , Jonghae Kim , Evgeni Petrovich Gousev
IPC: H01L23/538 , G09G3/3266 , H01L25/00 , H01L23/15 , H01L23/498 , H01L21/48 , H01L25/10 , H01L23/31 , H01L23/50
Abstract: This disclosure provides systems, methods and apparatus for glass via bars that can be used in compact three-dimensional packages, including package-on-packages (PoPs). The glass via bars can provide high density electrical interconnections in the PoPs. In some implementations, the glass via bars can include integrated passive components. Packaging methods employing glass via bars are also provided.
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Patent Agency Ranking
公开(公告)号：US20170125660A1
公开(公告)日：2017-05-04
申请号：US15404989
申请日：2017-01-12
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Philip Jason Stephanou , David William Burns , Ravindra V. Shenoy
IPC: H01L41/107 , H01L41/31 , G06F1/16 , H01L41/04
CPC classification number: H04R17/00 , G02B26/001 , G06F1/1626 , G06F1/1637 , H01L41/04 , H01L41/107 , H01L41/31 , H04R31/00 , H04R2201/003 , H04R2201/401 , H04R2499/15 , Y10T29/42
Abstract: This disclosure provides systems, methods and apparatus for microspeaker devices. In one aspect, a microspeaker element may include a deformable dielectric membrane that spans a speaker cavity. The deformable dielectric membrane can include a piezoactuator and a dielectric layer. Upon application of a driving signal to the piezoactuator, the dielectric layer can deflect, producing sound. In some implementations, an array of microspeaker elements can be encapsulated between a glass substrate and a cover glass. Sound generated by the microspeaker elements can be emitted through a speaker grill formed in the cover glass.
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公开(公告)号：US09410805B2
公开(公告)日：2016-08-09
申请号：US13956163
申请日：2013-07-31
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Cenk Acar , Ravindra V. Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
IPC: G01C19/5769 , G01C19/5712 , G01C19/5747 , G01P15/08 , G01P15/125 , G01P15/18 , G01C25/00
CPC classification number: G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.
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公开(公告)号：US09337799B2
公开(公告)日：2016-05-10
申请号：US13667918
申请日：2012-11-02
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Philip Jason Stephanou , Chengjie Zuo , Changhan Hobie Yun , Sang-June Park , Charles Chengyea Leu , Jonghae Kim , Ravindra V. Shenoy
CPC classification number: H03H9/02149 , H03H3/02 , H03H2003/021 , H03H2003/025 , H03H2003/028 , Y10T29/42
Abstract: This disclosure provides implementations of methods, apparatus and systems for producing acoustic wave devices and for selectively modifying one or more acoustic or electromechanical characteristics of such devices. In one aspect, a method includes depositing a structural layer over a substrate. The structural layer includes a plurality of structural portions, each being positioned over a corresponding device region. The method also includes arranging a mask layer over the structural layer. The mask layer includes a plurality of mask portions, each including a number of mask openings that expose a corresponding region of the structural portion. The method also includes accelerating dopant particles toward the mask layer. The accelerated dopant particles that proceed through the mask openings are impacted into the corresponding structural portion. The impacted dopant particles modify material properties in the structural portion, which then effect a change in the acoustic or electromechanical characteristics of the acoustic wave device.
Abstract translation: 本公开提供了用于产生声波装置并用于选择性地修改这种装置的一个或多个声学或机电特性的方法，装置和系统的实现。 一方面，一种方法包括在衬底上沉积结构层。 结构层包括多个结构部分，每个结构部分位于相应的装置区域上。 该方法还包括在结构层上布置掩模层。 掩模层包括多个掩模部分，每个掩模部分包括暴露结构部分的对应区域的多个掩模开口。 该方法还包括向掩模层加速掺杂剂颗粒。 进入掩模开口的加速掺杂剂颗粒被冲击到相应的结构部分。 受影响的掺杂剂颗粒改变结构部分中的材料性质，其然后影响声波装置的声学或机电特性的变化。
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公开(公告)号：US20140041174A1
公开(公告)日：2014-02-13
申请号：US14054617
申请日：2013-10-15
Applicant: QUALCOMM MEMS Technologies, Inc.
Inventor： Cenk Acar , Ravindra V. Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
IPC: G01C25/00
CPC classification number: G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive beams may connect the drive frame to the central anchor. The drive beams may include a piezoelectric layer and may be configured to cause the drive frame to oscillate torsionally in a plane of the drive beams. The gyroscope may also include a proof mass and a plurality of piezoelectric sense beams. At least some components may be formed from plated metal. The drive frame may be disposed within the proof mass. The drive beams may constrain the drive frame to rotate substantially in the plane of the drive beams. Such devices may be included in a mobile device, such as a mobile display device.
Abstract translation: 本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。 一些陀螺仪包括驱动框架，中心锚杆和设置在中心锚固件的相对侧上的多个驱动梁。 驱动梁可以将驱动框架连接到中心锚杆上。 驱动梁可以包括压电层，并且可以被配置为使得驱动框架在驱动梁的平面中扭转地摆动。 陀螺仪还可以包括检测质量块和多个压电感测光束。 至少一些组分可以由镀金属形成。 驱动框架可以设置在检验质量块内。 驱动梁可以限制驱动框架大致在驱动梁的平面内旋转。 这样的设备可以被包括在诸如移动显示设备的移动设备中。
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20.发明申请公开(公告)号：US20140035892A1
公开(公告)日：2014-02-06
申请号：US13748294
申请日：2013-01-23
Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.
Inventor： Ravindra V. Shenoy , Kwan-Yu Lai , Philip Jason Stephanou , Mario Francisco Velez , Jonghae Kim , Evgeni Petrovich Gousev
IPC: H01L23/538 , G09G3/32 , H01L25/00
CPC classification number: H01L23/5389 , G09G3/3266 , H01L21/486 , H01L23/15 , H01L23/3121 , H01L23/49827 , H01L23/49833 , H01L23/50 , H01L25/105 , H01L25/50 , H01L2224/16 , H01L2225/1023 , H01L2225/1041 , H01L2225/1058 , H01L2924/12044 , H01L2924/1461 , H01L2924/00
Abstract: This disclosure provides systems, methods and apparatus for glass via bars that can be used in compact three-dimensional packages, including package-on-packages (PoPs). The glass via bars can provide high density electrical interconnections in the PoPs. In some implementations, the glass via bars can include integrated passive components. Packaging methods employing glass via bars are also provided.
Abstract translation: 本公开提供了可用于紧凑三维封装（包括封装封装（PoP））的用于玻璃通孔条的系统，方法和装置。 玻璃通孔棒可以在PoP中提供高密度电连接。 在一些实施方案中，玻璃通孔棒可以包括集成的无源部件。 还提供了采用玻璃通孔条的包装方法。
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