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公开(公告)号：US10804065B2
公开(公告)日：2020-10-13
申请号：US16293992
申请日：2019-03-06
Applicant: CANON ELECTRON TUBES & DEVICES CO., LTD.
Inventor： Naoki Takahashi
Abstract: According to one embodiment, an X-ray tube includes a vacuum envelope, a cathode, an anode, and an X-ray transmission assembly. The X-ray transmission assembly includes an X-ray transmission window and an X-ray tube attachment portion. The X-ray tube attachment portion includes a passage port to allow an available X-ray flux to pass therethrough and is opposed to an opening of the vacuum envelope. The passage port has a first shape of a rectangle, an ovally rounded rectangle or a corner-rounded rectangle. The first shape has a longer axis orthogonal to an X-ray tube axis.
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公开(公告)号：US10748734B2
公开(公告)日：2020-08-18
申请号：US15256692
申请日：2016-09-05
Applicant: Mark F Eaton , Robert J. Hollingsworth
Inventor： Mark F Eaton , Robert J. Hollingsworth
Abstract: An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.
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公开(公告)号：US10741353B2
公开(公告)日：2020-08-11
申请号：US16362837
申请日：2019-03-25
Applicant: NANO-X IMAGING LTD
Inventor： Hidenori Kenmotsu , Hitoshi Masuya , Koichi Iida
Abstract: A robust cold cathode uses an electron emitting construct design possibly for an x-ray emitter device. The electron beam emitted by the emitting construct is focused and accelerated by an electrical field towards an electron anode target. A shield is provided to prevent a cold cathode from being damaged by ion bombardment in high-voltage applications and a non-emitter zone may provide a robust ion bombardment zone. The system is further configured to provide an angled target anode or a stepped target anode to further reduce the ion bombardment damage.
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公开(公告)号：US10734186B2
公开(公告)日：2020-08-04
申请号：US15847047
申请日：2017-12-19
Applicant: GENERAL ELECTRIC COMPANY
Inventor： Michael William Gorrilla
Abstract: An x-ray device is presented. The x-ray device includes a cathode configured to emit an electron beam. Also, the x-ray device includes an anode configured to rotate about a longitudinal axis of the x-ray device and positioned to receive the emitted electron beam, where the anode includes a target element disposed on an anode surface of the anode and a track element embedded in the target element, where the track element is configured to generate x-rays in response to the emitted electron beam impinging on a focal spot on the track element, where at least a portion of the track element is configured to transition from a first phase to a second phase based on heat generated in at least a portion of the track element, and where at least the portion of the track element is configured to distribute the generated heat across the anode.
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公开(公告)号：US10692684B2
公开(公告)日：2020-06-23
申请号：US15377539
申请日：2016-12-13
Applicant: General Electric Company
Inventor： Antonio Caiafa , Philippe Ernest , Dominique Poincloux
Abstract: A circuit assembly includes plural voltage control modules configured to be operably coupled in series to a connection and configured to control voltage delivered to an X-ray electrode. Each voltage module includes an on/off circuit portion, a balancing circuit portion, and a tuning circuit portion. The on/off circuit portion is configured to provide a voltage for activating or deactivating the X-ray electrode. The balancing circuit portion is coupled in parallel to the on/off circuit portion, and includes a capacitor and a resistor coupled in parallel. The tuning circuit portion is coupled in parallel to the balancing circuit portion and the on/off circuit portion, and is configured to adjust a voltage provided to the X-ray electrode.
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Patent Agency Ranking
公开(公告)号：US10681794B1
公开(公告)日：2020-06-09
申请号：US16749738
申请日：2020-01-22
Applicant: Moxtek, Inc.
Inventor： Ricky B. Steck , Brad Harris
Abstract: In one embodiment, an x-ray tube 15 can be used closer to a sample. An angle A1 between an anode axis 02 and an electron-beam axis 01 can be ≥10° and ≤80° and an angle A2 between the anode axis 02 and an x-ray axis 03 can be ≥10° and ≤80°. In another embodiment, a cap 20 on an anode 12 can block x-rays emitted in undesired directions. The cap 20 can include an internal cavity 24, an electron-beam hole 21, an anode hole 22, and an x-ray hole 23. In another embodiment, an electrical connection between an x-ray tube 15 and a power supply 18 can be reliable and easy to manufacture. The anode 12 can include a hole 31 at an end of the anode 12 sized and shaped for insertion of an electrical connector 32.
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公开(公告)号：US10660190B2
公开(公告)日：2020-05-19
申请号：US15888219
申请日：2018-02-05
Applicant: Canon Medical Systems Corporation
Inventor： Hiroshi Hirayama , Sanae Harada , Takenori Mizuno , Masahiro Karahashi
Abstract: According to one embodiment, an X-ray computed tomography apparatus includes an X-ray tube, a high voltage power supply, and focus size control circuitry. The X-ray tube includes a cathode, an anode, and a deflector configured to deflect the electrons from the cathode. The high voltage power supply generates a tube voltage to be applied between the cathode and the anode. The focus size control circuitry controls a focus size formed in the anode by applying to the deflector a deflecting voltage of a deflecting voltage value based on a tube voltage value of the tube voltage and a predetermined size, in order to form a focus of the predetermined size in the anode during the period where the tube voltage is applied by the high voltage power supply.
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公开(公告)号：US20200098538A1
公开(公告)日：2020-03-26
申请号：US16574719
申请日：2019-09-18
Applicant: Siemens Healthcare GmbH
Inventor： Anja FRITZLER , Peter GEITHNER , Petra MAURER , Thomas WEBER , Brigitte STRELLER
IPC: H01J35/08
Abstract: An x-ray anode for an x-ray emitter has a structured surface provided for impingement with electrons. According to an embodiment of the invention, the structured surface has a surface structure which alternates periodically at least in sections and which varies in the micrometer range with respect to its depth extension and periodicity.
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公开(公告)号：US10566170B2
公开(公告)日：2020-02-18
申请号：US16123374
申请日：2018-09-06
Inventor： Jin-Woo Jeong , Yoon-Ho Song
Abstract: Provided is an X-ray imaging device and a driving method thereof, the X-ray imaging device including an electron beam generation unit including a plurality of nano-emitters and a cathode, a first focusing electrode configured to focus an electron beam emitted from the electron beam generation unit, a deflector configured to deflect the electron beam focused by the first focusing electrode, a limited electrode configured to limit traveling of the electron beam deflected by the deflector, and an anode configured to be irradiated with the electron beam to emit an X-ray, wherein the limited electrode includes a limited aperture which the electron beam pass.
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230.发明授权公开(公告)号：US10529528B2
公开(公告)日：2020-01-07
申请号：US15474174
申请日：2017-03-30
Applicant: Canon Electron Tubes & Devices Co., Ltd.
Inventor： Katsunori Shimizu
Abstract: According to one embodiment, an X-ray tube assembly includes a cathode, an anode target, a joint including an inflow part into which a coolant flows, a first cylindrical pipe to which the joint is connected at one end, and the anode target is joined at an outer bottom part of the other end, a second cylindrical pipe whose first end part is fitted into the inflow part, and whose second end part is arranged to eject the coolant toward the bottom part of the first cylindrical pipe, the second cylindrical pipe being placed inside the first cylindrical pipe and an elastic member provided between the first end part and the first cylindrical pipe.
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