公开(公告)号：US20170023608A1

公开(公告)日：2017-01-26

申请号：US14805105

申请日：2015-07-21

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： JUN TANG ,  AARON A. GEISBERGER ,  MARGARET L. KNIFFIN

IPC: G01P15/18

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/0882

Abstract: An inertial sensor includes first and second movable elements suspended from a substrate and interconnected by a beam. The second movable element is positioned laterally adjacent to the first movable element, and each of the movable elements has a mass that is asymmetric relative to a rotational axis. A first spring system couples the first movable element to the substrate and a second spring system couples the second movable element to the substrate. The spring systems and the beam enable the movable elements to move together in response to force imposed upon the movable elements. In particular, the first and second movable elements can undergo in-plane torsion motion in response to force, such as acceleration, imposed in a sense direction. Additionally, damping structures may be integrated into the first and second movable elements to effectively increase a damping ratio of the device resulting from the in-plane torsion motion.

Abstract translation: 惯性传感器包括从衬底悬挂并由梁互连的第一和第二可移动元件。 第二可移动元件被定位成与第一可移动元件横向相邻，并且每个可移动元件具有相对于旋转轴线不对称的质量。 第一弹簧系统将第一可移动元件耦合到基板，第二弹簧系统将第二可移动元件连接到基板。 弹簧系统和梁使得可移动元件响应于施加在可移动元件上的力而一起移动。 特别地，第一和第二可移动元件可以响应于施加在感测方向上的力（例如加速度）而经历面内扭转运动。 此外，阻尼结构可以集成到第一和第二可移动元件中，以有效地增加由平面内扭转运动引起的装置的阻尼比。

公开(公告)号：US09470703B2

公开(公告)日：2016-10-18

申请号：US13856053

申请日：2013-04-03

Applicant: Seiko Epson Corporation

Inventor： Satoru Tanaka

IPC: G01P15/125 ,  G01P1/00 ,  G01P15/08

CPC classification number: G01P1/003 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0882

Abstract: A physical quantity sensor includes: a substrate; a movable body including, with a first axis as a boundary, a first movable electrode portion disposed in a first region, a second movable electrode portion disposed in a second region, and a damping adjusting portion disposed in at least one of the first region and the second region; beam portions supporting the movable body; a first fixed electrode portion; and a second fixed electrode portion. A first through-hole is disposed in the damping adjusting portion. Second through-holes are disposed in the movable electrode portions. The area of a region where the first movable electrode portion overlaps with the first fixed electrode portion is the same as the area of a region where the second movable electrode portion overlaps with the second fixed electrode portion. The width of the first through-hole is greater than the widths of the second through-holes.

Abstract translation: 物理量传感器包括：基板; 具有第一轴作为边界的可移动体，设置在第一区域中的第一可动电极部分，设置在第二区域中的第二可动电极部分和设置在第一区域和第二区域中的至少一个中的阻尼调节部分， 第二区; 支撑移动体的梁部; 第一固定电极部分; 和第二固定电极部分。 第一通孔设置在阻尼调节部分中。 第二通孔设置在可动电极部分中。 第一可动电极部与第一固定电极部重叠的区域的面积与第二可动电极部与第二固定电极部重叠的区域的面积相同。 第一通孔的宽度大于第二通孔的宽度。

公开(公告)号：US20160291050A1

公开(公告)日：2016-10-06

申请号：US15035459

申请日：2014-10-28

Applicant: ROBERT BOSCH GMBH

Inventor： Ricardo Ehrenpfordt ,  Daniel Pantel ,  Frederik Ante

IPC: G01P1/00 ,  G01C19/5783

CPC classification number: G01P1/003 ,  G01C19/5783 ,  G01P2015/0882

Abstract: An inertial sensor includes a first sensor element, which is damped against vibrations from an interface of the inertial sensor by a damping element. The first sensor element is configured to detect a first measured variable in a first frequency band, and the damping element is configured to dampen vibrations at least in the first frequency band. The inertial sensor further includes a second sensor element, which is mechanically coupled to the interface. The second sensor element is configured to detect a second measured variable in a second frequency band.

