公开(公告)号：US20140001372A1

公开(公告)日：2014-01-02

申请号：US13902386

申请日：2013-05-24

Applicant: FEI Company

Inventor： Gregory A. Schwind ,  N. William Parker

IPC: H01J27/20

CPC classification number: H01J37/21 ,  H01J27/205 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/082 ,  H01J2237/0827 ,  H01J2237/31749

Abstract: A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.

Abstract translation: 具有气室的高亮度离子源包括多个通道，其中多个通道各自具有不同的气体。 电子束通过一个通道以提供某种物质的离子用于处理样品。 可以通过将电子引导到具有不同气体种类的另一个通道并用第二种离子的离子处理样品来快速改变离子种类。 偏转板用于将电子束对准气体室，从而允许聚焦离子束中的气体物质快速切换。

公开(公告)号：US20130181140A1

公开(公告)日：2013-07-18

申请号：US13669626

申请日：2012-11-06

Applicant: FEI Company

Inventor： N. William Parker ,  Mark W. Utlaut ,  David William Tuggle ,  Jeremy Graham

IPC: G21K1/00

CPC classification number: G21K1/00 ,  H01J37/09 ,  H01J2237/045 ,  H01J2237/0453

Abstract: An improved beam-defining aperture structure and method for fabrication is realized. An aperture opening is made in a thin conductive film positioned over a cavity in a support substrate, where the aperture size and shape is determined by the opening in the conductive film and not determined by the substrate.

Abstract translation: 实现了改进的光束限定孔结构和制造方法。 开口开口形成在位于支撑衬底中的空腔上方的薄导电膜中，其中孔径尺寸和形状由导电膜中的开口确定并且不由衬底确定。

公开(公告)号：US10366860B2

公开(公告)日：2019-07-30

申请号：US15901858

申请日：2018-02-21

Applicant: FEI Company

Inventor： N. William Parker ,  Mark W. Utlaut ,  Laurens Franz Taemsz Kwakman ,  Thomas G. Miller

IPC: H01J35/08 ,  G01N23/046 ,  G21K7/00 ,  H01J35/14

Abstract: An x-ray target, a method of using the x-ray target, and a computer program product with instructions for carrying out a method of using the x-ray target. The x-ray target includes a substrate made from a soft x-ray producing material and a high aspect ratio structure made from a hard x-ray producing material. The hard x-ray producing material is embedded in the substrate, formed on the substrate, cantilevered out from the edge of the substrate, or any combination thereof. The high aspect ratio structure comprises a plurality of high aspect ratio structures arranged in one or more grids or arrays, and the high aspect ratio structures in one of the one or more grids or arrays are arranged to form a Hadamard matrix structure.

公开(公告)号：US20180033589A1

公开(公告)日：2018-02-01

申请号：US15224628

申请日：2016-07-31

Applicant: FEI Company

Inventor： Frederick H. Schamber ,  Cornelis van Beek ,  N. William Parker

IPC: H01J37/244 ,  H01J37/26 ,  H01J37/20 ,  G01N23/225 ,  H01J37/16 ,  H01J37/18

CPC classification number: H01J37/244 ,  G01N23/203 ,  G01N23/2252 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/164 ,  H01J2237/2442 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24578 ,  H01J2237/2807

Abstract: An electron microscope including a vacuum chamber for containing a specimen to be analyzed, an optics column, including an electron source and a final probe forming lens, for focusing electrons emitted from the electron source, a specimen stage positioned in the vacuum chamber under the probe forming lens for holding the specimen, and multiple x-ray detectors positioned within the vacuum chamber, at different takeoff angles with respect to the sample's x-ray emission position in the chamber. Takeoff angles are provided to improve the counting efficiency of the various sensors. Multiple detectors of different types may be supported within the vacuum chamber on a mechanical support system, which may be adjustable. A method includes operating the sensors to optimize the time required for accurate x-ray counting by gathering data at the multiple takeoff angles.

公开(公告)号：US09224569B2

公开(公告)日：2015-12-29

申请号：US13902386

申请日：2013-05-24

Applicant: FEI Company

Inventor： Gregory A. Schwind ,  N. William Parker

IPC: H01J49/14 ,  H01J27/20 ,  H01J37/08

CPC classification number: H01J37/21 ,  H01J27/205 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/082 ,  H01J2237/0827 ,  H01J2237/31749

Abstract: A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.

Abstract translation: 具有气室的高亮度离子源包括多个通道，其中多个通道各自具有不同的气体。 电子束通过一个通道以提供某种物质的离子用于处理样品。 可以通过将电子引导到具有不同气体种类的另一个通道并用第二种离子的离子处理样品来快速改变离子种类。 偏转板用于将电子束对准气体室，从而允许聚焦离子束中的气体物质快速切换。

公开(公告)号：US20130307960A1

公开(公告)日：2013-11-21

申请号：US13745100

申请日：2013-01-18

Applicant: FEI Company

Inventor： Alan Bahm ,  N. William Parker ,  Mark W. Utlaut

IPC: H04N5/232

CPC classification number: H04N5/23216 ,  G02B21/365 ,  H01J37/265 ,  H01J2237/22 ,  H01J2237/28 ,  H04N1/62

Abstract: An apparatus to permit a viewer of a digital microscopy original image to manipulate the display and/or the microscope to obtain an enhanced view of a region of interest within the original image. In one preferred embodiment a spotlight mode matches the gray shade scale for a spotlight region-of-interest to the pixel intensity variation present in the spotlight region. The gray shade scale used for the spotlight mode may then be generalized to the original image. In a preferred embodiment, spotlight mode provides an easy mechanism for permitting a user to command a re-imaging of a selected spotlight region from a displayed image. Such re-imaging may permit the use of imaging parameter selections that better fit the spotlight region.

Abstract translation: 一种允许数字显微镜原始图像的观看者操纵显示器和/或显微镜以获得原始图像内的感兴趣区域的增强视图的装置。 在一个优选实施例中，聚光灯模式将焦点区域的灰度级别与聚光灯区域中存在的像素强度变化匹配。 然后可以将用于聚光灯模式的灰度级别广义化为原始图像。 在优选实施例中，聚光灯模式提供了一种容易的机构，用于允许用户从显示的图像命令对所选聚光灯区域的重新成像。 这种重新成像可以允许使用更适合聚光灯区域的成像参数选择。