公开(公告)号：US20150368803A1

公开(公告)日：2015-12-24

申请号：US14766964

申请日：2014-02-13

Applicant: APPLIED MATERIALS, INC.

Inventor： Kang Sub YIM ,  Mahendra CHHABRA ,  Alexandros T. DEMOS

IPC: C23C16/50 ,  C23C16/24 ,  C23C16/455

CPC classification number: C23C16/50 ,  C23C16/24 ,  C23C16/455 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02274 ,  H01L21/0234 ,  H01L21/02348 ,  H01L21/324

Abstract: A low k porous dielectric film with improved mechanical strength and methods for making the same are disclosed herein. A method of forming a dielectric layer can include positioning a substrate in a processing chamber, delivering a deposition gas to the processing chamber, depositing a dense organosilicon layer using the deposition gas on the surface of the substrate, the dense organosilicon layer comprising a porogenic carbon, forming a pore-forming plasma from a reactant gas, exposing the dense organosilicon layer to the pore-forming plasma to create a porous organosilicon layer, wherein the pore-forming plasma removes at least a portion of the porogenic carbon and exposing the porous organosilicon layer to ultraviolet (UV) radiation.

Abstract translation: 本文公开了具有改进的机械强度的低k多孔介电膜及其制造方法。 形成电介质层的方法可以包括将衬底定位在处理室中，将沉积气体输送到处理室中，使用沉积气体在衬底的表面上沉积致密的有机硅层，致密有机硅层包含致孔碳 ，从反应气体形成成孔等离子体，将致密的有机硅层暴露于成孔等离子体以产生多孔有机硅层，其中造孔等离子体去除至少一部分致孔碳并暴露多孔有机硅 层到紫外（UV）辐射。

公开(公告)号：US20140261703A1

公开(公告)日：2014-09-18

申请号：US14188629

申请日：2014-02-24

Applicant: Applied Materials, Inc.

Inventor： Daemian RAJ ,  Juan Carlos ROCHA-ALVAREZ ,  Jason K. FOSTER ,  Bo XIE ,  Alexandros T. DEMOS

IPC: F16K37/00

CPC classification number: F16K37/0091 ,  Y10T137/0318 ,  Y10T137/8326

Abstract: Methods for detecting valve leakage and apparatus for the same are provided. In one embodiment, a method for detecting a valve leakage includes flowing a gas through a diverter valve, determining a pressure in a gas source provided to the diverter valve, comparing the determined pressure value with an expected pressure value, and generating a signal in response to the comparison.

Abstract translation: 提供了检测阀门泄漏的方法及其设备。 在一个实施例中，一种用于检测阀泄漏的方法包括使气体流过分流阀，确定提供给转向阀的气源中的压力，将所确定的压力值与预期压力值进行比较，并产生响应的信号 比较。