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公开(公告)号:US10381326B2
公开(公告)日:2019-08-13
申请号:US14289483
申请日:2014-05-28
Applicant: Invensas Corporation
Inventor: Charles G. Woychik , Arkalgud R. Sitaram , Andrew Cao , Bong-Sub Lee
IPC: H01L25/065 , H01L23/00 , H01L25/00 , H01L21/768 , H01L21/56 , H01L23/373 , H01L23/367 , H01L23/29 , H01L23/31 , H01L23/48 , H01L21/683 , H01L25/03 , H01L25/18
Abstract: A method of forming a semiconductor package comprises forming one or more first vias in a first side of a substrate and attaching a first side of a first microelectronic element to the first side of the substrate. The first microelectronic element is electrically coupled to at least one of the one or more first vias. The method further comprise obtaining a second microelectronic element including one or more second vias in a first side of the second microelectronic element, and attaching a second side of the substrate to the first side of the second microelectronic element. The second microelectronic element is electrically coupled to at least one of the one or more first vias. Each of one or more connecting elements has a first end attached to a first side of the second microelectronic element and a second end extends beyond a second side of the first microelectronic element.
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公开(公告)号:US10332854B2
公开(公告)日:2019-06-25
申请号:US15332533
申请日:2016-10-24
Applicant: Invensas Corporation
Inventor: Rajesh Katkar , Gabriel Z. Guevara , Xuan Li , Cyprian Emeka Uzoh , Guilian Gao , Liang Wang
Abstract: A microelectronic package can include a substrate having a first surface and a second surface opposite therefrom, the substrate having a first conductive element at the first surface, and a plurality of wire bonds, each of the wire bonds having a base electrically connected to a corresponding one of the first conductive elements and having a tip remote from the base, each wire bond having edge surfaces extending from the tip toward the base. The microelectronic package can also include an encapsulation having a major surface facing away from the first surface of the substrate, the encapsulation having a recess extending from the major surface in a direction toward the first surface of the substrate, the tip of a first one of the wire bonds being disposed within the recess, and an electrically conductive layer overlying an inner surface of the encapsulation exposed within the recess, the electrically conductive layer overlying and electrically connected with the tip of the first one of the wire bonds.
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公开(公告)号:US10290613B2
公开(公告)日:2019-05-14
申请号:US16008531
申请日:2018-06-14
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh , Rajesh Katkar
IPC: B81B7/00 , H01L21/48 , H01L23/00 , H01L23/42 , H01L23/48 , H01L25/00 , H01L25/16 , H01L49/02 , H01L23/367 , H01L23/498 , H01L23/522 , H01L23/538 , H01L25/065
Abstract: Apparatuses relating generally to a substrate are disclosed. In such an apparatus, first wire bond wires (“first wires”) extend from a surface of the substrate. Second wire bond wires (“second wires”) extend from the surface of the substrate. The first wires and the second wires are external to the substrate. The first wires are disposed at least partially within the second wires. The first wires are of a first height. The second wires are of a second height greater than the first height for coupling of at least one electronic component to the first wires at least partially disposed within the second wires.
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公开(公告)号:US20190096849A1
公开(公告)日:2019-03-28
申请号:US16197686
申请日:2018-11-21
Applicant: Invensas Corporation
Inventor: Charles G. Woychik , Cyprian Emeka Uzoh , Sangil Lee , Liang Wang , Guilian Gao
IPC: H01L25/065 , H01L25/00 , H01L21/48 , H01L23/00 , H01L23/31
Abstract: Representative implementations of devices and techniques provide a hybrid interposer for 3D or 2.5D package arrangements. A quantity of pockets is formed on a surface of a carrier in a predetermined pattern. The pockets are filled with a reflowable conductive material. Chip dice are coupled to the interposer carrier by fixing terminals of the dice into the pockets. The carrier may include topside and backside redistribution layers to provide fanout for the chip dice, for coupling the interposer to another carrier, board, etc. having a pitch greater than that of the chip dice.
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公开(公告)号:US20190096741A1
公开(公告)日:2019-03-28
申请号:US16140995
申请日:2018-09-25
Applicant: INVENSAS CORPORATION
Inventor: Cyprian Emeka Uzoh , Laura Wills Mirkarimi
IPC: H01L21/768 , H01L23/532 , H01L23/522 , H01L23/00
Abstract: A method for forming an interconnect structure in an element is disclosed. The method can include patterning a cavity in a non-conductive material. The method can include exposing a surface of the cavity in the non-conductive material to a surface nitriding treatment. The method can include depositing a conductive material directly onto the treated surface after the exposing.
