Process for producing optical fiber preform, process for producing optical fiber and optical fiber
    285.
    发明申请
    Process for producing optical fiber preform, process for producing optical fiber and optical fiber 有权
    光纤预制棒的制造方法,光纤和光纤的制造方法

    公开(公告)号:US20060204189A1

    公开(公告)日:2006-09-14

    申请号:US10567912

    申请日:2004-08-03

    Abstract: Methods of manufacturing an optical fiber preform and an optical fiber, and an optical fiber formed by this method of manufacturing an optical fiber are provided, the optical fiber preform having a desired refractive index profile and being capable of suppressing an increase in loss due to the absorption by OH groups. A pipe is formed by an inside vapor phase deposition method such that glass layer to be formed into a core and a glass layer to be formed into a part of a cladding pipe are deposited in a starting pipe, the glass layers each containing at least one of fluorine, germanium, phosphorous, and chlorine, the starting pipe being made of a silica glass having an outside diameter in the range of 20 to 150 mm and a wall thickness in the range of 2 to 8 mm. The pipe thus formed is collapsed to form a glass rod in which the concentration of hydroxyl groups is 10 weight ppm or less in a region from the surface of the glass rod to a depth of 1 mm therefrom.

    Abstract translation: 提供了制造光纤预制棒和光纤的方法以及通过该光纤制造方法形成的光纤,所述光纤预制棒具有所需的折射率分布并且能够抑制由于 OH基吸收。 通过内部气相沉积方法形成管,使得要形成芯的玻璃层和待形成为包层管的一部分的玻璃层沉积在起始管中,每个玻璃层包含至少一个 的氟,锗,磷和氯,起始管由外径在20〜150mm,壁厚在2〜8mm的范围内的石英玻璃制成。 由此形成的管道在从玻璃棒的表面到其深度为1mm的区域中折叠形成玻璃棒,其中羟基的浓度为10重量ppm以下。

    Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides
    286.
    发明授权
    Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides 失效
    在制造光波导中使用无定形碳膜作为硬掩模

    公开(公告)号:US07079740B2

    公开(公告)日:2006-07-18

    申请号:US10799147

    申请日:2004-03-12

    Abstract: Methods are provided for forming optical devices, such as waveguides, with minimal defect formation. In one aspect, the invention provides a method for forming a waveguide structure on a substrate surface including forming a cladding layer on the substrate surface, forming a core layer on the cladding layer, depositing an amorphous carbon hardmask on the core layer, forming a patterned photoresist layer on the amorphous carbon hardmask, etching the amorphous carbon hardmask, and etching the core material.

    Abstract translation: 提供了用于形成具有最小缺陷形成的光学器件(例如波导)的方法。 一方面,本发明提供了一种在基板表面上形成波导结构的方法,包括在基板表面上形成包覆层,在包层上形成芯层,在芯层上沉积无定形碳硬掩模,形成图案化 无定形碳硬掩模上的光致抗蚀剂层,蚀刻无定形碳硬掩模,并蚀刻芯材。

    Optical fiber preform having barrier layers for hydroxyl (OH) radicals
    288.
    发明授权
    Optical fiber preform having barrier layers for hydroxyl (OH) radicals 失效
    具有羟基(OH)自由基的屏障层的光纤预制棒

    公开(公告)号:US07008696B2

    公开(公告)日:2006-03-07

    申请号:US10465242

    申请日:2003-06-19

    Abstract: Disclosed is an optical-fiber preform having barrier layers to hydroxyl radicals, the optical-fiber preform comprising: a quartz tube in the form of a cylinder shape serving as a substrate for forming the optical-fiber preform; a first barrier layer for preventing hydroxyl radicals from permeating the optical-fiber preform and deposited onto the inner surface of the quartz tube; a second barrier layer having a permeation coefficient higher than the first barrier layer and deposited onto the first barrier layer; a third barrier layer having a permeation coefficient lower than the second barrier layer and deposited onto the second barrier layer; and, a core layer being located at the center of the optical-fiber preform.

    Abstract translation: 公开了一种具有羟基自由基阻挡层的光纤预制棒,该光纤预制棒包括:作为用于形成光纤预制棒的基底的圆筒形状的石英管; 用于防止羟基自由基渗透到光纤预制件并沉积到石英管的内表面上的第一阻挡层; 第二阻挡层,其透过系数高于第一阻挡层并沉积在第一阻挡层上; 第三阻挡层,其透过系数低于第二阻挡层并沉积到第二阻挡层上; 并且芯层位于光纤预制棒的中心。

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