Film forming equipment
    11.
    发明授权
    Film forming equipment 失效
    成膜设备

    公开(公告)号:US08056502B2

    公开(公告)日:2011-11-15

    申请号:US11885441

    申请日:2006-03-14

    Applicant: Tohru Takeuchi

    Inventor: Tohru Takeuchi

    Abstract: The present invention provides film forming equipment that can reduce the space necessary for coating. The film forming equipment has an object conveyor for moving an object (50); a spray gun conveyor (41) for moving a spray gun (30) that sprays a coating material; and a controller for controlling operations of the object conveyor (41), the spray gun (30), and the spray gun conveyor, wherein the controller moves the object (50) in a specific direction while spraying a coating material from the spray gun (30) and reciprocates the object (50) so that partial layer coating can be sequentially conducted, and while coating the object (50), the controller shifts the object (50) and the spray gun (30) while keeping the relative positions of the object and the spray gun to each other constant.

    Abstract translation: 本发明提供能够减少涂布所需空间的成膜设备。 成膜设备具有用于移动物体(50)的物体输送器。 用于移动喷枪(30)的喷枪输送机(41),其喷涂涂料; 以及用于控制对象输送机(41),喷枪(30)和喷枪输送机的操作的控制器,其中控制器在特定方向上移动物体(50),同时从喷枪喷涂涂料( 30),并且使物体(50)往复运动,使得可以顺序地进行部分层涂覆,并且在涂覆物体(50)的同时,控制器在保持物体(50)和喷枪(30)的相对位置的同时移动物体 物体和喷枪彼此恒定。

    Multi-color small amount painting system
    12.
    发明授权
    Multi-color small amount painting system 失效
    多色少量涂装系统

    公开(公告)号:US6071346A

    公开(公告)日:2000-06-06

    申请号:US87634

    申请日:1998-05-29

    CPC classification number: B05B12/1463 B05B13/0431 B05B9/03

    Abstract: A multi-color small amount painting system of the present invention stores small unit amounts of paint having a variety of paint colors and may selectively feed desired color paint to a painter of a painting robot or the like. The painting system stores the paint having a large number of paint colors in a stock unit in the form of paint cartridges. The paint cartridge of the paint color selected is picked up from the stock unit and carried by a carrier and is loaded on the painting robot or an automatic painting device. Subsequently, the paint within the paint cartridge loaded is fed to the painter of the painting robot or the automatic painting device by a paint feeding mechanism. In addition, the system ensure an advantage that the painting system is high in efficiency of painting work including the exchange of colors and is small in size as a whole.

    Abstract translation: 本发明的多色少量涂布系统存储具有各种油漆颜色的小单位量的油漆,并且可以选择性地将所需的彩色油漆供给到涂漆机器人等的画家。 绘画系统以油漆盒的形式将具有大量油漆颜色的油漆存放在坯料单元中。 所选择的涂料颜色的油漆盒从库存单元拾取并由承运人携带并装载在涂装机器人或自动涂装装置上。 随后,装载的油漆筒内的油漆通过涂料供给机构供给到涂装机器人的画家或自动涂装装置。 此外,该系统确保了绘画系统在涂色工作效率高,包括颜色交换和整体尺寸小的优点。

    Method of producing semiconductor device having multilayer conductive
lines
    13.
    发明授权
    Method of producing semiconductor device having multilayer conductive lines 失效
    具有多层导电线的半导体器件的制造方法

    公开(公告)号:US4816424A

    公开(公告)日:1989-03-28

    申请号:US928330

    申请日:1986-11-10

    Abstract: A triple-layer electrode structure or a multilayer interconnecting structure of a semiconductor device comprising a contact (a lower conductive) layer of aluminum or its alloy which comes into contact with a silicon substrate, a barrier layer of refractory metal nitride (e.g. titanium nitride) and refractory metal (e.g., tungsten), and a (upper) conductive layer of aluminum or its alloy. The TiN-W barrier layer prevents overdissolution of silicon into aluminum in spite of heat-treatment at a relatively elevated temperature. The barrier layer is formed by sintering a mixture of refractory metal nitride powder and refractory metal powder to form a target which is sputter deposited on the contact layer in an atomsphere excluding gaseous nitrogen.

    Abstract translation: 一种半导体器件的三层电极结构或多层互连结构,包括与硅衬底接触的铝或其合金的接触(下导电)层,难熔金属氮化物(例如氮化钛)的阻挡层, 和难熔金属(例如钨)和(上)导电层的铝或其合金。 尽管在相对较高的温度下进行热处理,TiN-W阻挡层防止硅过度溶解于铝中。 通过烧结耐火金属氮化物粉末和难熔金属粉末的混合物来形成阻挡层,以形成溅射沉积在不含气态氮的原子团中的接触层上的靶。

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