公开(公告)号：US20230266359A1

公开(公告)日：2023-08-24

申请号：US18171512

申请日：2023-02-20

Applicant: SEIKO EPSON CORPORATION

Inventor： Koichiro KOMIZO

IPC: G01P15/135 ,  G01P15/125

CPC classification number: G01P15/135 ,  G01P15/125 ,  G01P2015/0882

Abstract: A physical quantity sensor includes an anchor fixed to a substrate, a support beam, a fixed electrode unit, a movable body, and a damper unit. The fixed electrode unit is provided at the substrate. One end of the support beam is coupled to the anchor. The movable body includes a movable electrode unit and a frame unit. The movable electrode unit includes a movable electrode facing a fixed electrode of the fixed electrode unit. The frame unit couples the movable electrode unit and the other end of the support beam. The damper unit is coupled to the frame unit, is provided in a region surrounded by the support beam and the frame unit, and damps vibration of the frame unit in a first direction.

公开(公告)号：US09709596B2

公开(公告)日：2017-07-18

申请号：US14888432

申请日：2014-03-27

Applicant: Northrop Grumman LITEF GmbH

Inventor： Wolfram Geiger ,  Julian Bartholomeyczik ,  Peter Leinfelder

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814 ,  G01P2015/0882

Abstract: The invention relates to an acceleration sensor, comprising a substrate having a substrate surface and a sample mass that is movable relative to the substrate in a first direction (x) parallel to the substrate surface. The sample mass has a comb-like electrode that is movable together with the sample mass and has a plurality of teeth, which extend in the first direction (x). The acceleration sensor further comprises a counter-electrode fixedly connected to the substrate, which counter-electrode has a fixed comb-like electrode and wherein said fixed comb-like electrode has a plurality of teeth which extend in a direction opposite to the first direction (x). The teeth of the movable comb-like electrode engage with the teeth of the fixed comb-like electrode. The acceleration sensor further comprises a shielding electrode fixedly connected to the substrate and which is suitable for increasing a pneumatic damping of the sample mass during a deflection movement of the sample mass.

公开(公告)号：US09689458B2

公开(公告)日：2017-06-27

申请号：US14654243

申请日：2013-12-17

Applicant: Robert Bosch GmbH

Inventor： Achim Pruksch ,  Berthold Kaeferstein

IPC: G01P1/00 ,  G01P1/02 ,  F16F15/04 ,  F16F1/00 ,  G01D11/10 ,  G01P15/08

CPC classification number: F16F15/04 ,  F16F1/00 ,  F16F1/027 ,  F16F7/08 ,  F16F15/073 ,  G01D11/10 ,  G01P1/003 ,  G01P1/023 ,  G01P2015/0882

Abstract: A vibration damper for a sensor unit comprises an elastic damping element including a central plate, a plurality of damping fingers joined at a first end to the central plate, and a plurality of fastening surfaces. At least two fastening surfaces of the plurality of fastening surfaces are disposed at a distance from each other in a first spatial direction. The damping element is flexurally elastically soft along the first spatial direction and is formed with a higher stiffness in a main extension plane defined perpendicular to the first spatial direction. A layer of adhesive is applied to each of the at least two fastening surfaces which are configured to be subjected to shear stress as a result of vibrations in the main extension plane.

公开(公告)号：US09222955B2

公开(公告)日：2015-12-29

申请号：US13757082

申请日：2013-02-01

Applicant: Holger Hoefer ,  Ricardo Ehrenpfordt ,  Klaus Offterdinger ,  Christian Solf

Inventor： Holger Hoefer ,  Ricardo Ehrenpfordt ,  Klaus Offterdinger ,  Christian Solf

IPC: G01P1/00 ,  H05K3/00 ,  G01P15/08 ,  H05K1/14 ,  H05K1/02

CPC classification number: G01P1/003 ,  G01P15/0802 ,  G01P2015/0882 ,  H01L2224/16225 ,  H01L2924/15311 ,  H05K1/0271 ,  H05K1/141 ,  H05K3/00 ,  H05K2201/049 ,  H05K2201/10151 ,  Y10T29/4913

Abstract: A damping device for a micromechanical sensor device, having at least one first intermediate layer having at least two sections, a second section being situated around a first section, a lateral distance being provided between the first and the second section, and an elastic device being provided between the first section and the second section as an integral part of the first intermediate layer.

