Mixer, and device and method for manufacturing thin-film

    公开(公告)号:US20040089235A1

    公开(公告)日:2004-05-13

    申请号:US10466324

    申请日:2003-07-29

    Abstract: A mixing box 1 comprises a stirring chamber 2 in which two gas-introduction pipes 5, 6 for introducing gases are arranged in such a manner that the gas-introduction inlets 5a, 6a thereof are opposed to one another and a diffusion chamber 3 for diffusing a gas mixture, wherein a partition plate 4 having a specific shape is positioned between the stirring chamber and the diffusion chamber in such a manner that the volume of the diffusion chamber is larger than that of the stirring chamber, wherein a gas-supply opening 7 is arranged, on the partition plate, at a desired position on the lower side of the direction perpendicular to the straight line connecting the two gas-introduction inlets, the box being able to uniformly admix gases having different masses and having a simple structure. The partition plate has a shape of a curve of second degree, which is convex with respect to the bottom of the mixing box. The present invention also relates to a thin film-manufacturing system equipped with the mixing box 1 and a method for preparing a film using a film-forming gas, which is uniformly admixed together in the mixing box. The present invention also relates to a thin film-manufacturing system, which has a simple structure and can be manufactured at a low cost and which also permits the inhibition of the generation of any turbulent flow, convection current and heat convection and the formation of a uniform gas stream of a mixed gas, wherein a stage 53 for placing a substrate thereon is disposed within the vacuum reactor 2 and a gas head 57 for supplying the film-forming gas to the central area on the top face of the vacuum reactor 2 is arranged in such a manner that the head is opposed to the stage 53. A cylindrical sleeve member 61 having a desired length is disposed while it comes in close contact with the side wall of the stage 53 to thus surround the periphery of the stage and the height of the stage can be established at the position at which the volume of a second space formed below the stage and connected to a vacuum discharge means is larger than that of the first space, in such a manner that an exhaust gas is isotropically discharged from a first space formed by the gas head and the upper face of the stage without causing any convection current therein through the interstice between the sleeve member and the inner wall surface constituting the reactor.

    Falling film plasma reactor
    15.
    发明申请
    Falling film plasma reactor 失效
    落膜等离子体反应器

    公开(公告)号:US20040055869A1

    公开(公告)日:2004-03-25

    申请号:US10645587

    申请日:2003-08-22

    Inventor: Robert R. Moore

    Abstract: A falling film plasma reactor (FFPR) provides a number of benefits for the treatment of process gases. The falling film plasma reactor uses high voltage alternating current or pulsed direct current which is applied to radially separated electrodes to thereby create a dielectric breakdown of the process gas that is flowing within the large radial gap between the two electrodes. Typical plasma reactors often utilize fixed dielectric construction which can result in potential failure of the device by arcing between the electrodes as portions of the dielectric fail. Such failures are prevented by using a dielectric liquid that constantly flows over the electrodes, or over a fixed dielectric barrier over the electrodes.

    Abstract translation: 降膜等离子体反应器(FFPR)为处理工艺气体提供了许多益处。 降膜等离子体反应器使用施加到径向分离的电极的高压交流电或脉冲直流电,从而产生在两个电极之间的大径向间隙内流动的工艺气体的电介质击穿。 典型的等离子体反应器通常采用固定的介电结构,这可能导致器件在电介质之间的电弧失效的电弧故障。 通过使用不断地流过电极的电介质液体,或在电极上方的固定电介质阻挡层上,可以防止这种故障。

    Liquid film producing process and apparatus for fluid-liquid contacting
    17.
    发明授权
    Liquid film producing process and apparatus for fluid-liquid contacting 失效
    液膜生产方法和液 - 液接触装置

