公开(公告)号：US20190290243A1

公开(公告)日：2019-09-26

申请号：US15933309

申请日：2018-03-22

Applicant: EXO IMAGING INC.

Inventor： Janusz Bryzek ,  Sandeep Akkaraju ,  Yusuf Haque ,  Joe Adam

IPC: A61B8/00 ,  B81B7/00 ,  H01L23/00 ,  B06B1/02 ,  B06B1/06 ,  G01S15/89

Abstract: A transducer assembly includes: a microelectromechanical systems (MEMS) die including a plurality of piezoelectric elements; a complementary metal-oxide-semiconductor (CMOS) die electrically coupled to the MEMS die by a first plurality of bumps and including at least one circuit for controlling the plurality of piezoelectric elements; and a package secured to the CMOS die by an adhesive layer and electrically connected to the CMOS die.

公开(公告)号：US12000728B2

公开(公告)日：2024-06-04

申请号：US17395171

申请日：2021-08-05

Applicant: Exo Imaging, Inc.

Inventor： Sandeep Akkaraju ,  Haesung Kwon ,  Brian Bircumshaw

IPC: G01H11/08 ,  B81B3/00 ,  G01N29/07 ,  G01S15/02 ,  H01L41/113 ,  H01L41/18 ,  H10N30/30 ,  H10N30/85

CPC classification number: G01H11/08 ,  G01N29/07 ,  G01S15/02 ,  H10N30/302 ,  H10N30/852 ,  B81B3/0021

Abstract: An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.

公开(公告)号：US11971477B2

公开(公告)日：2024-04-30

申请号：US17257175

申请日：2019-09-16

Applicant: EXO IMAGING, INC.

Inventor： Yusuf S. Haque ,  Sandeep Akkaraju ,  Janusz Bryzek ,  Larry Skrenes

IPC: G01S15/89 ,  A61B5/00 ,  A61B8/06 ,  A61B8/14 ,  A61N7/02

CPC classification number: G01S15/8934 ,  G01S15/895 ,  A61B5/0095 ,  A61B8/06 ,  A61B8/145 ,  A61N7/02

Abstract: In one example in accordance with the present disclosure, an imaging device is described. The imaging device includes an array of transducers. Each transducer includes an array of piezoelectric elements. Each piezoelectric element transmits pressure waves towards an object to be imaged and receives reflections of the pressure waves off the object to be imaged. The imaging device also includes a transmit channel per one or more piezoelectric elements to generate the pressure waves and a receive channel per one or more piezoelectric elements to process the reflections of the pressure waves. The number of channels are selectively altered to control parameters such as power consumption and temperature.

公开(公告)号：US11819881B2

公开(公告)日：2023-11-21

申请号：US17364397

申请日：2021-06-30

Applicant: Exo Imaging, Inc.

Inventor： Haesung Kwon ,  Brian Bircumshaw ,  Sandeep Akkaraju

IPC: B06B1/06 ,  A61B8/00 ,  H10N30/853 ,  H10N30/857

CPC classification number: B06B1/0603 ,  A61B8/4483 ,  B06B2201/76 ,  H10N30/853 ,  H10N30/857 ,  H10N30/8542 ,  H10N30/8548 ,  H10N30/8554

Abstract: A micromachined ultrasonic transducer (MUT) which comprises a first piezoelectric layer and a second piezoelectric layer. The first piezoelectric layer is disposed between a first electrode and a second electrode. The second piezoelectric layer is disposed between the second electrode and a third electrode. At least the first electrode has first and second ends along a first axis, one or more of which is defined by a radius of curvature R. A second axis normal to the first passes through a midpoint of the first axis. A half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode. A total width of the first electrode at its narrowest point along the first axis is at most 2L such that the first electrode has a concave shape. R/L, is greater than 1.

公开(公告)号：US20220066026A1

公开(公告)日：2022-03-03

申请号：US17522206

申请日：2021-11-09

Applicant: EXO IMAGING, INC.

Inventor： Yusuf Haque ,  Sandeep Akkaraju ,  Janusz Bryzek ,  Brian Bircumshaw

IPC: G01S15/89 ,  A61B8/00 ,  G01N29/24 ,  H01L41/09 ,  G01S7/52 ,  B06B1/06 ,  B81B3/00 ,  G01N29/26 ,  G01N29/34 ,  G10K11/34

Abstract: An imaging device includes a transducer that includes an array of piezoelectric elements formed on a substrate. Each piezoelectric element includes at least one membrane suspended from the substrate, at least one bottom electrode disposed on the membrane, at least one piezoelectric layer disposed on the bottom electrode, and at least one top electrode disposed on the at least one piezoelectric layer. Adjacent piezoelectric elements are configured to be isolated acoustically from each other. The device is utilized to measure flow or flow along with imaging anatomy.