Abstract translation: 一种用于微机械传感器装置的阻尼装置，具有至少一个具有至少两个部分的第一中间层，第二部分围绕第一部分设置，横向距离设置在第一和第二部分之间，弹性装置为 设置在第一部分和第二部分之间，作为第一中间层的整体部分。

公开(公告)号：US20150268284A1

公开(公告)日：2015-09-24

申请号：US14661426

申请日：2015-03-18

Applicant: Fairchild Semiconductor Corporation

Inventor： Ion Opris ,  Justin Seng ,  Shanthi Pavan ,  Marwan Ashkar ,  Michelle Lee

IPC: G01R29/24

CPC classification number: G01P15/125 ,  G01P2015/0882

Abstract: Apparatus and methods for interfacing with a micro-electromechanical system (MEMS) sensor are provided. In an example, an apparatus can interface circuit including an integrator circuit, a sample switch circuit, a saturation detector and a controller. The saturation detector can be configured to receive a signal indicative of an integration of charge of the sensor, to compare the signal indicative of the integration of charge to an integrator saturation threshold and to modulate a divide parameter using the comparison of the signal indicative of the integration of charge and the integrator saturation threshold. The controller can be configured to receive a clock signal and to control the sample switch circuit based on a phase of the clock signal and the divide parameter.

Abstract translation: 提供了与微机电系统（MEMS）传感器接口的装置和方法。 在一个示例中，设备可以接口包括积分器电路，采样开关电路，饱和度检测器和控制器的电路。 饱和检测器可以被配置为接收指示传感器的电荷积分的信号，以将表示电荷积分的信号与积分器饱和阈值进行比较，并且使用表示该信号的信号的比较来调制除数参数 充电和积分饱和阈值的积分。 控制器可以被配置为接收时钟信号并且基于时钟信号和除数参数的相位来控制采样开关电路。

公开(公告)号：US20150143906A1

公开(公告)日：2015-05-28

申请号：US14405177

申请日：2013-06-06

Applicant: DENSO CORPORATION

Inventor： Akira Ogawa

IPC: G01P15/125

CPC classification number: G01P15/135 ,  G01C19/5747 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/13 ,  G01P15/18 ,  G01P2015/0882

Abstract: A capacitance type physical quantity sensor including a movable electrode formed in a weight part, and a fixed electrode facing the movable electrode is provided. A first movable sensing electrode and a first fixed sensing electrode face each other in a first y direction. A second movable sensing electrode and a second fixed sensing electrode face each other in a second y direction. A first movable damping electrode is located in the middle between two first fixed damping electrodes, faces one of the first fixed damping electrodes in the first y direction and faces the other of the first fixed damping electrodes in the second y direction. A plurality of the first movable damping electrodes are located point-symmetrically with respect to the center of the weight part or line-symmetrically with respect to a center line passing the center in the y direction.

Abstract translation: 提供一种电容型物理量传感器，包括形成在重量部分中的可动电极和面对可动电极的固定电极。 第一可移动感测电极和第一固定感测电极在第一y方向上彼此面对。 第二可移动感测电极和第二固定感测电极在第二y方向上彼此面对。 第一可动阻尼电极位于两个第一固定阻尼电极之间的中间，在第一y方向上面向第一固定阻尼电极中的一个并且在第二y方向上面对另一个第一固定阻尼电极。 多个第一可动阻尼电极相对于重量部分的中心点对称地相对于通过y方向中心的中心线对称地定位。

公开(公告)号：US20140318906A1

公开(公告)日：2014-10-30

申请号：US14260539

申请日：2014-04-24

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT

Inventor： Yannick DEIMERLY ,  Guillaume JOURDAN ,  Patrice REY

IPC: F16F15/02 ,  H01C17/00

CPC classification number: B81B7/0016 ,  B81B7/008 ,  B81B2201/025 ,  G01C19/5726 ,  G01P2015/0882 ,  Y10T29/49082

Abstract: Inertial sensor comprising a fixed part and at least one mass suspended from the fixed part and means of damping the displacement of the part suspended from the fixed part, said damping means being electromechanical damping means comprising at least one DC power supply source, one electrical resistor and one variable capacitor in series, said variable capacitor being formed partly by the suspended part and partly by the fixed part such that displacement of the suspended part causes a variation of the capacitance of the variable capacitor.

