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公开(公告)号：US12263507B2
公开(公告)日：2025-04-01
申请号：US17095333
申请日：2020-11-11
Applicant: eXo Imaging, Inc.
Inventor： Brian Bircumshaw , Sandeep Akkaraju
IPC: B06B1/00 , B06B1/06 , G01S7/52 , G01S15/89 , H10N30/073 , H10N30/088 , H10N30/80 , H10N30/853 , H10N30/87
Abstract: The present disclosure provides methods to integrate piezoelectric micromachined ultrasonic transducer (pMUT) arrays with an application-specific integrated circuit (ASIC) using thermocompression or eutectic/solder bonding. In an aspect, the present disclosure provides a device comprising a first substrate and a second substrate, the first substrate comprising a pMUT array and the second substrate comprising an electrical circuit, wherein the first substrate and the second substrate are bonded together using thermocompression, wherein any set of individual PMUTs of PMUT array is addressable. In another aspect, the present disclosure provides a device comprising a first substrate and a second substrate, the first substrate comprising a pMUT array and the second substrate comprising an electrical circuit, wherein the first substrate and the second substrate are bonded together using eutectic or solder bonding, wherein any set of individual PMUTs of the PMUT array is addressable.
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2.发明授权公开(公告)号：US11998950B2
公开(公告)日：2024-06-04
申请号：US17018304
申请日：2020-09-11
Applicant: eXo Imaging, Inc.
Inventor： Brian Bircumshaw , Sandeep Akkaraju , Haesung Kwon
CPC classification number: B06B1/0651 , B06B1/0662 , B06B1/0666 , H10N30/50 , H10N30/871 , H10N30/10516 , H10N30/877
Abstract: Methods for improving the electromechanical coupling coefficient and bandwidth of micromachined ultrasonic transducers, or MUTs, are presented as well as methods of manufacture of the MUTs improved by the presented methods.
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公开(公告)号：US11199623B2
公开(公告)日：2021-12-14
申请号：US17153631
申请日：2021-01-20
Applicant: EXO IMAGING, INC.
Inventor： Yusuf Haque , Sandeep Akkaraju , Janusz Bryzek , Brian Bircumshaw
IPC: G01S15/89 , A61B8/00 , G01N29/24 , H01L41/09 , G01S7/52 , B06B1/06 , B81B3/00 , G01N29/26 , G01N29/34 , G10K11/34 , A61B8/08 , G01N29/02 , G01N29/06 , G01N29/04
Abstract: An imaging device includes a transducer that includes an array of piezoelectric elements formed on a substrate. Each piezoelectric element includes at least one membrane suspended from the substrate, at least one bottom electrode disposed on the membrane, at least one piezoelectric layer disposed on the bottom electrode, and at least one top electrode disposed on the at least one piezoelectric layer. Adjacent piezoelectric elements are configured to be isolated acoustically from each other. The device is utilized to measure flow or flow along with imaging anatomy.
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公开(公告)号：US10648852B2
公开(公告)日：2020-05-12
申请号：US15951121
申请日：2018-04-11
Applicant: EXO IMAGING INC.
Inventor： Sandeep Akkaraju , Haesung Kwon , Brian Bircumshaw
IPC: G01N29/00 , H01L41/00 , G01H11/08 , G01S15/02 , G01N29/07 , H01G5/00 , H01L41/113 , H01L41/18 , B81B3/00
Abstract: A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.
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公开(公告)号：US12274174B2
公开(公告)日：2025-04-08
申请号：US17159538
申请日：2021-01-27
Applicant: eXo Imaging, Inc.
Inventor： Haesung Kwon , Brian Bircumshaw , Sandeep Akkaraju
Abstract: Disclosed herein are ultrasonic transducer systems with hybrid contacts comprising: an ultrasonic transducer element comprising a substrate and a membrane; an electrical circuitry; and one or more contacts connected to the ultrasonic transducer element and the electrical circuitry, wherein the one or more contacts are: designed geometrically using a set of rules; arranged with respect to the membrane based on the set of rules or a second set of rules, or both.
