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公开(公告)号：US12007556B2
公开(公告)日：2024-06-11
申请号：US17226242
申请日：2021-04-09
Applicant: STANLEY ELECTRIC CO., LTD.
Inventor： Atsuhiko Chikaoka
CPC classification number: G02B26/101 , B81B3/0021 , B81B3/0045 , B81B3/0062 , B81B7/008 , B81B7/02 , G02B26/0858 , B81B2201/042
Abstract: An light deflection device includes an light deflector having first and second piezoelectric actuators which cause a mirror unit to reciprocatingly turn around a resonant axis and a non-resonant axis, respectively, a drive unit which supplies first and second drive voltages, a swing angle fluctuation width detection unit which detects a first swing angle fluctuation width of the mirror unit around the resonant axis, a sensitivity equivalent value detection unit which detects a sensitivity equivalent value on the basis of a detected value of a second drive voltage fluctuation width and a detected value of the first swing angle fluctuation width, and a determination unit which determines whether a non-resonant axis side swing state of the mirror unit around the non-resonant axis is normal on the basis of a detected value of the sensitivity equivalent value.
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公开(公告)号：US11970389B2
公开(公告)日：2024-04-30
申请号：US17267144
申请日：2019-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki Suzuki
CPC classification number: B81B3/0045 , G02B26/0833 , B81B2201/042 , B81B2207/07
Abstract: An actuator device includes a support portion; a first movable portion; a second movable portion; a first connection portion that connects the first and second movable portions such that the first movable portion is swingable around a first axis; a second connection portion that connects the second movable portion and the support portion such that the first movable portion is swingable around the first axis. Two natural angular frequencies ω1 and ω2 (where ω1
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公开(公告)号：US11952265B2
公开(公告)日：2024-04-09
申请号：US17725804
申请日：2022-04-21
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu Takimoto , Yuki Morinaga , Daiki Suzuki , Yoshihisa Warashina
CPC classification number: B81B7/0006 , B81B3/0075 , G02B26/08 , G02B26/085 , B81B2201/042 , B81B2201/045 , B81B2203/0154 , B81B2203/0181 , B81B2203/058 , B81B2207/07
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号：US11933966B2
公开(公告)日：2024-03-19
申请号：US17715639
申请日：2022-04-07
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Nicolo' Boni , Massimiliano Merli
CPC classification number: G02B26/0858 , B81B3/0021 , B81B2201/042
Abstract: Disclosed herein is a method of making a microelectromechanical (MEMS) device. The method includes, in a single structural layer, affixing a tiltable structure to an anchorage portion with first and second supporting arms extending between the anchorage portion and opposite sides of the tiltable structure, and forming first and second resonant piezoelectric actuation structures extending between a constraint portion of the first supporting arm and the anchorage portion, on opposite sides of the first supporting arm. The method further includes coupling a handling wafer underneath the structural layer to define a cavity therebetween, and forming a passivation layer over the structural layer, the passivation layer having contact openings defined therein for routing metal regions for electrical coupling to respective electrical contact pads, the electrical contact pads being electrically connected to the first and second resonant piezoelectric actuation structures.
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公开(公告)号：US11932529B2
公开(公告)日：2024-03-19
申请号：US16814001
申请日：2020-03-10
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Patrick Ian Oden , James Carl Baker , Sandra Zheng , William C. McDonald
CPC classification number: B81B3/001 , G02B26/0833 , G03F7/0035 , G03F7/16 , B81B2201/042 , B81C2201/0157
Abstract: In described examples, a microelectromechanical system (MEMS) includes a first element and a second element. The first element is mounted on a substrate and has a first contact surface. The second element is mounted on the substrate and has a second contact surface that protrudes from the second element to form an acute contact surface. The first element and/or the second element is/are operable to move in: a first direction, such that the first contact surface comes in contact with the second contact surface; and a second direction, such that the second contact surface separates from the first contact surface.
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Patent Agency Ranking
公开(公告)号：US20240083741A1
公开(公告)日：2024-03-14
申请号：US18460885
申请日：2023-09-05
Applicant: ROHM CO., LTD.