Abstract translation: 惯性传感器包括第一传感器元件，该第一传感器元件抵抗来自惯性传感器的界面的阻尼元件的振动。 第一传感器元件被配置为检测第一频带中的第一测量变量，并且阻尼元件被配置为至少在第一频带中抑制振动。 惯性传感器还包括机械地联接到接口的第二传感器元件。 第二传感器元件被配置为检测第二频带中的第二测量变量。

公开(公告)号：US20160069928A1

公开(公告)日：2016-03-10

申请号：US14888432

申请日：2014-03-27

Applicant: NORTHROP GRUMMAN LITEF GMBH

Inventor： Wolfram Geiger ,  Julian Bartholomeyczik ,  Peter Leinfelder

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814 ,  G01P2015/0882

Abstract: The invention relates to an acceleration sensor, comprising a substrate having a substrate surface and a sample mass that is movable relative to the substrate in a first direction (x) parallel to the substrate surface. The sample mass has a comb-like electrode that is movable together with the sample mass and has a plurality of teeth, which extend in the first direction (x). The acceleration sensor further comprises a counter-electrode fixedly connected to the substrate, which counter-electrode has a fixed comb-like electrode and wherein said fixed comb-like electrode has a plurality of teeth which extend in a direction opposite to the first direction (x). The teeth of the movable comb-like electrode engage with the teeth of the fixed comb-like electrode. The acceleration sensor further comprises a shielding electrode fixedly connected to the substrate and which is suitable for increasing a pneumatic damping of the sample mass during a deflection movement of the sample mass.

Abstract translation: 本发明涉及加速度传感器，其包括具有衬底表面的衬底和在平行于衬底表面的第一方向（x））可相对于衬底移动的样品块。 样品质量具有可与样品块一起移动的梳状电极，并且具有沿着第一方向（x）延伸的多个齿。 加速度传感器还包括固定地连接到基板的对电极，该对置电极具有固定的梳状电极，并且其中所述固定梳状电极具有沿与第一方向相反的方向延伸的多个齿（ X）。 可动梳状电极的齿与固定梳状电极的齿啮合。 加速度传感器还包括固定地连接到基底的屏蔽电极，其适于在样品质量的偏转运动期间增加样品质量的气动阻尼。

公开(公告)号：US20150369837A1

公开(公告)日：2015-12-24

申请号：US14744866

申请日：2015-06-19

Applicant: US Seismic Systems, Inc.

Inventor： Eric Lee Goldner ,  David B. Hall

IPC: G01P15/093

CPC classification number: G01D5/35335 ,  B32B2262/0207 ,  F16F9/006 ,  F16F9/3292 ,  G01D5/268 ,  G01D5/3537 ,  G01P15/093 ,  G01P2015/0882

Abstract: A fiber optic sensor is provided. The fiber optic sensor includes: a fixed portion configured to be secured to a body of interest; a moveable portion; a spring member positioned at least partially between the fixed portion and the moveable portion; an optical fiber wound in contact with the fixed portion and the moveable portion such that the optical fiber spans at least a portion of the spring; and an elastomeric material provided in contact with at least one of the fixed portion, the moveable portion, the spring member, the body of interest, and the optical fiber.

Abstract translation: 提供光纤传感器。 光纤传感器包括：固定部分，其被配置为固定到感兴趣的身体; 可移动部分 至少部分地定位在所述固定部分和所述可移动部分之间的弹簧构件; 与所述固定部分和所述可移动部分接触的光纤，使得所述光纤跨过所述弹簧的至少一部分; 以及与固定部分，可动部分，弹簧部件，感兴趣的主体和光纤中的至少一个接触的弹性体材料。

公开(公告)号：US20150346232A1

公开(公告)日：2015-12-03

申请号：US14654243

申请日：2013-12-17

Applicant: ROBERT BOSCH GMBH

Inventor： Achim Pruksch ,  Berthold Kaeferstein

IPC: G01P1/00 ,  F16F15/04 ,  F16F1/00

CPC classification number: F16F15/04 ,  F16F1/00 ,  F16F1/027 ,  F16F7/08 ,  F16F15/073 ,  G01D11/10 ,  G01P1/003 ,  G01P1/023 ,  G01P2015/0882