Abstract translation: 惯性传感器，包括固定部分和至少一个悬挂在固定部分上的质量，以及阻尼从固定部分悬挂的部分的位移的装置，所述阻尼装置是机电阻尼装置，包括至少一个直流电源，一个电阻 和一个串联的可变电容器，所述可变电容器部分地由悬挂部分形成，部分地由固定部分形成，使得悬置部分的位移导致可变电容器的电容的变化。

公开(公告)号：US20130263662A1

公开(公告)日：2013-10-10

申请号：US13856053

申请日：2013-04-03

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoru TANAKA

IPC: G01P1/00

CPC classification number: G01P1/003 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0882

Abstract: A physical quantity sensor includes: a substrate; a movable body including, with a first axis as a boundary, a first movable electrode portion disposed in a first region, a second movable electrode portion disposed in a second region, and a damping adjusting portion disposed in at least one of the first region and the second region; beam portions supporting the movable body; a first fixed electrode portion; and a second fixed electrode portion. A first through-hole is disposed in the damping adjusting portion. Second through-holes are disposed in the movable electrode portions. The area of a region where the first movable electrode portion overlaps with the first fixed electrode portion is the same as the area of a region where the second movable electrode portion overlaps with the second fixed electrode portion. The width of the first through-hole is greater than the widths of the second through-holes.

Abstract translation: 物理量传感器包括：基板; 具有第一轴作为边界的可移动体，设置在第一区域中的第一可动电极部分，设置在第二区域中的第二可动电极部分和设置在第一区域和第二区域中的至少一个中的阻尼调节部分， 第二区; 支撑移动体的梁部; 第一固定电极部分; 和第二固定电极部分。 第一通孔设置在阻尼调节部分中。 第二通孔设置在可动电极部分中。 第一可动电极部与第一固定电极部重叠的区域的面积与第二可动电极部与第二固定电极部重叠的区域的面积相同。 第一通孔的宽度大于第二通孔的宽度。

公开(公告)号：US20240151741A1

公开(公告)日：2024-05-09

申请号：US18496653

申请日：2023-10-27

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Manuel RIANI ,  Gabriele GATTERE ,  Francesco RIZZINI

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0882

Abstract: The MEMS device is formed by a substrate and a movable structure suspended on the substrate. The movable structure has a first mass, a second mass and a first elastic group mechanically coupled between the first and the second masses. The first elastic group is compliant along a first direction. The first mass is configured to move with respect to the substrate along the first direction. The MEMS device also has a second elastic group mechanically coupled between the substrate and the movable structure and compliant along the first direction; and an anchoring control structure fixed to the substrate, capacitively coupled to the second mass and configured to exert an electrostatic force on the second mass along the first direction. The anchoring control structure controls the MEMS device in a first operating state, wherein the second mass is free to move with respect to the substrate along the first direction, and in a second operating state, wherein the anchoring control structure applies a pull-in force on the second mass which anchors the second mass to the anchoring structure.

公开(公告)号：US10078097B2

公开(公告)日：2018-09-18

申请号：US15611411

申请日：2017-06-01

Applicant: Sonion Nederland B.V.

Inventor： Eddy Dubbeldeman ,  Raymond Mögelin

IPC: G01H1/00 ,  G01P15/08 ,  G01H3/06

CPC classification number: G01P15/0802 ,  G01H3/06 ,  G01H11/00 ,  G01P2015/0882 ,  G10K11/002 ,  G10K11/16 ,  H04R7/04 ,  H04R7/26 ,  H04R17/02 ,  H04R17/10 ,  H04R19/005 ,  H04R19/016 ,  H04R2201/003

Abstract: A vibration sensor having a moveable mass being suspended in a suspension member and being adapted to move in response to vibrations or accelerations. The moveable mass and the suspension member are rigidly connected across one or more gaps formed by respective opposing surfaces of the moveable mass and the suspension member. The vibration sensor includes a damping arrangement having a damping substance. The moveable mass is arranged to interact directly or indirectly with the damping substance in order to reduce a mechanical resonance peak of the vibration sensor.