Inventor： Daisuke NISHINOHARA , Hideaki HASHIMOTO , Toma FUJITA
IPC: B81B3/00
CPC classification number: B81B3/0051 , B81B2201/0235 , B81B2201/0264 , B81B2201/042 , B81B2201/052 , B81B2203/0118 , B81B2203/0346
Abstract: The present disclosure provides a MEMS device having a movable portion. The MEMS device includes: a substrate; a recess, disposed in the substrate; the movable portion, hollowly supported in the recess; and a bump stop, hollowly supported in the recess and configured to restrict a movement of the movable portion by contacting the movable portion. The bump stop includes: a protruding portion, configured to contact the movable portion; and a shock absorbing portion, disposed between the protruding portion and the substrate and configured to absorb at least a part of an impact force applied to the protruding portion by elastic deformation.
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公开(公告)号：US11921283B2
公开(公告)日：2024-03-05
申请号：US17331639
申请日：2021-05-27
Applicant: FUNAI ELECTRIC CO., LTD.
Inventor： Kenichi Fujita , Kenji Tanehashi , Fuminori Tanaka
CPC classification number: G02B26/0833 , B81B3/004 , B81C1/00658 , G02B26/101 , B81B2201/042 , B81B2203/0109
Abstract: A vibrating element includes a movable part, a substrate made of metal, a driving source, and a holding member holding the substrate. The substrate includes a pair of support beam parts, a support part, and a torsion beam part. Each of the support beam parts has a first end part and a second end part. The support part supports the first end part. The torsion beam part swingably supports the movable part. The second end part of each of the support beam parts is provided with a fixing part fixed to the holding member. By adjusting an inclination with respect to the holding member, the fixing part is fixed to the holding member in a state in which each of the support beam parts applies tension to the torsion beam part in a direction away from the movable part in a first direction in which the torsion beam part extends.
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公开(公告)号：US11919768B2
公开(公告)日：2024-03-05
申请号：US17234771
申请日：2021-04-19
Applicant: FUNAI ELECTRIC CO., LTD.
Inventor： Kenji Tanehashi , Fuminori Tanaka , Kenichi Fujita
CPC classification number: B81B3/004 , G02B26/0833 , G02B26/105 , B81B2201/042
Abstract: Provided is a vibrating mirror element including: a mirror part; a substrate made of metal, including a pair of beams, a support supporting each of the pair of beams, and a torsion part swingably supporting the mirror part; a driving source generating a plate wave that swings the mirror part; and a vibration suppression part suppressing vibration transmitted to the pair of beams. The vibration suppression part is configured to suppress the vibration transmitted to the pair of beams by abutting against the pair of beams at a position between a second mirror end among ends of the mirror part that is opposite a first mirror end near the support and the torsion part in a first direction in which the pair of beams extends.
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公开(公告)号：US20240036345A1
公开(公告)日：2024-02-01
申请号：US18485370
申请日：2023-10-12
Applicant: Carl Zeiss SMT GmbH
Inventor： Stefan SCHUETTER , Eduard SCHWEIGERT , Benjamin ROSS , Sebastian FAAS
CPC classification number: G02B27/62 , B81C3/001 , B81B1/006 , B81C2203/038 , B81B2201/042
Abstract: A method for optical contact bonding components includes: placing a first surface (2a) of a first component (2) onto a second surface (3a) of a second component (3), to form an air film, and pressing the first surface against the second surface for optical contact bonding of the two components. Placing and pressing the first component is carried out by a robot (4). A laminar gas flow (10) is generated between the first and second surfaces with a ventilation device (9). A related apparatus (1) includes: the robot, configured to place the first surface onto the second surface thereby forming an air film. The robot presses the first surface against the second surface, to optically contact bond the first and second components. A holding device (8) holds the second component during the placing and pressing. A ventilation device generates the laminar gas flow between the first and second surfaces.
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公开(公告)号：US11879524B1
公开(公告)日：2024-01-23
申请号：US17229727
申请日：2021-04-13
Applicant: C. Anthony Hester , Charles F. Hester
Inventor： C. Anthony Hester , Charles F. Hester
CPC classification number: F16H21/06 , B81B3/0037 , F16H21/44 , G02B26/001 , G02B26/0833 , B81B2201/042 , B81B2203/053 , B81B2207/053
Abstract: An actuator system can be used to adjust a position of a component in a spatial light modulator. The actuator system has a pair of actuators that are coupled together by a frame that is used to adjust the height of the component relative to the substrate. The frame includes a pair of moment arms that are coupled to the actuators and a pair of connecting arms that are coupled to the moment arms. The connecting arms are then connected together at about the center of the frame, which portion of the frame can be used to raise or lower the plate. The center of the frame can be raised or lowered by a shortening or lengthening of the connecting arms relative to each other.
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