公开(公告)号：US20090290147A1

公开(公告)日：2009-11-26

申请号：US12124517

申请日：2008-05-21

Applicant: Trevor Wayne MacDougall ,  Paul Eric Sanders

Inventor： Trevor Wayne MacDougall ,  Paul Eric Sanders

IPC: G01N21/00 ,  G01J4/00 ,  G01B9/02

CPC classification number: G02B6/276 ,  G01D5/35383 ,  G02B6/29319

Abstract: An optical fiber sensor system includes an optical fiber. A linear polarizing component is configured to communicate with the optical fiber. The linear polarizing component includes a polarization sensing fiber to be disposed adjacent to and preferably collinear with the optical fiber. A light source communicates with the linear polarizing component for generating a light signal along the optical fiber. A reflector is disposed along the optical fiber for reflecting back the light signal along the optical fiber. An optical detector communicates with the linear polarizing component. A signal processor communicating with the optical detector and configured for determining from the reflected light signal dynamic events along the optical fiber.

Abstract translation: 光纤传感器系统包括光纤。 线性偏振分量被配置为与光纤通信。 线性偏振分量包括邻近并优选与光纤共线设置的偏振光感测光纤。 光源与线性偏振组件通信，用于沿光纤产生光信号。 沿着光纤布置反射器，用于沿光纤反射光信号。 光学检测器与线性偏振组件通信。 与光学检测器通信并被配置用于根据反射光信号确定沿着光纤的动态事件的信号处理器。

公开(公告)号：US07619736B2

公开(公告)日：2009-11-17

申请号：US11785771

申请日：2007-04-20

Applicant: Takeaki Itsuji

Inventor： Takeaki Itsuji

IPC: G01J4/00

CPC classification number: G01N21/21 ,  G01N21/3581

Abstract: A sample information obtaining apparatus includes an electromagnetic wave generator; a sample holding unit which holds a sample to be tested and serves as a polarizer having a polarization axis which defines how an incident electromagnetic wave is to be divided according to a polarization state of the incident electromagnetic wave; an electromagnetic wave detecting unit which separately detects a transmitted electromagnetic wave transmitted through the sample holding unit and a reflected electromagnetic wave reflected off the sample holding unit, the transmitted and reflected electromagnetic waves being obtained by dividing the incident electromagnetic wave incident on the sample holding unit according to a relative positional relationship between the polarization state of the incident electromagnetic wave and the polarization axis of the sample holding unit; and a processor which processes signals of the electromagnetic waves detected by the electromagnetic wave detecting unit and obtains information about the sample.

Abstract translation: 样本信息获取装置包括电磁波发生器; 样品保持单元，其保持要测试的样品，并且用作具有偏振轴的偏振器，所述偏振轴限定入射电磁波如何根据入射电磁波的偏振状态被分割; 电磁波检测单元，其分别检测通过样本保持单元传输的透射电磁波和从样本保持单元反射的反射电磁波，所述透射和反射电磁波是通过将入射在样本保持单元上的入射电磁波 根据入射电磁波的极化状态与样品保持单元的偏振轴的相对位置关系， 以及处理器，其处理由电磁波检测单元检测到的电磁波的信号，并获得关于样本的信息。

公开(公告)号：US20090279089A1

公开(公告)日：2009-11-12

申请号：US12442490

申请日：2007-09-26

Applicant: Baoliang Wang

Inventor： Baoliang Wang

IPC: G01J4/00 ,  G02B27/30

CPC classification number: F21V5/04 ,  G01N21/23

Abstract: A method of controlling a light beam in an optical system includes a light source that directs a collimated light beam along a path, through a sample, and toward the active area of a stationary detector. The method includes the step selectively moving a lens into the path of the light beam for spreading the beam in instances where the path of the beam is altered by the sample between the source and the stationary detector The detector, therefore, is held stationary. Adjustment means are provided for increasing the intensity characteristic of the light that reaches the detector to account for a decrease in intensity that occurs when the lens is in the path of the light beam to spread the beam.

