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    MEMS device having a layer movable at asymmetric rates
    17.
    发明申请
    MEMS device having a layer movable at asymmetric rates 失效
    MEMS器件具有可以不对称速率移动的层

    公开(公告)号：US20070194630A1

    公开(公告)日：2007-08-23

    申请号：US11360162

    申请日：2006-02-23

    Applicant: Marc Mignard ,  Lior Kogut

    Inventor： Marc Mignard ,  Lior Kogut

    IPC: H02N3/00

    CPC classification number: G02B26/001 ,  B81B3/0078 ,  B81B2201/047 ,  B81B2201/054 ,  B81B2203/053 ,  G09G3/3466 ,  G09G2300/06

    Abstract: A microelectromechanical (MEMS) device includes a substrate and a movable layer mechanically coupled to the substrate. The movable layer moves from a first position to a second position at a first rate and from the second position to the first position at a second rate faster than the first rate. The MEMS device further includes an adjustable cavity defined between the substrate and the movable layer and containing a fluid. The MEMS device further includes a fluid conductive element through which the fluid flows at a first flowrate from inside the cavity to outside the cavity upon movement of the movable layer from the second position to the first position and through which the fluid flows at a second flowrate slower than the first flowrate from outside the cavity to inside the cavity upon movement of the movable layer from the first position to the second position.

    Abstract translation: 微机电（MEMS）装置包括基板和机械耦合到基板的可移动层。 可移动层以第一速率从第一位置移动到第二位置，并且以比第一速率快的第二速率从第二位置移动到第一位置。 MEMS器件还包括限定在衬底和可移动层之间并包含流体的可调节空腔。 MEMS装置还包括流体导电元件，当可移动层从第二位置移动到第一位置时，流体从腔体内部以第一流量流动到空腔外部，并且流体以第二流量流动 当从可移动层从第一位置移动到第二位置时，其比从空腔外部到腔体内部的第一流速慢。

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