公开(公告)号：US11143547B2

公开(公告)日：2021-10-12

申请号：US16837800

申请日：2020-04-01

Applicant: eXo Imaging, Inc.

Inventor： Sandeep Akkaraju ,  Haesung Kwon ,  Brian Bircumshaw

IPC: G01H11/08 ,  H01L41/18 ,  G01N29/07 ,  G01S15/02 ,  H01L41/113 ,  B81B3/00

Abstract: An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.

公开(公告)号：US20210124044A1

公开(公告)日：2021-04-29

申请号：US17257175

申请日：2019-09-16

Applicant: EXO IMAGING, INC.

Inventor： Yusuf S. Haque ,  Sandeep Akkaraju ,  Janusz Bryzek ,  Larry Skrenes

IPC: G01S15/89

Abstract: In one example in accordance with the present disclosure, an imaging device is described. The imaging device includes an array of transducers. Each transducer includes an array of piezoelectric elements. Each piezoelectric element transmits pressure waves towards an object to be imaged and receives reflections of the pressure waves off the object to be imaged. The imaging device also includes a transmit channel per one or more piezoelectric elements to generate the pressure waves and a receive channel per one or more piezoelectric elements to process the reflections of the pressure waves. The number of channels are selectively altered to control parameters such as power consumption and temperature.

公开(公告)号：US10966683B2

公开(公告)日：2021-04-06

申请号：US15933309

申请日：2018-03-22

Applicant: EXO IMAGING INC.

Inventor： Janusz Bryzek ,  Sandeep Akkaraju ,  Yusuf Haque ,  Joe Adam

IPC: B06B1/06 ,  A61B8/00 ,  H01L23/00 ,  B06B1/02 ,  G01S15/89 ,  B81B7/00

Abstract: A transducer assembly includes: a microelectromechanical systems (MEMS) die including a plurality of piezoelectric elements; a complementary metal-oxide-semiconductor (CMOS) die electrically coupled to the MEMS die by a first plurality of bumps and including at least one circuit for controlling the plurality of piezoelectric elements; and a package secured to the CMOS die by an adhesive layer and electrically connected to the CMOS die.

公开(公告)号：US10656007B2

公开(公告)日：2020-05-19

申请号：US15951118

申请日：2018-04-11

Applicant: EXO IMAGING INC.

Inventor： Sandeep Akkaraju ,  Haesung Kwon ,  Brian Bircumshaw

IPC: G01H11/08 ,  H01L41/18 ,  G01N29/07 ,  G01S15/02 ,  H01L41/113 ,  B81B3/00

Abstract: An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.

公开(公告)号：US20180154394A1

公开(公告)日：2018-06-07

申请号：US15826606

申请日：2017-11-29

Applicant: EXO IMAGING INC.

Inventor： Yusuf Haque ,  Sandeep Akkaraju ,  Janusz Bryzek

IPC: B06B1/06 ,  B06B1/02 ,  G01S15/89 ,  G01S7/521 ,  A61B8/00

CPC classification number: A61B8/4494 ,  A61B8/0883 ,  A61B8/145 ,  A61B8/4427 ,  A61B8/4472 ,  A61B8/4483 ,  A61B8/4488 ,  A61B8/461 ,  A61B8/488 ,  A61B8/5207 ,  A61B8/546 ,  B06B1/0215 ,  B06B1/0238 ,  B06B1/0629 ,  B06B1/0662 ,  B06B1/0692 ,  B06B2201/76 ,  G01S7/52046 ,  G01S7/52079 ,  G01S7/521 ,  G01S15/8925 ,  H01L41/053 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/098

Abstract: An imaging device includes a two dimensional array of piezoelectric elements. Each piezoelectric element includes: a piezoelectric layer; a bottom electrode disposed on a bottom side of the piezoelectric layer and configured to receive a transmit signal during a transmit mode and develop an electrical charge during a receive mode; and a first top electrode disposed on a top side of the piezoelectric layer; and a first conductor, wherein the first top electrodes of a portion of the piezoelectric elements in a first column of the two dimensional array are electrically coupled to the first conductor.