Abstract translation: 一种控制光学系统中的光束的方法包括：光源，其沿着路径，通过样本并朝向固定检测器的有效区域引导准直光束。 该方法包括步骤：将透镜移动到光束的路径中，以在光束的路径被源和静态检测器之间的样本改变的情况下扩散光束。因此，检测器保持静止。 提供了调节装置，用于增加到达检测器的光的强度特性，以解决当透镜在光束的路径中扩散光束时发生的强度的降低。

公开(公告)号：US07616319B1

公开(公告)日：2009-11-10

申请号：US11890354

申请日：2007-08-05

Applicant: John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

Inventor： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

IPC: G01B9/02 ,  G01J3/45 ,  G01J4/00

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213 ,  G02B17/008 ,  G02B27/286

Abstract: A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

Abstract translation: 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统 功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。 优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。

公开(公告)号：US07612880B2

公开(公告)日：2009-11-03

申请号：US10567104

申请日：2004-08-03

Applicant: Russell Chipman

Inventor： Russell Chipman

IPC: G01J4/00

CPC classification number: G01J4/04 ,  A61B3/14 ,  G01N21/21 ,  G01N2021/217

Abstract: A method, apparatus, and computer program product for identifying features in a sample by analyzing Mueller matrices to calculate an average degree of polarization, a weighted average degree of polarization, a degree of polarization map, a degree of polarization surface. Also, a method, apparatus, and computer program product for identifying features in a sample by analyzing Mueller matrices to calculate depolarization relative to a retardance axis and/or a diattentuation axis, and to calculate a ratio of diattenuation to polarizance or ratios of row and column magnitudes. Also, a method for retinal polarimetry, including a non-depolarizing light tube configured for insertion into the eye.

Abstract translation: 一种用于通过分析米勒矩阵来计算平均偏振度，加权平均偏振度，偏振度图，偏振面的程度来识别样本中的特征的方法，装置和计算机程序产品。 另外，一种方法，装置和计算机程序产品，用于通过分析米勒矩阵来计算样本中的特征，以计算相对于延迟轴和/或排列轴的去极化，并且计算衰减与极化率的比率， 列幅度。 另外，一种视网膜偏振法的方法，包括配置成插入到眼睛中的非去极化光管。

公开(公告)号：US20090225317A1

公开(公告)日：2009-09-10

申请号：US12389707

申请日：2009-02-20

Applicant: Satoru Tanaka

Inventor： Satoru Tanaka

IPC: G01J4/00

CPC classification number: G01J4/00 ,  G01N21/211

Abstract: A spectroscopic ellipsometer can compare data different in a measurement condition and facilitate setting an initial value of fitting data even for an inexperienced operator such as a beginner. The spectroscopic ellipsometer includes a reference data storage part storing therein reference data to be compared with measurement data, a conversion operation part converting the measurement data or the reference data into comparable data, so that the measurement data can be compared with the reference data, and a comparison and determination part comparing the measurement data with the reference data made comparable by the conversion operation part with each other and determining a coincidence between the measurement data and the reference data.

Abstract translation: 光谱椭偏仪可以比较测量条件不同的数据，并且即使对于没有经验的操作者（如初学者）也可以设定拟合数据的初始值。 光谱椭偏仪包括参考数据存储部分，其中存储要与测量数据进行比较的参考数据，转换操作部分将测量数据或参考数据转换为可比较的数据，使得测量数据可以与参考数据进行比较，以及 比较和确定部分，将测量数据与由转换操作部分相比较的参考数据进行比较，并确定测量数据与参考数据之间的一致性。

公开(公告)号：US20090213375A1

公开(公告)日：2009-08-27

申请号：US12381640

申请日：2009-03-13

Applicant: Hamphrey J. Maris

Inventor： Hamphrey J. Maris

IPC: G01B11/02 ,  G01J4/00

CPC classification number: G01N29/0681 ,  G01B11/02 ,  G01B11/0658 ,  G01B11/0666 ,  G01B11/24 ,  G01N21/1702 ,  G01N21/1717 ,  G01N21/211 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N29/2418 ,  G01N2021/1706 ,  G01N2291/02827 ,  G01N2291/02881 ,  G01N2291/0426 ,  G01N2291/0427

Abstract: Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change: in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.

Abstract translation: 公开了一种用于表征具有设置在样品上或样品内的结构的样品的方法，包括以下步骤：将第一脉冲光施加到样品的表面，以在样品中产生传播的应变脉冲，施加第二脉冲的光 使得第二脉冲光与样品中的传播应变脉冲相互作用，从第二脉冲的反射检测到样品的光学响应的​​变化，并且使光响应的变化的发生时间 到结构的至少一个维度。

公开(公告)号：US20090195779A1

公开(公告)日：2009-08-06

申请号：US12410379

申请日：2009-03-24

Applicant: Anatoly Fabrikant ,  Guoheng Zhao ,  Daniel C. Wack ,  Mehrdad Nikoonahad

Inventor： Anatoly Fabrikant ,  Guoheng Zhao ,  Daniel C. Wack ,  Mehrdad Nikoonahad

