公开(公告)号：US10262884B2

公开(公告)日：2019-04-16

申请号：US15348967

申请日：2016-11-10

Applicant: Applied Materials, Inc.

Inventor： Luke W. Bonecutter ,  David T. Blahnik ,  Paul B. Reuter

IPC: H01L21/67 ,  H01L21/673 ,  H01L21/677

Abstract: Embodiments provide systems, apparatus, and methods for an improved load port that includes a frame supporting a dock and a carrier opener; an elevator operable to raise and lower the carrier opener; an isolation compartment within which the elevator is operable to move, the isolation compartment including a volume isolated from a volume of an equipment front end module (EFEM); and a purge supply within the isolation compartment operable to purge the isolation compartment of reactive gas trapped within the isolation compartment. Numerous additional aspects are disclosed.

公开(公告)号：US20180226284A1

公开(公告)日：2018-08-09

申请号：US15426037

申请日：2017-02-06

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik

IPC: H01L21/677

Abstract: Embodiments provide systems, apparatus, and methods for an improved load port operable to purge air trapped between the substrate carrier door and the carrier door opener. Embodiments include a docking tray adapted to receive a substrate carrier including a carrier door; a door opener adjacent the docking tray and adapted to couple to the carrier door and to open the carrier door, wherein the door opener includes a purge gas inlet port; at least one exhaust outlet port, and a ridge wall defining a perimeter channel in cooperation with a docked substrate carrier, wherein the ridge wall includes openings proximate the ports and wherein the door opener further includes a diverter structure disposed to direct purge gas from the inlet port to at least one of the openings in the ridge wall. Numerous additional aspects are disclosed.

公开(公告)号：US20180130686A1

公开(公告)日：2018-05-10

申请号：US15348947

申请日：2016-11-10

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik ,  Paul B. Reuter ,  Luke W. Bonecutter ,  Douglas B. Baumgarten

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67772 ,  H01L21/67126 ,  H01L21/67196 ,  H01L21/67775

Abstract: An electronic device manufacturing system includes a factory interface that has a load port. The load port may include a panel having an opening therein and a carrier door opener that seals the opening when the door is closed. The carrier door opener may have a groove along an outer portion of the door. The groove may have a cross-sectional shape of a triangular prism frustum. A hollow O-ring may be seated in the groove and is configured to engage the panel when the carrier door opener is closed against the panel. Methods of assembling a factory interface for an electronic device manufacturing system are also provided, as are other aspects.