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公开(公告)号:US20190013287A1
公开(公告)日:2019-01-10
申请号:US16127696
申请日:2018-09-11
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh , Rajesh Katkar
IPC: H01L23/00 , H05K3/34 , H01L25/00 , H01L25/065 , H01L21/683
CPC classification number: H01L24/17 , H01L21/6835 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/81 , H01L25/0657 , H01L25/50 , H01L2221/68372 , H01L2224/034 , H01L2224/03612 , H01L2224/0401 , H01L2224/05124 , H01L2224/05147 , H01L2224/05644 , H01L2224/05655 , H01L2224/05666 , H01L2224/1012 , H01L2224/10155 , H01L2224/11003 , H01L2224/11013 , H01L2224/111 , H01L2224/1111 , H01L2224/1112 , H01L2224/1132 , H01L2224/11334 , H01L2224/114 , H01L2224/11438 , H01L2224/1144 , H01L2224/1147 , H01L2224/116 , H01L2224/1161 , H01L2224/11849 , H01L2224/119 , H01L2224/11912 , H01L2224/13014 , H01L2224/1308 , H01L2224/13083 , H01L2224/13084 , H01L2224/131 , H01L2224/13111 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13166 , H01L2224/13171 , H01L2224/13181 , H01L2224/13184 , H01L2224/13187 , H01L2224/1329 , H01L2224/133 , H01L2224/13655 , H01L2224/13666 , H01L2224/13671 , H01L2224/13681 , H01L2224/13684 , H01L2224/1401 , H01L2224/1403 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/81101 , H01L2224/81191 , H01L2224/81192 , H01L2224/81193 , H01L2224/81815 , H01L2224/92125 , H01L2225/06513 , H01L2924/00 , H01L2924/01014 , H01L2924/01029 , H01L2924/0105 , H01L2924/01082 , H01L2924/014 , H01L2924/0781 , H01L2924/381 , H05K3/3436 , H05K3/3478 , H05K2203/0415 , H01L2924/00012 , H01L2924/00014 , H01L2224/14
Abstract: Representative implementations of devices and techniques provide interconnect structures and components for coupling various carriers, printed circuit board (PCB) components, integrated circuit (IC) dice, and the like, using tall and/or fine pitch physical connections. Multiple layers of conductive structures or materials are arranged to form the interconnect structures and components. Nonwettable barriers may be used with one or more of the layers to form a shape, including a pitch of one or more of the layers.
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公开(公告)号:US10163675B2
公开(公告)日:2018-12-25
申请号:US15629460
申请日:2017-06-21
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh
IPC: H01L21/00 , H01L21/683 , H01L25/00 , H01L21/67 , H01L25/065 , H01L23/00
Abstract: Methods and apparatuses for stacking devices in an integrated circuit assembly are provided. A tray for supporting multiple dies of a semiconductor material enables both topside processing and bottom side processing of the dies. The dies can be picked and placed for bonding on a substrate or on die stacks without flipping the dies, thereby avoiding particulate debris from the diced edges of the dies from interfering and contaminating the bonding process. In an implementation, a liftoff apparatus directs a pneumatic flow of gas to lift the dies from the tray for bonding to a substrate, and to previously bonded dies, without flipping the dies. An example system allows processing of both top and bottom surfaces of the dies in a single cycle in preparation for bonding, and then pneumatically lifts the dies up to a target substrate so that topsides of the dies bond to bottom sides of dies of the previous batch, in an efficient and flip-free assembly of die stacks.
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公开(公告)号:US20180350674A1
公开(公告)日:2018-12-06
申请号:US15994435
申请日:2018-05-31
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh
IPC: H01L21/768 , H01L23/00
Abstract: Advanced flat metals for microelectronics are provided. While conventional processes create large damascene features that have a dishing defect that causes failure in bonded devices, example systems and methods described herein create large damascene features that are planar. In an implementation, an annealing process creates large grains or large metallic crystals of copper in large damascene cavities, while a thinner layer of copper over the field of a substrate anneals into smaller grains of copper. The large grains of copper in the damascene cavities resist dishing defects during chemical-mechanical planarization (CMP), resulting in very flat damascene features. In an implementation, layers of resist and layers of a second coating material may be applied in various ways to resist dishing during chemical-mechanical planarization (CMP), resulting in very flat damascene features.
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公开(公告)号:US20180331030A1
公开(公告)日:2018-11-15
申请号:US16041013
申请日:2018-07-20
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh , Zhuowen Sun
IPC: H01L23/522 , H01L23/498 , H01L23/48 , H01L21/768 , H01L21/48 , H01L23/14
CPC classification number: H01L23/5226 , H01L21/486 , H01L21/76802 , H01L21/7682 , H01L23/147 , H01L23/481 , H01L23/49827 , H01L2924/0002 , H01L2924/00
Abstract: An interconnection component includes a semiconductor material layer having a first surface and a second surface opposite the first surface and spaced apart in a first direction. At least two metalized vias extend through the semiconductor material layer. A first pair of the at least two metalized vias are spaced apart from each other in a second direction orthogonal to the first direction. A first insulating via in the semiconductor layer extends from the first surface toward the second surface. The insulating via is positioned such that a geometric center of the insulating via is between two planes that are orthogonal to the second direction and that pass through each of the first pair of the at least two metalized vias. A dielectric material at least partially fills the first insulating via or at least partially encloses a void in the insulating via.
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公开(公告)号:US10103121B2
公开(公告)日:2018-10-16
申请号:US15831231
申请日:2017-12-04
Applicant: Invensas Corporation
Inventor: Cyprian Emeka Uzoh , Rajesh Katkar
IPC: H01L23/00 , H01L25/00 , H01L21/683 , H01L25/065 , H05K3/34
Abstract: Representative implementations of devices and techniques provide interconnect structures and components for coupling various carriers, printed circuit board (PCB) components, integrated circuit (IC) dice, and the like, using tall and/or fine pitch physical connections. Multiple layers of conductive structures or materials are arranged to form the interconnect structures and components. Nonwettable barriers may be used with one or more of the layers to form a shape, including a pitch of one or more of the layers.
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