Abstract: A vibration damper for a sensor unit comprises an elastic damping element including a central plate, a plurality of damping fingers joined at a first end to the central plate, and a plurality of fastening surfaces. At least two fastening surfaces of the plurality of fastening surfaces are disposed at a distance from each other in a first spatial direction. The damping element is flexurally elastically soft along the first spatial direction and is formed with a higher stiffness in a main extension plane defined perpendicular to the first spatial direction. A layer of adhesive is applied to each of the at least two fastening surfaces which are configured to be subjected to shear stress as a result of vibrations in the main extension plane.

Abstract translation: 用于传感器单元的减震器包括弹性阻尼元件，其包括中心板，在第一端连接到中心板的多个阻尼指，以及多个紧固表面。 多个紧固表面中的至少两个紧固表面在第一空间方向上彼此间隔开设置。 阻尼元件沿着第一空间方向弯曲弹性地柔软，并且在垂直于第一空间方向限定的主延伸平面中形成更高的刚度。 至少两个紧固表面中的每一个被施加一层粘合剂，所述至少两个紧固表面构造成由于主延伸面中的振动而经受剪切应力。

公开(公告)号：US20150075283A1

公开(公告)日：2015-03-19

申请号：US14387364

申请日：2012-12-04

Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES

Inventor： Lufeng Che ,  Xiaofeng Zhou ,  Yuelin Wang

IPC: G01P15/125 ,  B81C1/00

CPC classification number: G01P15/125 ,  B81C1/00341 ,  B81C1/00531 ,  G01P2015/0871 ,  G01P2015/0882

Abstract: The present invention provides a capacitive acceleration sensor with a bending elastic beam and a preparation method. The sensor at least includes a first electrode structural layer, a middle structural layer and a second electrode structural layer; wherein the first electrode structural layer and the second electrode structural layer are provided with an electrode lead via-hole, respectively; the middle structural layer includes: a frame formed on a SOI silicon substrate with a double device layers, a seismic mass whose double sides are symmetrical and a bending elastic beam with one end connected to the frame and the other end connected to the seismic mass, wherein anti-overloading bumps and damping grooves are symmetrically provided on two sides of the seismic mass, and the bending elastic beams at different planes are staggered distributed and are not overlapped with each other in space. Since the bending times, the total length and the total width of the bending elastic beam can be prepared as needed, capacitive acceleration sensors with different sensitivities can be manufactured according to the present invention, and the manufacturing has high flexibility.

Abstract translation: 本发明提供一种具有弯曲弹性梁的电容式加速度传感器及其制备方法。 传感器至少包括第一电极结构层，中间结构层和第二电极结构层; 其中所述第一电极结构层和所述第二电极结构层分别设置有电极引线通孔; 中间结构层包括：形成在具有双器件层的SOI硅衬底上的框架，其双面对称的抗震质量块和一端连接到框架并且另一端连接到地震块体的弯曲弹性梁， 其中防过载凸块和阻尼槽对称地设置在地震块的两侧，并且不同平面处的弯曲弹性梁交错分布并且在空间中彼此不重叠。 由于弯曲时间可以根据需要准备弯曲弹性梁的总长度和总宽度，所以可以根据本发明制造具有不同灵敏度的电容加速度传感器，并且制造具有高的灵活性。

公开(公告)号：US20150053002A1

公开(公告)日：2015-02-26

申请号：US14468221

申请日：2014-08-25

Applicant: Guenther-Nino-Carlo ULLRICH ,  Andrea ORTO

Inventor： Guenther-Nino-Carlo ULLRICH ,  Andrea ORTO

IPC: G01P15/125 ,  B81C1/00 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0027 ,  B81B3/0045 ,  B81B2201/0235 ,  B81B2203/058 ,  B81C1/00134 ,  G01P2015/0831 ,  G01P2015/0871 ,  G01P2015/0882

Abstract: A micromechanical sensor is provided which includes a substrate having a main plane of extension and a rocker structure which is connected to the substrate via a torsion means. The torsion means extends primarily along a torsion axis, and the torsion axis is situated essentially in parallel to the main plane of extension of the substrate. The rocker structure is pivotable about the torsion axis from a neutral position into a deflected position, and the rocker structure has a mass distribution which is asymmetrical with respect to the torsion axis. The mass distribution is designed in such a way that a torsional motion of the rocker structure about the torsion axis is effected as a function of an inertial force which is oriented along a Z direction which is essentially perpendicular to the main plane of extension of the substrate.

