Abstract:
Compounds, synthesis of, and methods for synthesizing metal alkoxide derivatives; and metal alkoxide derivatives for use as flame retardants are described. Group 13 metal alkoxides having flame retardant properties may be prepared by reacting the group 13 metal trihydroxide with an alcohol.
Abstract:
A technique for bonding an organic group with the surface of fine particles such as nanoparticles through strong linkage is provided, whereas such fine particles are attracting attention as materials essential for development of high-tech products because of various unique excellent characteristics and functions thereof. Organically modified metal oxide fine particles can be obtained by adapting high-temperature, high-pressure water as a reaction field to bond an organic matter with the surface of metal oxide fine particles through strong linkage. The use of the same condition enables not only the formation of metal oxide fine particles but also the organic modification of the formed fine particles. The resulting organically modified metal oxide fine particles exhibit excellent properties, characteristics and functions.
Abstract:
The present invention provides a vacuum chamber capable of simplifying the structure of the arrangement of a cooling passage. The vacuum chamber of the present invention includes a plurality of wall members, the plurality of the wall members are connected to each other to construct a chamber main body by connection portions where connection surfaces each of which is part of a surface of each wall member are hermetically connected to each other, and at least part of the connection portions are built-in gap type connection portions each of which has a gap extending along the corresponding connection surfaces inside the connection surfaces and in which peripheries of the connection surfaces are hermetically connected to each other by welding.
Abstract:
Compounds, synthesis of, and methods for synthesizing metal alkoxide derivatives; and metal alkoxide derivatives for use as flame retardants are described. Group 13 metal alkoxides having flame retardant properties may be prepared by reacting the group 13 metal trihydroxide with an alcohol.
Abstract:
A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
Abstract:
The present invention provides an improved automatic suction structure of a vacuum container. The structure includes a pumping unit, a power supply, a vacuum releaser and a vacuum detector. The structure allows for automatic air suction, automatic detection, safety power disconnection and continuous vacuuming as well as easy operation. The present invention guarantees improved quality and convenient operation.
Abstract:
A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
Abstract:
The invention relates to a method for the production of polymers by means of melt-phase polycondensation in at least one reaction step under vacuum. The vapor produced is drawn off by at least one steam jet vacuum pump with a downstream injection condenser from the reaction step. In order to improve the method, the steam jet vacuum pump is driven with alkylene carbonate in vapor form and liquid alkylene carbonate is supplied to the injection condenser as coolant.
Abstract:
Apparatus for producing a carbon structure at least including two electrodes and having forefront portions opposed to each other, and a power supply for applying a voltage between the electrodes and so that discharge plasma is produced in a discharge area between the electrodes and. The apparatus for producing a carbon structure further including a magnetic field generating unit to for forming at least a magnetic field including multidirectional lines of magnetic force or a magnetic field including a component parallel with the traveling direction of a discharge current, in an area where the discharge plasma is generated. In addition, a method for producing a carbon structure, using such an operation.
Abstract:
This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple. Furthermore, the dummy substrates used for dry cleaning and the substrates to be processed do not coexist, contamination of the substrates to be processed due to dust and remaining gas can be prevented and the production yield can be high.