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公开(公告)号:US06680961B2
公开(公告)日:2004-01-20
申请号:US09918544
申请日:2001-08-01
Applicant: Alex Behfar
Inventor: Alex Behfar
IPC: H01S3083
CPC classification number: H01S5/1071 , Y10S438/94
Abstract: A ring-type laser including a traveling wave cavity which incorporates at least first and second straight cavity sections and at least one curved cavity section. Corresponding first ends of the straight cavity sections are interconnected at a first light-emitting facet, and second ends of the straight sections are interconnected by the curved waveguide. Additional curved and straight sections can be linked to provide various ring configurations.
Abstract translation: 一种包括行波腔的环形激光器,其包括至少第一和第二直腔部分和至少一个弯曲腔部分。 直腔区域的相应的第一端在第一发光小面处相互连接,并且直线部分的第二端通过弯曲波导相互连接。 可以连接附加的弯曲和直线部分以提供各种环形结构。
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公开(公告)号:US06653244B2
公开(公告)日:2003-11-25
申请号:US09955123
申请日:2001-09-19
Applicant: Alex Behfar , Alfred T. Schremer , Cristian B. Stagarescu
Inventor: Alex Behfar , Alfred T. Schremer , Cristian B. Stagarescu
IPC: H01L21469
CPC classification number: G02B6/12002 , B81B2201/047 , B81C99/008 , B81C2201/0159 , G02B6/13 , G02B6/4204 , G02B6/4249 , G03F7/0037 , Y10S438/948 , Y10S438/949 , Y10S438/95
Abstract: Three-dimensional structures of arbitrary shape are fabricated on the surface of a substrate through a series of processing steps wherein a monolithic structure is fabricated in successive layers. A first layer of photoresist material is spun onto a substrate surface and is exposed in a desired pattern corresponding to the shape of a final structure, at a corresponding cross-sectional level in the structure. The layer is not developed after exposure; instead, a second layer of photoresist material is deposited and is also exposed in a desired pattern. Subsequent layers are spun onto the top surface of prior layers and exposed, and upon completion of the succession of layers each defining corresponding levels of the desired structure, the layers are all developed at the same time leaving the three-dimensional structure.
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