    公开(公告)号:US5535989A

    公开(公告)日:1996-07-16

    申请号:US323914

    申请日:1994-12-02

    Applicant: Dipak K. Sen

    Inventor: Dipak K. Sen

    Abstract: Processess and apparatus are provided to generate and use continuous and controlled liquid film for industrial and commercial applications requiring fluid-liquid contacts. In one version, a housing has a bottom and a tray mounted therein. The tray separates an upper section for holding liquid from a lower section for liquid-fluid interaction. Uniformly spaced, thin, straight film guides in close proximity extend downwardly from the tray towards the bottom. A narrow slit is formed in the tray along each line of film guides for enabling liquid in the upper section to flow to the lower section in the form of a flowing liquid curtain. The fluid can be a gas entering and exiting the housing through ports provided therein. In a preferred embodiment, a vertically extending tubular member is mounted centrally within several closed loops of film guides and extends through the tray. An adjustable sleeve is mounted on top of the tubular member and the tops of the film guides are secured to this sleeve. The invention may be used in a liquid-gas contacting column that comprises an upright vessel with a liquid inlet at the top and liquid outlet in a bottom portion. A series of trays are mounted one above the other in the vessel.

    Abstract translation: 提供过程和设备以产生和使用需要流体 - 液体接触的工业和商业应用的连续和受控液膜。 在一个版本中,壳体具有安装在其中的底部和托盘。 托盘分离用于保持液体的上部用于液体 - 液体相互作用的下部。 均匀间隔的,细薄的,直接的薄膜导向器紧密地从托盘向下延伸到底部。 沿着每条胶片导向器,在托盘中形成狭窄的狭缝,以使上部液体能够以流动的液幕的形式流到下部。 流体可以是通过设置在其中的端口进入和离开壳体的气体。 在优选实施例中,垂直延伸的管状构件中心地安装在胶片引导件的几个闭合环中并延伸穿过托盘。 可调节的套筒安装在管状构件的顶部上,胶片引导件的顶部固定到该套筒上。 本发明可以用于液体 - 气体接触塔,其包括在顶部具有液体入口的直立容器和在底部中的液体出口。 一系列托盘一个在另一个托盘上安装。

    Film type alkylation process
    18.
    发明授权
    Film type alkylation process 失效
    薄膜型烷基化方法

    公开(公告)号:US5196626A

    公开(公告)日:1993-03-23

    申请号:US787185

    申请日:1991-11-04

    Abstract: The present invention includes an isoparaffin:olefin alkylation process and apparatus in which liquid acid inventory is reduced and temperature control is improved by reacting the isoparaffin:olefin feed with a thin film of liquid acid catalyst supported on a heat exchange surface.

    Abstract translation: 本发明包括异链烷烃:烯烃烷基化方法和其中通过使异链烷烃:烯烃进料与支撑在热交换表面上的液体酸催化剂薄膜反应来降低液态酸存量并提高温度控制的装置。

    Method for evaporating solvents and reacting components in compound
mixtures
    19.
    发明授权
    Method for evaporating solvents and reacting components in compound mixtures 失效
    蒸发溶剂和化合物混合物中组分反应的方法

    公开(公告)号:US4241043A

    公开(公告)日:1980-12-23

    申请号:US20288

    申请日:1979-03-14

    Applicant: Hartmut Hetzel

    Inventor: Hartmut Hetzel

    Abstract: The invention relates to a multiple phase flow tube for evaporating and reacting components in compound mixtures in which a spiral pipe is arranged within a multiple phase flow pipe. The components are propelled by means of an internally flowing gas stream in an annular shaped passage formed by a spiral tube and a second tube arranged as a core of the spiral tube. The second tube contains a heat exchange medium. The spiral tube is arranged within a cylindrical casing which contains a heat exchange medium. A gaseous stream of a reduced amount is then sufficient for carrying out the particular chemical process desired.

    Abstract translation: 本发明涉及一种用于蒸发和反应复合混合物中的组分的多相流管,其中螺旋管布置在多相流管内。 部件通过内部流动的气流在由螺旋管和布置为螺旋管的芯的第二管形成的环形通道中推进。 第二管含有热交换介质。 螺旋管布置在包含热交换介质的圆柱形壳体内。 减少量的气流足以进行所需的特定化学过程。

Patent Agency Ranking