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Patent Agency Ranking
公开(公告)号：US11975360B2
公开(公告)日：2024-05-07
申请号：US17936585
申请日：2022-09-29
Applicant: Exo Imaging, Inc.
Inventor： Haesung Kwon , Brian Bircumshaw , Sandeep Akkaraju
CPC classification number: B06B1/0622 , G01H11/08 , G01N29/2406 , B06B1/0292 , H10N30/2047
Abstract: Described are micromachined ultrasonic transducers (MUTs) with convex or concave electrodes, which have enhanced pressure amplitude and frequency response behavior when driven at fundamental and harmonic frequencies, as well as methods of making the same.
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7.发明公开公开(公告)号：US20240074733A1
公开(公告)日：2024-03-07
申请号：US17901461
申请日：2022-09-01
Applicant: Exo Imaging, Inc.
Inventor： Tanya L. Frane , Sandeep Akkaraju , Brian Bircumshaw , Janusz Bryzek , Arun Nagdev
IPC: A61B8/00
CPC classification number: A61B8/467 , A61B8/4254
Abstract: An apparatus, a method, and computer-implemented media. The apparatus is to receive information based on haptic input to a surface of a housing of an ultrasound imaging device; and based on the information, execute an ultrasound exam function corresponding to the haptic input, the ultrasound exam function to control an ultrasound image on a display of a computing system.
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公开(公告)号：US11712222B2
公开(公告)日：2023-08-01
申请号：US17067139
申请日：2020-10-09
Applicant: eXo Imaging, Inc.
Inventor： Yusuf Haque , Sandeep Akkaraju , Janusz Bryzek , Brian Bircumshaw
IPC: B06B1/06 , H10N30/00 , A61B8/00 , G01S7/52 , H10N30/88 , H10N30/20 , A61B8/08 , A61B8/14 , B06B1/02 , G01S7/521 , G01S15/89
CPC classification number: A61B8/4494 , A61B8/0883 , A61B8/145 , A61B8/4483 , A61B8/4488 , A61B8/461 , A61B8/488 , A61B8/5207 , A61B8/546 , B06B1/0215 , B06B1/0238 , B06B1/0629 , B06B1/0662 , B06B1/0692 , G01S7/521 , G01S7/52046 , G01S7/52079 , G01S15/8925 , H10N30/1051 , H10N30/2047 , H10N30/2048 , H10N30/88 , A61B8/4427 , A61B8/4472 , B06B2201/76
Abstract: An imaging device includes a two dimensional array of piezoelectric elements. Each piezoelectric element includes: a piezoelectric layer; a bottom electrode disposed on a bottom side of the piezoelectric layer and configured to receive a transmit signal during a transmit mode and develop an electrical charge during a receive mode; and a first top electrode disposed on a top side of the piezoelectric layer; and a first conductor, wherein the first top electrodes of a portion of the piezoelectric elements in a first column of the two dimensional array are electrically coupled to the first conductor.
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公开(公告)号：US20220314275A1
公开(公告)日：2022-10-06
申请号：US17218656
申请日：2021-03-31
Applicant: eXo Imaging, Inc.
Inventor： Haesung Kwon , Brian Bircumshaw , Sandeep Akkaraju
Abstract: Described are micromachined ultrasonic transducers (MUTs) with convex or concave electrodes, which have enhanced pressure amplitude and frequency response behavior when driven at fundamental and harmonic frequencies, as well as methods of making the same.
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公开(公告)号：US20210278530A1
公开(公告)日：2021-09-09
申请号：US17153631
申请日：2021-01-20
Applicant: EXO IMAGING, INC.
Inventor： Yusuf Haque , Sandeep Akkaraju , Janusz Bryzek , Brian Bircumshaw
Abstract: An imaging device includes a transducer that includes an array of piezoelectric elements formed on a substrate. Each piezoelectric element includes at least one membrane suspended from the substrate, at least one bottom electrode disposed on the membrane, at least one piezoelectric layer disposed on the bottom electrode, and at least one top electrode disposed on the at least one piezoelectric layer. Adjacent piezoelectric elements are configured to be isolated acoustically from each other. The device is utilized to measure flow or flow along with imaging anatomy.
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