IPC: G01J4/00

CPC classification number: G01N21/45 ,  G01N21/21 ,  G01N21/4788 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/217 ,  G01N2021/8416 ,  G02B5/18

Abstract: Instead of constructing a full multi-dimensional look-up-table as a model to find the critical dimension or other parameters in scatterometry, regression or other optimized estimation methods are employed starting from a “best guess” value of the parameter. Eigenvalues of models that are precalculated may be stored and reused later for other structures having certain common characteristics to save time. The scatterometric data that is used to find the value of the one or more parameter can be limited to those at wavelengths that are less sensitive to the underlying film characteristics. A model for a three-dimensional grating may be constructed by slicing a representative structure into a stack of slabs and creating an array of rectangular blocks to approximate each slab. One dimensional boundary problems may be solved for each block which are then matched to find a two-dimensional solution for the slab. A three-dimensional solution can then be constructed from the two-dimensional solutions for the slabs to yield the diffraction efficiencies of the three-dimensional grating. This model can then be used for finding the one or more parameters of the diffracting structure in scatterometry. Line roughness of a surface can be measured by directing a polarized incident beam in an incident plane normal to the line grating and measuring the cross-polarization coefficient. The value of the one or more parameters may then be supplied to a stepper or etcher to adjust a lithographic or etching process.

Abstract translation: 不需要构建一个完整的多维查找表作为模型来查找散点图中的关键维度或其他参数，而是从参数的“最佳猜测”值开始采用回归或其他优化的估计方法。 预先计算的模型的特征值可以稍后存储并重用于具有某些共同特征的其他结构以节省时间。 用于查找一个或多个参数的值的散点数据可以限于那些对底层薄膜特性较不敏感的波长数据。 三维光栅的模型可以通过将代表性结构切片成一叠平板并且产生矩形块阵列来近似每个平板来构造。 可以为每个块解决一维边界问题，然后将其匹配以找到板的二维解。 然后可以从板的二维解决方案中构建三维解，以产生三维光栅的衍射效率。 然后，该模型可用于在散射测量中找到衍射结构的一个或多个参数。 可以通过将垂直于线光栅的入射平面中的偏振入射光束引导并测量交叉极化系数来测量表面的线粗糙度。 然后可以将一个或多个参数的值提供给步进器或蚀刻器以调整光刻或蚀刻工艺。

公开(公告)号：US07567345B1

公开(公告)日：2009-07-28

申请号：US11784750

申请日：2007-04-10

Applicant: Martin M. Liphardt ,  Brooks A. Hitt ,  Jeffrey S. Hale ,  Ping He

Inventor： Martin M. Liphardt ,  Brooks A. Hitt ,  Jeffrey S. Hale ,  Ping He

IPC: G01J4/00

CPC classification number: G01N21/211 ,  G01J4/00

Abstract: A reflectometer, ellipsometer, polarimeter or the like system with aperture, focusing means, sample and optionally detector planes oriented so that the Scheimpflug condition is substantially met on incident and/or, optionally, reflection sides of a sample. In addition beneficial aperture hole aspect ratio and aperture plane orientation is described.

Abstract translation: 具有孔径，聚焦装置，样品和可选的检测器平面的反射计，椭偏仪，偏振计等系统，使得在入射和/或可选的反射面上基本满足Scheimpflug条件。 此外，还描述了有利的孔径纵横比和孔平面取向。

公开(公告)号：US07548315B2

公开(公告)日：2009-06-16

申请号：US11493851

申请日：2006-07-27

Applicant: Hermanus Gerardus Van Horssen

Inventor： Hermanus Gerardus Van Horssen

IPC: G01J4/00

CPC classification number: G03F7/70441 ,  G03F7/70566

Abstract: A system and method are used to compensate for critical dimension non-uniformity caused by different polarization directions in an illumination beam. A system comprises a source of radiation and an optical system. The source of radiation produces a beam of radiation. The optical system is configured to transmit a first portion of the beam having a first polarization direction during a first portion of a cycle and a second portion of the beam having a second polarization direction during a second portion of the cycle.

Abstract translation: 系统和方法用于补偿由照明光束中的不同偏振方向引起的临界尺寸不均匀性。 一种系统包括辐射源和光学系统。 辐射源产生一束辐射。 光学系统被配置为在周期的第二部分期间，在周期的第一部分期间发射具有第一偏振方向的光束的第一部分，并且在该周期的第二部分期间，光束的第二部分具有第二偏振方向。