INTERPOSER HAVING MOLDED LOW CTE DIELECTRIC
    21.
    发明申请
    INTERPOSER HAVING MOLDED LOW CTE DIELECTRIC 有权
    具有成型低CTE电介质的插件

    公开(公告)号:US20120267751A1

    公开(公告)日:2012-10-25

    申请号:US13091800

    申请日:2011-04-21

    Abstract: A method for making an interconnection component is disclosed, including forming a plurality of metal posts extending away from a reference surface. Each post is formed having a pair of opposed end surface and an edge surface extending therebetween. A dielectric layer is formed contacting the edge surfaces and filling spaces between adjacent ones of the posts. The dielectric layer has first and second opposed surfaces adjacent the first and second end surfaces. The dielectric layer has a coefficient of thermal expansion of less than 8 ppm/° C. The interconnection component is completed such that it has no interconnects between the first and second end surfaces of the posts that extend in a lateral direction. First and second pluralities of wettable contacts are adjacent the first and second opposed surfaces. The wettable contacts are usable to bond the interconnection component to a microelectronic element or a circuit panel.

    Abstract translation: 公开了一种用于制造互连部件的方法,包括形成远离参考表面延伸的多个金属柱。 每个柱形成具有一对相对的端面和在它们之间延伸的边缘表面。 形成接触边缘表面和相邻柱之间的填充空间的电介质层。 电介质层具有邻近第一和第二端面的第一和第二相对表面。 电介质层的热膨胀系数小于8ppm /℃。互连部件完成,使得它们在横向方向上延伸的柱的第一和第二端面之间没有互连。 第一和第二多个可湿接触部分邻近第一和第二相对表面。 可湿接触可用于将互连部件连接到微电子元件或电路板。

    DUAL WAFER SPIN COATING
    23.
    发明申请
    DUAL WAFER SPIN COATING 有权
    双面旋涂

    公开(公告)号:US20120152433A1

    公开(公告)日:2012-06-21

    申请号:US12974611

    申请日:2010-12-21

    CPC classification number: H01L22/12 H01L21/67092

    Abstract: A method of bonding a first substrate and a second substrate includes the steps of rotating first substrate with an adhesive mass thereon, and second substrate contacting the mass and overlying the first substrate, controlling a vertical height of a heated control platen spaced apart from and not contacting the second substrate so as to control a temperature of the adhesive mass, so as to at least one of bond the first and second substrates in alignment with one another, or achieve a sufficiently planar adhesive interface between the first and second substrates.

    Abstract translation: 接合第一基板和第二基板的方法包括以下步骤:使第一基板与其上的粘合剂质量物质旋转,第二基板接触物料并覆盖第一基板,控制加热的控制台板的垂直高度, 使所述第二基板接触以控制所述粘合剂物料的温度,以便使所述第一和第二基板彼此对准的至少一个接合,或在所述第一和第二基板之间实现足够平坦的粘合界面。

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