Abstract translation: 提供一种微机械传感器，其包括具有主平面延伸的基板和通过扭转装置连接到基板的摇臂结构。 扭转装置主要沿着扭转轴线延伸，并且扭转轴线基本上平行于基板延伸的主平面。 摇臂结构可绕扭转轴线从中性位置枢转到偏转位置，并且摇臂结构具有相对于扭转轴线不对称的质量分布。 质量分布被设计成使得摇臂结构围绕扭转轴线的扭转运动是作为沿Z方向定向的惯性力的函数的，该惯性力基本上垂直于衬底的主平面延伸的主平面 。

公开(公告)号：US20140342487A1

公开(公告)日：2014-11-20

申请号：US14264624

申请日：2014-04-29

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT

Inventor： Stephane NICOLAS

IPC: B81C1/00 ,  H01L23/28

CPC classification number: B81C1/00285 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00293 ,  B81C1/00777 ,  B81C2203/0118 ,  B81C2203/0145 ,  G01C21/16 ,  G01C25/00 ,  G01P15/0802 ,  G01P2015/088 ,  G01P2015/0882 ,  H01L21/50 ,  H01L21/52 ,  H01L21/54 ,  H01L23/10 ,  H01L23/28 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A process for encapsulating a microelectronic device, comprising the following steps: make the microelectronic device on a first substrate; make one portion of a first material not permeable to the ambient atmosphere and permeable to a noble gas in a second substrate comprising a second material not permeable to the ambient atmosphere and the noble gas; secure the second substrate to the first substrate, forming at least one cavity inside which the microelectronic device is encapsulated such that said portion of the first material forms part of a wall of the cavity; inject the noble gas into the cavity through the portion of the first material; hermetically seal the cavity towards the ambient atmosphere and the noble gas.

Abstract translation: 一种用于封装微电子器件的方法，包括以下步骤：使微电子器件在第一衬底上; 使一部分第一材料不能渗透到环境大气中，并且可渗透第二衬底中的惰性气体，该第二衬底包括不能通过环境气氛和惰性气体的第二材料; 将所述第二基板固定到所述第一基板，形成至少一个空腔，所述微电子器件被封装在所述腔内，使得所述第一材料的所述部分形成所述腔的壁的一部分; 通过第一材料的一部分将惰性气体注入空腔; 将空腔气密地密封到环境气氛和惰性气体。

公开(公告)号：US20130199295A1

公开(公告)日：2013-08-08

申请号：US13757082

申请日：2013-02-01

Applicant: Holger HOEFER ,  Ricardo EHRENPFORDT ,  Klaus OFFTERDINGER ,  Christian SOLF

Inventor： Holger HOEFER ,  Ricardo EHRENPFORDT ,  Klaus OFFTERDINGER ,  Christian SOLF

IPC: G01P1/00 ,  H05K3/00

CPC classification number: G01P1/003 ,  G01P15/0802 ,  G01P2015/0882 ,  H01L2224/16225 ,  H01L2924/15311 ,  H05K1/0271 ,  H05K1/141 ,  H05K3/00 ,  H05K2201/049 ,  H05K2201/10151 ,  Y10T29/4913

Abstract: A damping device for a micromechanical sensor device, having at least one first intermediate layer having at least two sections, a second section being situated around a first section, a lateral distance being provided between the first and the second section, and an elastic device being provided between the first section and the second section as an integral part of the first intermediate layer.

Abstract translation: 一种用于微机械传感器装置的阻尼装置，具有至少一个具有至少两个部分的第一中间层，第二部分围绕第一部分设置，横向距离设置在第一和第二部分之间，弹性装置为 设置在第一部分和第二部分之间，作为第一中间层的整体部分。